Furnace and manufacturing apparatus for glass particle deposit including the same

Patent metadata

Field	Value
Publication number	US-2025050302-A1
Application number	US-202218721982-A
Country	US
Kind code	A1
Filing date	Dec 21, 2022
Priority date	Dec 22, 2021
Publication date	Feb 13, 2025
Grant date	—

Abstract

The present disclosure relates to a furnace for manufacturing a glass particle deposit by depositing glass particles generated from a glass raw material. The furnace includes two or more portions that are not fixed to each other in an upper-lower direction which is an axial direction of the glass particle deposit. The two or more portions include a first portion and a second portion which are independently formed, and the two or more portions have a structure in which the first portion and the second portion do not interfere with each other when the first portion is deformed by thermal expansion.

First claim

What is claimed is:

1 . A furnace for manufacturing a glass particle deposit by depositing glass particles generated from a glass raw material, the furnace comprising:
two or more portions that are not fixed to each other in an upper-lower direction which is an axial direction of the glass particle deposit, wherein the two or more portions comprise a first portion and a second portion which are independently formed, and the the two or more portions have a structure in which the first portion and the second portion do not interfere with each other when the first portion is deformed by thermal expansion.

2 . The furnace according to claim 1 ,
wherein the two or more portions comprise a furnace upper portion, a furnace middle portion located below the furnace upper portion, and a furnace lower portion located below the furnace middle portion, wherein the furnace middle portion is the first portion and has an upper end opening and a lower end opening in the upper-lower direction, wherein the furnace upper portion is the second portion and covers the upper end opening of the furnace middle portion so as to have a gap with an upper end of the furnace middle portion in the upper-lower direction, and wherein the furnace lower portion covers the lower end opening of the furnace middle portion and supports the furnace middle portion.

3 . The furnace according to claim 2 ,
wherein the gap is 3 mm or more.

4 . The furnace according to claim 2 ,
wherein a distance between portions of the furnace upper portion and the furnace middle portion facing each other in a left-right direction perpendicular to the upper-lower direction is 1 mm or less.

5 . The furnace according to claim 1 ,
wherein the glass raw material is silicon tetrachloride.

6 . A manufacturing apparatus for a glass particle deposit, the manufacturing apparatus comprising:
the furnace according to claim 1 .

Assignees

• Sumitomo Electric Industries

Inventors

• Moriya Tomomi

Classifications

• C03B37/01406

  Deposition reactors therefor · CPC title

• B01J19/0013

  Controlling the temperature of the process · CPC title

• C01B33/183

  by oxidation or hydrolysis in the vapour phase of silicon compounds such as halides, trichlorosilane, monosilane · CPC title

• B01J19/24 Primary

  Stationary reactors without moving elements inside (B01J19/08, B01J19/26 take precedence; with stationary particles B01J8/02) · CPC title

• B01J2219/00157

  by means of a burner · CPC title