Die repair process in microled display fabrication

Patent metadata

Field	Value
Publication number	US-2025056920-A1
Application number	US-202418797189-A
Country	US
Kind code	A1
Filing date	Aug 7, 2024
Priority date	Aug 9, 2023
Publication date	Feb 13, 2025
Grant date	—

Abstract

The present disclosure provides devices and methods for repairing dice during micro-LED display fabrication. The devices include a backplane. The backplane has a plurality of backplane electrodes. Each backplane electrode includes a first material. A plurality of micro-LEDs having a plurality of micro-LED electrodes is included in the device. Each micro-LED electrode includes a second material. Each micro-LED electrode is bonded to each backplane electrode with an alloy of the first material and the second material therebetween. At least one backplane electrode is bonded to the micro-LED electrode via a repair material. The device includes a plurality of subpixel isolation (SI) structures formed over the backplane. The SI structures define wells of sub-pixels. Each well includes a respective micro-LED between adjacent SI structures. The sub-pixels have a color conversion material disposed in the wells.

First claim

What is claimed is:

1 . A device, comprising:
a backplane, the backplane having a plurality of backplane electrodes, each backplane electrode comprising a first material; a plurality of micro-LEDs having a plurality of micro-LED electrodes, each micro-LED electrode comprising a second material, wherein each micro-LED electrode is bonded to each backplane electrode with an alloy of the first material and the second material therebetween, wherein at least one backplane electrode is bonded to the micro-LED electrode via a repair material; and a plurality of subpixel isolation (SI) structures formed over the backplane, the SI structures defining wells of sub-pixels, each well including a respective micro-LED between adjacent SI structures, the sub-pixels having a color conversion material disposed in the wells.

2 . The device of claim 1 , wherein the repair material is conductive.

3 . The device of claim 1 , wherein the repair material comprises indium, silver, or combinations thereof.

4 . The device of claim 1 , wherein the first material comprises gold, indium, tin, silver, aluminum, platinum, or combinations thereof.

5 . The device of claim 1 , wherein the second material comprises gold, silver, aluminum, platinum, indium, or combinations thereof.

6 . A method of repairing a micro-LED display, the method comprising:
determining a first map of the micro-LED display, wherein the first map comprises one or more locations of a defective micro-LED; and repairing the defective micro-LED at each location of the one or more locations of the first map, wherein repairing the defective micro-LED comprises:
trimming the defective micro-LED from a backplane of the micro-LED to expose a backplane electrode;
disposing a repair material on the backplane electrode; and
disposing a repair micro-LED on the repair material.

7 . The method of claim 6 , further comprising:
determining a second map of the micro-LED display, wherein the second map comprises one or more locations of micro-LED on the micro-LED display; and removing a micro-LED located at the one or more locations.

8 . The method of claim 7 , further comprising:
determining a third map of the micro-LED display, wherein the third map comprises one or more locations of electrodes on the micro-LED display; and repairing an electrode located at the one or more locations.

9 . The method of claim 6 , wherein trimming the defective micro-LED comprises trimming the defective micro-LED using a first laser.

10 . The method of claim 9 , further comprising:
masking the repair micro-LED on a substrate in accordance with the first map; and identifying an unmasked repair micro-LED on the substrate using a second laser.

11 . The method of claim 6 , wherein the repair material is conductive.

12 . The method of claim 11 , wherein the repair material comprises indium, silver, or combinations thereof.

13 . The method of claim 6 , wherein determining the first map further comprises supplying electricity to the micro-LED display to determine the first map.

14 . A system comprising:
an inspection device operable to:
determine a first map of a micro-LED display;
determine a second map of the micro-LED display; and
determine a third map of the micro-LED display;
a first laser configured to trim a micro-LED on the micro-LED display based on the second map; an applicator configured to dispose a repair material to the micro-LED display based on the third map; and a second laser configured to perform a laser lift off on a repair micro-LED on a substrate based on the first map.

15 . The system of claim 14 , wherein the first map comprises one or more locations of a defective micro-LED.

16 . The system of claim 14 , wherein the second map comprises one or more locations of micro-LED on the micro-LED display.

17 . The system of claim 14 , wherein the third map comprises one or more locations of electrodes on the micro-LED display.

18 . The system of claim 14 , wherein the repair material is conductive.

19 . The system of claim 18 , wherein the repair material comprises indium, silver, or combinations thereof.

20 . The system of claim 14 , wherein determining the first map comprises supplying electricity to the micro-LED display to determine the first map.

Assignees

• Applied Materials Inc

Inventors

• Liu Peiwen
• Sridhar Uma
• Bang Hyunsung
• Ding Kai
• Franklin Jeffrey L
• Zhu Mingwei
• Ng Hou T
• Patibandla Nag B

Classifications

• H10W90/00

  Package configurations · CPC title

• H10H29/852

  Encapsulations · CPC title

• H10H29/855

  Optical field-shaping means, e.g. lenses · CPC title

• H10H29/39

  Connection of the pixel electrodes to the driving transistors · CPC title

• H10H29/37

  Pixel-defining structures, e.g. banks between the LEDs · CPC title