X-ray inspection device and calibration method thereof

Patent metadata

Field	Value
Publication number	US-2025093283-A1
Application number	US-202418883429-A
Country	US
Kind code	A1
Filing date	Sep 12, 2024
Priority date	Sep 20, 2023
Publication date	Mar 20, 2025
Grant date	—

Abstract

An X-ray inspection device includes an X-ray detection element that outputs a pulse signal with a peak value corresponding to an energy of an X-ray passing through an inspection region, an X-ray detection unit consisting of a plurality of pixels that detect the number of the pulse signals exceeding a predetermined threshold voltage, among the pulse signals output from the X-ray detection element, a storage unit that stores, for each pixel, a correspondence relationship between a value of a control parameter to cause the number of the pulse signals exceeding the threshold voltage to change and the number of the pulse signals detected by respective pixels, and an output unit that outputs abnormal pixel information based on the correspondence relationship between the value of the control parameter and the number of the pulse signals detected by respective pixels, the correspondence relationship being read out from the storage unit.

First claim

What is claimed is:

1 . An X-ray inspection device comprising:
an X-ray generation source that irradiates an inspection region with an X-ray; an X-ray detector that detects the X-ray passing through the inspection region, the X-ray detector including an X-ray detection element that outputs a pulse signal with a peak value corresponding to an energy of the X-ray passing through the inspection region and an X-ray detection unit consisting of a plurality of pixels that detect the number of the pulse signals exceeding a predetermined threshold voltage, among the pulse signals output from the X-ray detection element; a storage unit that stores, for each pixel, a correspondence relationship between a value of a control parameter to cause the number of the pulse signals exceeding the threshold voltage to change and the number of the pulse signals detected by respective pixels; and an abnormal pixel information output unit that outputs abnormal pixel information to specify an abnormal pixel based on the correspondence relationship between the value of the control parameter and the number of the pulse signals detected by respective pixels, the correspondence relationship being read out from the storage unit.

2 . An X-ray inspection device comprising:
an X-ray generation source that irradiates an inspection region with an X-ray; an X-ray detector that detects the X-ray passing through the inspection region; a display unit that displays various types of information; and an input/output unit that is connectable to an external device, wherein the X-ray detector includes an X-ray detection element that outputs a pulse signal with a peak value corresponding to an energy of the X-ray passing through the inspection region, an X-ray detection unit consisting of a plurality of pixels that detect the number of the pulse signals exceeding a predetermined threshold voltage, among the pulse signals output from the X-ray detection element, and a control parameter control unit that performs control of changing a value of a control parameter to cause the number of the pulse signals exceeding the threshold voltage to change, and the external device includes a storage unit that stores, for each pixel, a correspondence relationship between the value of the control parameter controlled by the control parameter control unit and the number of the pulse signals detected by respective pixels, which is input via the input/output unit, and an abnormal pixel information output unit that generates abnormal pixel information to specify an abnormal pixel, based on the correspondence relationship between the value of the control parameter and the number of the pulse signals detected by respective pixels, the correspondence relationship being read out from the storage unit, and outputs the abnormal pixel information to the display unit via the input/output unit.

3 . The X-ray inspection device according to claim 1 ,
wherein the control parameter is the threshold voltage or a tube voltage of the X-ray generation source.

4 . The X-ray inspection device according to claim 2 ,
wherein the control parameter is the threshold voltage or a tube voltage of the X-ray generation source.

5 . The X-ray inspection device according to claim 1 ,
wherein the control parameter is any one of the threshold voltage, a tube voltage of the X-ray generation source, or a type of a radiation quality variable body set up in the inspection region.

6 . The X-ray inspection device according to claim 2 ,
wherein the control parameter is any one of the threshold voltage, a tube voltage of the X-ray generation source, or a type of a radiation quality variable body set up in the inspection region.

7 . The X-ray inspection device according to claim 5 ,
wherein the control parameter is the threshold voltage, and the radiation quality variable body has a known absorption edge, the X-ray inspection device further comprising: a control parameter value specifying unit that specifies, for each pixel, the threshold voltage at which an inclination of the number of the pulse signals detected by respective pixels, which is read out from the storage unit, with respect to the control parameter changes discontinuously; and a calibration information output unit that outputs the threshold voltage specified by the control parameter value specifying unit in association with the known absorption edge, as calibration information for respective pixels.

8 . The X-ray inspection device according to claim 6 ,
wherein the control parameter is the threshold voltage, and the radiation quality variable body has a known absorption edge, the X-ray inspection device further comprising: a control parameter value specifying unit that specifies, for each pixel, the threshold voltage at which an inclination of the number of the pulse signals detected by respective pixels, which is read out from the storage unit, with respect to the control parameter changes discontinuously; and a calibration information output unit that outputs the threshold voltage specified by the control parameter value specifying unit in association with the known absorption edge, as calibration information for respective pixels.

9 . The X-ray inspection device according to claim 3 ,
wherein the control parameter is the threshold voltage, the X-ray inspection device further comprising: a control parameter value specifying unit that specifies, for each pixel, a minimum threshold voltage at which the number of pulse signals detected by respective pixels, which is read out from the storage unit, is smaller than a predetermined value; and a calibration information output unit that outputs the threshold voltage specified by the control parameter value specifying unit in association with the tube voltage, as calibration information for respective pixels.

10 . The X-ray inspection device according to claim 4 ,
wherein the control parameter is the threshold voltage, the X-ray inspection device further comprising: a control parameter value specifying unit that specifies, for each pixel, a minimum threshold voltage at which the number of pulse signals detected by respective pixels, which is read out from the storage unit, is smaller than a predetermined value; and a calibration information output unit that outputs the threshold voltage specified by the control parameter value specifying unit in association with the tube voltage, as calibration information for respective pixels.

11 . The X-ray inspection device according to claim 3 ,
wherein the control parameter is the tube voltage, the X-ray inspection device further comprising: a control parameter value specifying unit that specifies, for each pixel, a maximum tube voltage at which the number of pulse signals detected by respective pixels, which is read out from the storage unit, is smaller than a predetermined value; and a calibration information output unit that outputs the tube voltage specified by the control parameter value specifying unit in association with the threshold voltage, as calibration information for respective pixels.

12 . The X-ray inspection device according to claim 4 ,
wherein the control parameter is the tube voltage, the X-ray inspection device further comprising: a control parameter value specifying unit that specifies, for each pixel, a maximum tube voltage at which the number of pulse signals detected by respective pixels, which is read out from the storage unit, is smaller than a predetermined value; and a calibration information output unit that outputs the tube voltage specified by the control parameter value specifying unit in association with the thres

Assignees

• Anritsu Corp

Inventors

• Ohashi Akira

Classifications

• G01N23/083 Primary

  the radiation being X-rays · CPC title

• G01N2223/643

  object on conveyor · CPC title

• G01N2223/204

  source created from radiated target · CPC title

• G01N2223/50

  Detectors · CPC title

• G01N2223/303

  calibrating, standardising · CPC title