Sensor, sensor system, and electronic device

Patent metadata

Field	Value
Publication number	US-2025076089-A1
Application number	US-202418731900-A
Country	US
Kind code	A1
Filing date	Jun 3, 2024
Priority date	Aug 29, 2023
Publication date	Mar 6, 2025
Grant date	—

Abstract

According to one embodiment, a sensor includes a base including a first face, an inner structure fixed to the first face, a fixed portion fixed to the first face, a movable portion supported by the fixed portion, a plurality of fixed electrodes fixed to the first face, and a plurality of connect members. A first gap is provided between the first face and the movable portion. The movable portion includes a first annular portion and a first connect portion. The plurality of fixed electrodes include a first fixed electrode and a first opposing fixed electrode that face the first annular portion. The inner structure includes a first conductive portion. The first conductive portion includes a first region and a first opposing region. The plurality of connect members include a first connect member and a first opposing connect member.

First claim

What is claimed is:

1 . A sensor, comprising:
a base including a first face; an inner structure fixed to the first face; a fixed portion fixed to the first face; a movable portion supported by the fixed portion; a plurality of fixed electrodes fixed to the first face; and a plurality of connect members, a first gap being provided between the first face and the movable portion, the fixed portion being provided around the inner structure around a first center of the inner structure in a first plane along the first face, the movable portion including a first annular portion and a first connect portion, the first annular portion being provided around the fixed portion with the fixed portion as a center, the first connect portion being provided between the fixed portion and the first annular portion, the first connect portion directly or indirectly connecting the first annular portion to the fixed portion, the plurality of fixed electrodes including a first fixed electrode and a first opposing fixed electrode, the first fixed electrode and the first opposing fixed electrode facing the first annular portion, the first center being provided between the first fixed electrode and the first opposing fixed electrode, the inner structure including a first conductive portion, the first conductive portion including a first region and a first opposing region, the first center being provided between the first region and the first opposing region, the plurality of connect members including a first connect member and a first opposing connect member, the first connect member electrically connecting the first region and the first fixed electrode, and the first opposing connect member electrically connecting the first opposing region and the first opposing fixed electrode.

2 . The sensor according to claim 1 , wherein
the first opposing region is continuous with the first region.

3 . The sensor according to claim 1 , wherein
the first conductive portion further includes a first connect region, the first connect region is continuous with the first region and the first opposing region, and at least a part of the first connect region extends along a circumferential direction centered on the first center.

4 . The sensor according to claim 3 , wherein
a first region length in a radial direction of at least a part of the first region is longer than a first connect region length in the radial direction of the at least a part of the first connect region, a first opposing region length in the radial direction of at least a part of the first opposing region is longer than the first connect region length, and the radial direction passes through the first center and is along the first plane.

5 . The sensor according to claim 1 , wherein
the first conductive portion is annular centered on the first center.

6 . The sensor according to claim 1 , wherein
the plurality of fixed electrodes include a second fixed electrode and a second opposing fixed electrode, the second fixed electrode and the second opposing fixed electrode facing the first annular portion, the first center is provided between the second fixed electrode and the second opposing fixed electrode, the inner structure further includes a second conductive portion, the second conductive portion includes a second region and a second opposing region, the first center is provided between the second region and the second opposing region, the plurality of connect members further include a second connect member and a second opposing connect member, the second connect member electrically connects the second region and the second fixed electrode, and the second opposing connect member electrically connects the second opposing region and the second opposing fixed electrode.

7 . The sensor according to claim 6 , wherein
a second direction from the second fixed electrode to the second opposing fixed electrode crosses a first direction from the first fixed electrode to the first opposing fixed electrode.

8 . The sensor according to claim 7 , wherein
an angle between the first direction and the second direction is not less than 80 degrees and not more than 100 degrees.

9 . The sensor according to claim 6 , wherein
at least a part of the second region overlaps the first region in a circumferential direction centered on the first center.

10 . The sensor according to claim 6 , wherein
at least a part of the second region is provided between the first region and the first opposing region in a circumferential direction centered on the first center, and at least a part of the first region is provided between the second region and the second opposing region in the circumferential direction.

11 . The sensor according to claim 6 , wherein
the second opposing region is continuous with the second region.

12 . The sensor according to claim 6 , wherein
the second conductive portion further includes a second connect region, the second connect region is continuous with the second region and the second opposing region, and at least a part of the second connect region extends along a circumferential direction centered on the first center.

13 . The sensor according to claim 12 , wherein
a second region length in a radial direction of at least a part of the second region is longer than a second connect region length in the radial direction of the at least a part of the second connect region, a second opposing region length in the radial direction of at least a part of the second opposing region is longer than the second connect region length, and the radial direction passes through the first center and is along the first plane.

14 . The sensor according to claim 6 , wherein
at least a part of the second fixed electrode is provided between the first fixed electrode and the first opposing fixed electrode in a circumferential direction centered on the first center, and at least a part of the first fixed electrode is provided between the second fixed electrode and the second opposing fixed electrode in the circumferential direction.

15 . The sensor according to claim 6 , wherein
the second conductive portion is annular centered on the first center.

16 . The sensor according to claim 6 , wherein
the second conductive portion is provided between the first center and the first conductive portion.

17 . The sensor according to claim 6 , wherein
the inner structure further includes a third conductive portion, the third conductive portion is provided between the first center and the second conductive portion, the third conductive portion further includes a third region and a third opposing region, the first center is provided between the third region and the third opposing region, the plurality of connect members include a third connect member and a third opposing connect member, the third connect member electrically connects the third region and the third fixed electrode, and the third opposing connect member electrically connects the third opposing region and the third opposing fixed electrode.

18 . The sensor according to claim 17 , wherein
the plurality of fixed electrodes further include a fourth fixed electrode and a fourth opposing fixed electrode, the fourth fixed electrode and the fourth opposing fixed electrode facing the first annular portion, the inner structure further includes a fourth conductive portion, the fourth conductive portion is provided between the first center and the third conductive portion, the fourth

Assignees

• Toshiba Kk

Inventors

• Tomizawa Yasushi
• Murase Hideaki
• Miyazaki Fumito
• Ono Daiki
• Masunishi Kei
• Uchida Kengo

Classifications

• H10W99/00

  Subject matter not provided for in other groups of this subclass · CPC title

• G01C19/56 Primary

  Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces · CPC title

• G01D11/30

  Supports specially adapted for an instrument; Supports specially adapted for a set of instruments · CPC title

• G01D11/245 Primary

  Housings for sensors · CPC title