Hafnium compound-containing sol-gel liquid and hafnia-containing film

Patent metadata

Field	Value
Publication number	US-2025115488-A1
Application number	US-202318832938-A
Country	US
Kind code	A1
Filing date	Jan 24, 2023
Priority date	Jan 31, 2022
Publication date	Apr 10, 2025
Grant date	—

Abstract

A hafnium compound-containing sol-gel liquid contains an alcohol as a solvent and a hafnium compound as a hafnia source, in which the hafnium compound-containing sol-gel liquid contains one or two or more elements M selected from the group consisting of Zr, Ti, and Nb, a mass ratio WM/WHf of a content WM of the elements M to a content WHf of Hf as a metal component is within a range of 0.2% or more and 5.0% or less. A hafnia-containing film containing hafnia (HfO2) and one or two or more elements M selected from the group consisting of Zr, Ti, and Nb, and in which a mass ratio WM/WHfO2 of a content WM of the elements M to a content WHfO2 of the HfO2 is within a range of 0.05% or more and 5.0% or less.

First claim

1 . A hafnium compound-containing sol-gel liquid comprising:
an alcohol as a solvent; and a hafnium compound as a hafnia source, wherein the hafnium compound-containing sol-gel liquid contains one or two or more elements M selected from a group consisting of Zr, Ti, and Nb, a mass ratio W M /W Hf of a content W M of the elements M to a content W Hf of Hf as a metal component is within a range of 0.2% or more and 5.0% or less.

2 . The hafnium compound-containing sol-gel liquid according to claim 1 ,
wherein the alcohol as a solvent is a lower alcohol having 5 or less carbon atoms.

3 . The hafnium compound-containing sol-gel liquid according to claim 1 ,
wherein a content of the hafnium compound is within a range of 0.05 wt % or more and 10 wt % or less.

4 . The hafnium compound-containing sol-gel liquid according to claim 1 , further comprising:
a polyalcohol having one or more ether groups in a molecule as a wettability improver.

5 . The hafnium compound-containing sol-gel liquid according to claim 4 ,
wherein a content of the polyalcohol is within a range of 0.05 wt % or more and 20 wt % or less.

6 . The hafnium compound-containing sol-gel liquid according to claim 1 , further comprising:
a stabilizer.

7 . A hafnia-containing film comprising:
hafnia (HfO 2 ); and one or two or more elements M selected from a group consisting of Zr, Ti, and Nb, wherein a mass ratio W M /W HfO2 of a content W M of the elements M to a content W HfO2 of the HfO 2 is within a range of 0.05% or more and 5.0% or less.

Assignees

• Mitsubishi Materials Corp

Inventors

• Tsujiuchi Naoto

Classifications

• B01J13/0047

  containing a metal oxide · CPC title

• B01J13/0026

  containing a liquid organic phase · CPC title

• C23C18/1254 Primary

  Sol or sol-gel processing · CPC title

• C01G27/02 Primary

  Oxides · CPC title

• C23C18/1216 Primary

  Metal oxides (C23C18/1212 takes precedence) · CPC title