Solid-state thin-film lasers with integrated resonators

Patent metadata

Field	Value
Publication number	US-2024421550-A1
Application number	US-202418743508-A
Country	US
Kind code	A1
Filing date	Jun 14, 2024
Priority date	Jun 19, 2023
Publication date	Dec 19, 2024
Grant date	—

Abstract

An electrically-operable laser device for emitting light at least at a wavelength includes a substrate; at least a first in-plane resonator; a first electrode; a lasing gain medium; and a second electrode. Each resonator includes at least two solid materials having an electrical conductivity below 3 S/m, wherein two or more of the solid materials differ in their refractive indices. The top surface of the first in-plane resonator is planar and has a root mean square roughness below 5 nm. The first resonator is either a) situated above the substrate, or b) comprises a material of the substrate as a first of the at least two solid materials. Any further in-plane resonators, if present, are situated above the substrate.

First claim

1 . An electrically-operable laser device for emitting light at least at a wavelength 1 , comprising:
a) a substrate; b) at least a first in-plane resonator; c) a first electrode situated above the at least a first in-plane resonator; d) a lasing gain medium for emitting photons of at least wavelength 1 , said lasing gain medium having a thickness of at most twice the wavelength 1 and being situated above the first electrode; and e) a second electrode situated above the lasing gain medium, wherein each of the at least a first in-plane resonator comprises at least two solid materials, each having an electrical conductivity below 3 S/m at 20° C., wherein two or more of the at least two solid materials differ in their refractive indices, wherein the top surface of each of the at least a first in-plane resonator, said top surface facing away from the substrate, is planar and has a root mean square roughness below 5 nm, wherein the first resonator is either a) situated above the substrate, or b) comprises a material of the substrate as a first of the at least two solid materials, and wherein any further in-plane resonators, if present, are situated above the substrate.

2 . The electrically-operable laser device according to claim 1 , wherein the at least two solid materials alternate horizontally.

3 . The electrically-operable laser device according to claim 1 , wherein each of the at least two solid materials has an extinction coefficient of less than 0.01 at the wavelength 1 .

4 . The electrically-operable laser device according to claim 1 , wherein a first of the at least two solid materials has a top surface presenting a relief comprising at least one valley and at least one peak, and wherein a second of the at least two solid materials fills in at least partially the at least one valley.

5 . The electrically-operable laser device according to claim 1 , wherein the surface of the in-plane resonator, facing away from the substrate, consists of said at least two solid materials being coplanar with each other.

6 . The electrically-operable laser device according to claim 1 , wherein the surface of the first in-plane resonator facing away from the substrate is in physical contact with a bottom surface of the first electrode.

7 . The electrically-operable laser device according to claim 1 , wherein the in-plane resonator comprises a distributed feedback grating wherein the two or more of the at least two solid materials comprise a material having a first refractive index and a material having a second refractive index, wherein:
the material having the first refractive index occupies 10 to 40% of the total grating volume, and/or the distributed feedback grating is a defect-based distributed feedback grating incorporating a phase shift within a tolerance of +0.5 radians around π/2 or its multiples in the grating.

8 . The electrically-operable laser device according to claim 1 , wherein the lasing gain medium comprises a material selected from the group consisting of: hybrid organic-inorganic metal halide perovskites, colloidal semiconductor nanocrystals, organic semiconductors, and chalcogenides.

9 . The electrically-operable laser device according to claim 8 , wherein the lasing gain medium comprises a material selected from organic-inorganic metal halide perovskites having a grain size distribution with an average grain length larger than 500 nm.

10 . The electrically-operable laser device according to claim 1 , wherein the lasing gain medium is constituted of layers having each an ambipolar carrier mobility of at least 10 cm 2 /V·s, preferably at least 50 cm 2 /V·s.

11 . The electrically-operable laser device according to claim 1 , wherein the first electrode has at least one region adjacent to the in-plane resonator which has at least a 50%, preferably at least 80% transmittance, even more preferably at least 90% transmittance at the wavelength 1 .

12 . The electrically-operable laser device according to claim 1 wherein each of the substrate, the first electrode, the lasing gain medium, and the second electrode, have both their bottom and top surfaces having a root mean square roughness below 15 nm.

13 . A method for manufacturing an electrically-operable laser device for emitting light at least at a wavelength 1 , the method comprising the steps of:
a) providing a substrate; b) forming at least a first in-plane resonator, each comprising at least two solid materials, each having an electrical conductivity below 3 S/m at 20° C., wherein the first in-plane resonator is either positioned above the substrate or comprises a material of the substrate as a first of the at least two solid materials, wherein any further in-plane resonators, if present, are formed above the substrate; c) depositing a first electrode above the at least a first in-plane resonator; d) providing above the first electrode a lasing gain medium for emitting photons of at least wavelength λ, said lasing gain medium having a thickness of at most twice λ; e) depositing a second electrode above the lasing gain medium, wherein two or more of the at least two solid materials differ in their refractive indices, wherein the top surface of each of the at least a first in-plane resonator, said top surface facing away from the substrate, is planar and has a root mean square roughness below 5 nm.

14 . The method according to claim 13 , wherein the planar top surface of the in-plane resonator is formed by performing a planarization process.

15 . The method according to claim 14 , wherein the planarization process is a chemical-mechanical polishing.

Assignees

• Imec Vzw

Inventors

• Goldberg Iakov
• Elkhouly Karim
• Annavarapu Nirav
• Gehlhaar Robert
• Genoe Jan
• Heremans Paul

Classifications

• H01S3/08009

  using a diffraction grating · CPC title

• H01S3/0604

  in the form of a plate or disc · CPC title

• H01S5/04257

  having positive and negative electrodes on the same side of the substrate · CPC title

• H01S5/1075

  Disk lasers with special modes, e.g. whispering gallery lasers · CPC title

• H01S5/0213

  Sapphire, quartz or diamond based substrates · CPC title