Chemically amplified positive resist composition and resist pattern forming process
US-12164231-B2 · Dec 10, 2024 · US
US2025004369A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2025004369-A1 |
| Application number | US-202218703643-A |
| Country | US |
| Kind code | A1 |
| Filing date | Oct 24, 2022 |
| Priority date | Oct 26, 2021 |
| Publication date | Jan 2, 2025 |
| Grant date | — |
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A photosensitive resin composition containing (A) a binder polymer, (B) a photopolymerizable compound, and (C) a photopolymerization initiator, in which the component (B) includes a polyfunctional compound having three or more ethylenically unsaturated bonds, and in a case where development is performed after exposing a layer (thickness 25 μm) of the photosensitive resin composition at a wavelength of 405 nm using a 41-step tablet (concentration region 0.00 to 2.00, concentration step 0.05, tablet size 20 mm×187 mm, each step size 3 mm× 12 mm), an exposure dose providing 15 steps as the number of remaining steps is 30 mJ/cm2 or less.
Opening claim text (preview).
1 . A photosensitive resin composition comprising: (A) a binder polymer; (B) a photopolymerizable compound; and (C) a photopolymerization initiator, wherein the component (B) includes a polyfunctional compound having three or more ethylenically unsaturated bonds, and in a case where development is performed after exposing a layer (thickness 25 μm) of the photosensitive resin composition at a wavelength of 405 nm using a 41-step tablet (concentration region 0.00 to 2.00, concentration step 0.05, tablet size 20 mm×187 mm, each step size 3 mm×12 mm), an exposure dose providing 15 steps as the number of remaining steps is 30 mJ/cm 2 or less. 2 . The photosensitive resin composition according to claim 1 , wherein the component (B) includes a polyfunctional compound having three ethylenically unsaturated bonds. 3 . The photosensitive resin composition according to claim 1 , wherein the component (B) includes a polyfunctional compound having six ethylenically unsaturated bonds. 4 . The photosensitive resin composition according to claim 1 , wherein the component (B) includes a polyfunctional compound having three ethylenically unsaturated bonds and a polyfunctional compound having six ethylenically unsaturated bonds. 5 . The photosensitive resin composition according to claim 1 , wherein the component (C) includes an acridine compound. 6 . The photosensitive resin composition according to claim 1 , wherein the component (C) includes an acridine compound and a N-phenylglycine compound. 7 . The photosensitive resin composition according to claim 1 , wherein a content of the polyfunctional compound is 1 to 10% by mass on the basis of the total amount of the photosensitive resin composition. 8 . The photosensitive resin composition according to claim 1 , wherein a content of the polyfunctional compound is 3 to 30% by mass on the basis of the total amount of the component (B). 9 . The photosensitive resin composition according to claim 1 , wherein the component (B) further includes a bisphenol A-type (meth)acrylic acid compound. 10 . The photosensitive resin composition according to claim 1 , wherein a content of the component (B) is 30 to 60 parts by mass with respect to a total of 100 parts by mass of the component (A) and the component (B). 11 . The photosensitive resin composition according to claim 1 , wherein the component (A) has a (meth)acrylic acid and a styrene compound as monomer units. 12 . The photosensitive resin composition according to claim 1 , wherein the component (A) has a styrene compound as a monomer unit, and a content of the monomer unit of the styrene compound is 1 to 30% by mass on the basis of the total amount of monomer units constituting the component (A). 13 . The photosensitive resin composition according to claim 1 , wherein a weight average molecular weight of the component (A) is 3.0×10 4 to 5.0×10 4 . 14 . A photosensitive resin composition comprising: (A) a binder polymer; (B) a photopolymerizable compound; and (C) a photopolymerization initiator, wherein the component (B) includes at least one selected from the group consisting of trimethylolpropane tri(meth)acrylate, alkylene oxide-modified trimethylolpropane tri(meth)acrylate, dipentaerythritol hexa(meth)acrylate, and alkylene oxide-modified dipentaerythritol hexa(meth)acrylate, and 2,2-bis(4-((meth)acryloxypentaethoxy)phenyl)propane, and the component (C) includes an acridine compound. 15 . The photosensitive resin composition according to claim 14 , wherein the component (B) includes alkylene oxide-modified trimethylolpropane tri(meth)acrylate. 16 . The photosensitive resin composition according to claim 14 , further comprising tribromomethyl phenyl sulfone. 17 . The photosensitive resin composition according to claim 1 , which is in a film form. 18 . A photosensitive element comprising: a support; and a photosensitive resin layer disposed on the support, wherein the photosensitive resin layer is a layer of the photosensitive resin composition according to claim 1 . 19 . A method for producing a laminate, the method comprising: a step of disposing a layer of the photosensitive resin composition on a base material by using the photosensitive resin composition according to claim 1 ; a step of photo-curing a part of the layer of the photosensitive resin composition; and a step of removing at least a part of an uncured area of the layer of the photosensitive resin composition to form a cured product pattern. 20 . A method for producing a laminate, the method comprising: a step of disposing a layer of the photosensitive resin composition on a base material by using the photosensitive element according to claim 18 ; a step of photo-curing a part of the layer of the photosensitive resin composition; and a step of removing at least a part of an uncured area of the layer of the photosensitive resin composition to form a cured product pattern. 21 . The photosensitive resin composition according to claim 14 , which is in a film form. 22 . A photosensitive element comprising: a support; and a photosensitive resin layer disposed on the support, wherein the photosensitive resin layer is a layer of the photosensitive resin composition according to claim 14 . 23 . A method for producing a laminate, the method comprising: a step of disposing a layer of the photosensitive resin composition on a base material by using the photosensitive resin composition according to claim 14 ; a step of photo-curing a part of the layer of the photosensitive resin composition; and a step of removing at least a part of an uncured area of the layer of the photosensitive resin composition to form a cured product pattern. 24 . A method for producing a laminate, the method comprising: a step of disposing a layer of the photosensitive resin composition on a base material by using the photosensitive element according to claim 22 ; a step of photo-curing a part of the layer of the photosensitive resin composition; and a step of removing at least a part of an uncured area of the layer of the photosensitive resin composition to form a cured product pattern.
Photosensitive materials (G03F7/12, G03F7/14 take precedence) · CPC title
Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds (G03F7/075 takes precedence) · CPC title
the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers · CPC title
Organic compounds not covered by group G03F7/029 · CPC title
Macromolecular compounds which are rendered insoluble or differentially wettable (G03F7/075 takes precedence; macromolecular azides G03F7/012; macromolecular diazonium compounds G03F7/021) · CPC title
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