Data generation method, cloud system, processing apparatus, computer program, and recording medium

Patent metadata

Field	Value
Publication number	US-2024416449-A1
Application number	US-202118703073-A
Country	US
Kind code	A1
Filing date	Oct 27, 2021
Priority date	Oct 27, 2021
Publication date	Dec 19, 2024
Grant date	—

Abstract

A data generation method performs subtractive manufacturing by irradiating object with pulse energy beam and measures shape after; calculates information related to light penetration depth into object based on shape information before subtractive manufacturing and measured result of shape after subtractive manufacturing; calculates for each irradiation target position based on information related to an inclination at each irradiation target position of object that is irradiated with pulse energy beam with respect to an irradiation direction of the pulse energy beam and the information related to light penetration depth, a unit processing amount of object in a case where object is irradiated with pulse energy beam a unit number of times; and calculates, based on a target processing amount for each irradiation target position and the unit processing amount for each irradiation target position, a target number of times which each irradiation target position is irradiated with the pulse energy beam.

First claim

1 - 39 . (canceled)

40 . A data generation method of generating control data for controlling a processing apparatus that is configured to perform a subtractive manufacturing on an object by irradiating a surface of the object with a pulse energy beam,
the data generation method comprising: after irradiating a test workpiece or the object with the pulse energy beam, measuring a shape of the test workpiece or the object after the subtractive manufacturing; calculating information related to a light penetration depth into the test workpiece or the object based on shape information of the test workpiece or the object before the subtractive manufacturing and a measured result of the shape of the test workpiece or the object after the subtractive manufacturing; calculating a unit processing amount of the object in a case where the object is irradiated with the pulse energy beam a unit number of times for each irradiation target position based on information related to an inclination of the object at each irradiation target position, which is irradiated with the pulse energy beam, with respect to an irradiation direction of the pulse energy beam and the information related to the light penetration depth; and calculating a target number of times which each irradiation target position should be irradiated with the pulse energy beam based on a target processing amount for each irradiation target position and the unit processing amount for each irradiation target position.

41 . The data generation method according to claim 40 , wherein
an irradiation size on the object of the pulse energy beam with which the object is irradiated varies depending on an inclination of the object.

42 . The data generation method according to claim 40 , wherein
a cross-sectional shape on the object of the pulse energy beam with which the object is irradiated varies depending on an inclination of the object.

43 . The data generation method according to claim 40 , wherein
a reflection characteristic of the pulse energy beam at the object varies depending on an inclination of the object.

44 . The data generation method according to claim 40 further comprising measuring a shape of the object before the subtractive manufacturing, wherein
the target processing amount is calculated based on the shape before the subtractive manufacturing.

45 . The data generation method according to claim 44 further comprising inputting a target shape of the object, wherein
the target processing amount is calculated based on the shape before the subtractive manufacturing and the target shape.

46 . The data generation method according to claim 40 , wherein
the calculating the target number of times includes calculating the target number of times by solving an optimization problem, the optimization problem includes such a problem that an expected processing amount at the irradiation target position is equal to the target processing amount in a case where the irradiation target position is irradiated with the pulse energy beam the target number of times.

47 . The data generation method according to claim 40 , wherein
the target processing amount includes (i) a first target processing amount of the object at a first irradiation target position, and (ii) a second target processing amount of the object at a second irradiation target position that is different from the first irradiation target position, the calculating the unit processing amount includes calculating (i) a first unit processing amount of the object at the first irradiation target position in a case where the first irradiation target position is irradiated with the pulse energy beam a unit number of times, (ii) a second unit processing amount of the object at the second irradiation target position in a case where the first irradiation target position is irradiated with the pulse energy beam a unit number of times, (iii) a third unit processing amount of the object at the first irradiation target position in a case where the second irradiation target position is irradiated with the pulse energy beam a unit number of times, and (iv) a fourth unit processing amount of the object at the second irradiation target position in a case where the second irradiation target position is irradiated with the pulse energy beam a unit number of times, the calculating the target number of times includes calculating a first target number of times which the first irradiation target position should be irradiated with the pulse energy beam and a second target number of times which the second irradiation target position should be irradiated with the pulse energy beam based on the first to second target processing amounts and the first to fourth unit processing amounts.

48 . The data generation method according to claim 47 , wherein
the calculating the target number of times includes calculating the target number of times by solving an optimization problem, the optimization problem includes such a problem that a first expected processing amount of the object at the first irradiation target position is equal to the first target processing amount and a second expected processing amount of the object at the second irradiation target position is equal to the second target processing amount in a case where the first irradiation target position is irradiated with the pulse energy beam the first target number of times and the second irradiation target position is irradiated with the pulse energy beam the second target number of times.

49 . The data generation method according to claim 48 , wherein
the first expected processing amount is calculated from a total sum of a product of the first unit processing amount and the first target number of times and a product of the third unit processing amount and the second target number of times, the second expected processing amount is calculated from a total sum of a product of the second unit processing amount and the first target number of times and a product of the fourth unit processing amount and the second target number of times.

50 . The data generation method according to claim 40 , wherein
the calculating the target number of times includes calculating the target number of times by solving an optimization problem expressed by an Equation 1, the processing apparatus is configured to irradiate each of N (wherein, N is an integer that is equal to or larger than 2) irradiation target positions with the pulse energy beam, “C k (wherein, k is a variable number representing an integer that is equal to or larger than 1 and that is equal to or smaller than N)” in the Equation 1 represents k-th irradiation target position of the N irradiation target positions, “Δh(C k )” in the Equation 1 represents the target processing amount of the object at the k-th irradiation target position, “φ(C k −C g , C g (wherein, g is a variable number representing an integer that is equal to or larger than 1 and that is equal to or smaller than N))” in the Equation 1 represents the unit processing amount of the object at the k-th irradiation target position in a case where g-th irradiation target position of the N irradiation target positions is irradiated with the pulse energy beam a unit number of times, “p(C k )” in the Equation 1 represents the target number of times which the k-th irradiation target position should be irradiated with the pulse energy beam in order to perform the subtractive manufacturing on the object

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Assignees

• Nikon Corp

Inventors

• Egami Shigeki
• Kita Naonori
• Tatsuzaki Yosuke

Classifications

• B23K26/082

  Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head · CPC title

• B23K26/032 Primary

  using optical means · CPC title

• B23K26/36 Primary

  Removing material (B23K26/55, B23K26/57 take precedence) · CPC title