Method of Forming Semiconductor Device
US-2024379727-A1 · Nov 14, 2024 · US
US2025063840A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2025063840-A1 |
| Application number | US-202418937962-A |
| Country | US |
| Kind code | A1 |
| Filing date | Nov 5, 2024 |
| Priority date | Jul 20, 2021 |
| Publication date | Feb 20, 2025 |
| Grant date | — |
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Provided is an image sensor including a sensor array including a plurality of light-sensors respectively including an optoelectronic device, the optoelectronic device including a first electrode, a second electrode spaced apart from the first electrode, and an active layer provided between the first electrode and the second electrode, the active layer including a plurality of quantum dot layers having different energy bands, and a circuit including circuits respectively connected to the plurality of light-sensors and configured to readout an optoelectronic signal generated from each of the plurality of light-sensors.
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What is claimed is: 1 . An optoelectronic device comprising: a first electrode; a second electrode spaced apart from the first electrode; an active layer provided between the first electrode and the second electrode, the active layer comprising a plurality of quantum dot layers having different energy bands, the active layer comprising a p-type first quantum dot layer and an n-type second quantum dot layer; an electron transport layer provided between the first electrode and the active layer; and a hole transport layer provided between the active layer and the second electrode; wherein a thickness of the electron transport layer and a thickness of the hole transport layer are determined such that a maximum external quantum efficiency of the optoelectronic device is obtained at a value that is higher than 35%. 2 . The optoelectronic device of claim 1 , wherein the plurality of quantum dot layers comprise a same quantum dot material. 3 . The optoelectronic device of claim 2 , wherein the plurality of quantum dot layers are doped with different dopants. 4 . The optoelectronic device of claim 2 , wherein one layer of the plurality of quantum dot layers is doped with a certain dopant, and other layers of the plurality of quantum dot layers are undoped. 5 . The optoelectronic device of claim 1 , wherein the plurality of quantum dot layers comprise different quantum dot materials. 6 . The optoelectronic device of claim 1 , wherein a thickness of the active layer ranges from 250 nm to 350 nm. 7 . The optoelectronic device of claim 6 , wherein a thickness of the electron transport layer and a thickness of the hole transport layer ranges from 10 nm to 100 nm. 8 . The optoelectronic device of claim 6 , wherein a thickness of the electron transport layer ranges from 20 nm to 60 nm, and a thickness of the hole transport layer ranges from 20 nm to 35 nm. 9 . The optoelectronic device of claim 1 , wherein the active layer further comprises: a p-type fourth quantum dot layer provided between the p-type first quantum dot layer and the n-type second quantum dot layer, a doping concentration of the p-type fourth quantum dot layer being lower than a doping concentration of the p-type first quantum dot layer; and an n-type fifth quantum dot layer provided between the p-type fourth quantum dot layer and the n-type second quantum dot layer, a doping concentration of the n-type fifth quantum dot layer being lower than a doping concentration of the n-type second quantum dot layer. 10 . The optoelectronic device of claim 1 , wherein one of the first electrode and the second electrode comprises a transparent conductive material. 11 . The optoelectronic device of claim 1 , wherein one layer of the plurality of quantum dot layers is doped with a metal ion, a ligand material, or an inorganic ion passivation. 12 . The optoelectronic device of claim 1 , wherein a diameter of a quantum dot included in each of the plurality of quantum dot layers ranges from 1 nm to 10 nm. 13 . The optoelectronic device of claim 1 , wherein the active layer forms a photocarrier based on light of a visible, near-infrared or infrared wavelength band. 14 . The optoelectronic device of claim 1 , further comprising: an electron injection layer provided between the first electrode and the electron transport layer; and a hole injection layer provided between the second electrode and the hole transport layer. 15 . An image sensor comprising: a sensor array comprising a plurality of light-sensors respectively comprising an optoelectronic device, the optoelectronic device comprising: a first electrode; a second electrode spaced apart from the first electrode; an active layer provided between the first electrode and the second electrode, the active layer comprising a plurality of quantum dot layers having different energy bands, the active layer comprising a p-type first quantum dot layer and an n-type second quantum dot layer; an electron transport layer provided between the first electrode and the active layer; and a hole transport layer provided between the active layer and the second electrode; wherein a thickness of the electron transport layer and a thickness of the hole transport layer are determined such that a maximum external quantum efficiency of the optoelectronic device is obtained at a value that is higher than 35%; and a circuit comprising circuits respectively connected to the plurality of light-sensors and configured to readout an optoelectronic signal generated from each of the plurality of light-sensors. 16 . An electronic device comprising: an imaging device configured to form an optical image by focusing light reflected from a subject; and an image sensor configured to convert the optical image formed by the imaging device into an electrical signal, the image sensor comprising: a sensor array comprising a plurality of light-sensors respectively comprising an optoelectronic device, the optoelectronic device comprising: a first electrode; a second electrode spaced apart from the first electrode; an active layer provided between the first electrode and the second electrode, the active layer comprising a plurality of quantum dot layers having different energy bands, the active layer comprising a p-type first quantum dot layer and an n-type second quantum dot layer; an electron transport layer provided between the first electrode and the active layer; and a hole transport layer provided between the active layer and the second electrode; wherein a thickness of the electron transport layer and a thickness of the hole transport layer are determined such that a maximum external quantum efficiency of the optoelectronic device is obtained at a value that is higher than 35%; and a circuit comprising circuits respectively connected to the plurality of light-sensors and configured to readout an optoelectronic signal generated from each of the plurality of light-sensors. 17 . The electronic device of claim 16 , wherein the electronic device comprises a smart phone, a mobile phone, a personal digital assistant (PDA), a laptop, a personal computer (PC), a home appliance, a security camera, a medical camera, a vehicle, an Internet of Things (IoT) device, a virtual reality device, or an augmented reality device.
Nanooptics, e.g. quantum optics or photonic crystals · CPC title
the potential barrier being a PIN barrier · CPC title
made of transparent conductive layers, e.g. transparent conductive oxide [TCO] layers · CPC title
Photosensitive area · CPC title
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