Image sensor including color separating lens array

Patent metadata

Field	Value
Publication number	US-2025024164-A1
Application number	US-202418771526-A
Country	US
Kind code	A1
Filing date	Jul 12, 2024
Priority date	Jul 14, 2023
Publication date	Jan 16, 2025
Grant date	—

Abstract

An image sensor includes a sensor substrate including a plurality of first photosensitive cells configured to sense light and a color separating lens array in an upper portion of the sensor substrate and including a plurality of first sub regions respectively corresponding to the plurality of first photosensitive cells, where each of the plurality of first sub regions include a plurality of first nano-posts, where the plurality of first sub regions include at least one first central sub region at a center of the color separating lens array and at least one first peripheral sub region at a periphery of the color separating lens array, and where the plurality of first nano-posts include at least one first nano-post in the at least one first central sub region and at least one second nano-post in the at least one first peripheral sub region and corresponding to the at least one first nano-post.

First claim

What is claimed is:

1 . An image sensor comprising:
a sensor substrate comprising a plurality of first photosensitive cells configured to sense light; and a color separating lens array in an upper portion of the sensor substrate and comprising a plurality of first sub regions respectively corresponding to the plurality of first photosensitive cells, wherein each of the plurality of first sub regions comprise a first plurality of nano-posts, wherein the plurality of first sub regions further comprise:
at least one first central sub region at a center of the color separating lens array; and
at least one first peripheral sub region at a periphery of the color separating lens array,
wherein the first plurality of nano-posts comprise at least one first nano-post in the at least one first central sub region, and at least one second nano-post in the at least one first peripheral sub region and corresponding to the at least one first nano-post, and wherein a cross-sectional area of the at least one first nano-post is different from a cross-sectional area of the at least one second nano-post.

2 . The image sensor of claim 1 , wherein a cross-sectional area of third nano-posts that are in each of the at least one first peripheral sub region and that correspond to the at least one first nano-post decreases as the third nano-posts are positioned further from the center of the color separating lens array.

3 . The image sensor of claim 1 , wherein a cross-sectional area of fourth nano-posts that are in each of the at least one first peripheral sub region and that correspond to the at least one first nano-post increases as the fourth nano-posts are positioned further from the center of the color separating lens array.

4 . The image sensor of claim 1 , wherein the at least one second nano-post are shifted toward the center of the color separating lens array with respect to position of first photosensitive cells corresponding to the at least one first peripheral sub region.

5 . The image sensor of claim 1 , wherein the plurality of first photosensitive cells are configured to sense green light,
wherein the sensor substrate further comprises a plurality of second photosensitive cells configured to sense red light, a plurality of third photosensitive cells configured to sense blue light, and plurality of fourth photosensitive cells configured to sense the green light, wherein the color separating lens array further comprises:
a plurality of second sub regions respectively corresponding to the plurality of second photosensitive cells;
a plurality of third sub regions respectively corresponding to the plurality of third photosensitive cells; and
a plurality of fourth sub regions respectively corresponding to the plurality of fourth photosensitive cells,
wherein the plurality of first sub regions, the plurality of second sub regions, the plurality of third sub regions, and the plurality of fourth sub regions are provided in a pattern such that one first sub region of the plurality of first sub regions, one second sub region of the plurality of second sub regions, one third sub region of the plurality of third sub regions, and one fourth sub region of the plurality of fourth sub regions are arranged adjacently in a 2×2 shape, wherein the plurality of second sub regions comprise a second plurality of nano-posts, wherein the plurality of third sub regions comprise a third plurality of nano-posts, wherein the plurality of fourth sub regions comprise a fourth plurality of nano-posts, and wherein the first plurality of nano-posts, the second plurality of nano-posts, the third plurality of nano-posts, and the fourth plurality of nano-posts respectively in each of the one first sub region, the one second sub region, the one third sub region, and the one fourth sub region and that are arranged adjacently in a 2×2 shape differ from each other in at least one of a number, an arrangement pattern, a size, and a shape.

6 . The image sensor of claim 5 , further comprising a color filter between the sensor substrate and the color separating lens array, the color filter comprising:
a plurality of first filter regions respectively corresponding to the plurality of first photosensitive cells; a plurality of second filter regions respectively corresponding to the plurality of second photosensitive cells; a plurality of third filter regions respectively corresponding to the plurality of third photosensitive cells; and a plurality of fourth filter regions respectively corresponding to the plurality of fourth photosensitive cells, wherein the plurality of first filter regions, the plurality of second filter regions, the plurality of third filter regions, and the plurality of fourth filter regions are provided in a pattern in which one first filter region of the plurality of first filter regions, one second filter region of the plurality of second filter regions, one third filter region of the plurality of third filter regions, and one fourth filter region of the plurality of fourth filter regions are arranged adjacently in a 2×2 shape, and wherein an area of the one first filter region differs from at least one of an area of the one second filter region, an area of the one third filter region, and an area of the one fourth filter region which are arranged adjacently.

7 . The image sensor of claim 6 , wherein at least one area of the plurality of first filter regions, the plurality of second filter regions, the plurality of third filter regions, and the plurality of fourth filter regions at a center of the color filter is different from at least one area of the plurality of first filter regions, the plurality of second filter regions, the plurality of third filter regions, and the plurality of fourth filter regions at a periphery of the color filter.

8 . The image sensor of claim 7 , wherein the color filter further comprises a plurality of unit filter regions,
wherein each of the plurality of unit filter regions comprises one first filter region, one second filter region, one third filter region, and one fourth filter region which are arranged adjacently, and wherein an area of at least one of the one first filter region, the one second filter region, the one third filter region, and the one fourth filter region of each of the plurality of unit filter regions is inversely proportional to a distance from the center of the color filter.

9 . The image sensor of claim 7 , wherein the color filter comprises a plurality of unit filter regions,
wherein each of the plurality of unit filter regions comprises one first filter region, one second filter region, one third filter region, and one fourth filter region which are arranged adjacently, and wherein an area of at least one of the one first filter region, the one second filter region, the one third filter region, and the one fourth filter region of each of the plurality of unit filter regions is proportional to a distance from the center of the color filter.

10 . An image sensor comprising:
a sensor substrate comprising a plurality of photosensitive cells configured to sense light; and a color separating lens array in an upper portion of the sensor substrate and comprising a plurality of unit regions, wherein the plurality of unit regions comprise a first plurality of nano-posts, wherein the plurality of unit regions further comprise:
at least one central unit region at a center of the color separating lens array; and
at least one peripheral unit region at a periphery of the color separating lens array,
wherein the first plurality of nano-posts comprise at least two first nano-posts in the at least one central unit region and at least two second nano-post

Assignees

• Samsung Electronics Co Ltd

Inventors

• Choi Chulsoo
• Kim Bumsuk
• Kim Junghun
• Park Jonghoon
• Lee Yunki

Classifications

• B82Y20/00

  Nanooptics, e.g. quantum optics or photonic crystals · CPC title

• H10F39/802

  Geometry or disposition of elements in pixels, e.g. address-lines or gate electrodes · CPC title

• H10F39/8053

  Colour filters · CPC title

• H10F39/806 Primary

  Optical elements or arrangements associated with the image sensors · CPC title

• H04N25/134 Primary

  based on three different wavelength filter elements · CPC title