Deformation detection tool and method for detecting deformation
US-9816806-B2 · Nov 14, 2017 · US
Optical system for shape measuring device
US2024377189A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2024377189-A1 |
| Application number | US-202218686743-A |
| Country | US |
| Kind code | A1 |
| Filing date | Aug 10, 2022 |
| Priority date | Sep 27, 2021 |
| Publication date | Nov 14, 2024 |
| Grant date | — |
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- Title
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Abstract
Official abstract text for this publication.
An optical system for a shape measuring device of the present invention includes a parallel light irradiation system and an imaging optical system, in which the parallel light irradiation system includes a point light source, a collimator lens, and a telecentric lens having a both side or object side telecentric structure to be irradiated with light from the collimator lens through an object to be measured, the imaging optical system includes an image sensor onto which an image of a portion of the object to be measured, the image by light passing through the telecentric lens is projected, and the point light source includes an LED, a diffusion member that diffuses and emits light from the LED; and a pinhole member having a pinhole into which light from the diffusion member is incident.
First claim
Opening claim text (preview).
1 . An optical system for a shape measuring device comprising: a parallel light irradiation system that irradiates, with parallel light, a portion to be measured that is an outer peripheral end edge portion of an object to be measured having a disk shape along a circular surface of the object to be measured such that the portion to be measured of the object to be measured is disposed in a light flux; and an imaging optical system that images the portion to be measured, wherein the parallel light irradiation system includes a point light source, a collimator lens that emits light from the point light source as parallel light, and a telecentric lens having a both side or object side telecentric structure to be irradiated with light from the collimator lens through the object to be measured, the imaging optical system includes an image sensor onto which an image of the portion to be measured, the image by light passing through the telecentric lens is projected, and the point light source includes an LED, a diffusion member that diffuses and emits light from the LED; and a pinhole member having a pinhole into which light from the diffusion member is incident. 2 . The optical system for a shape measuring device according to claim 1 , wherein the diffusion member is an optical fiber. 3 . The optical system for a shape measuring device according to claim 2 , wherein the optical fiber has a bent shape. 4 . The optical system for a shape measuring device according to claim 1 , wherein the diffusion member is an integrating sphere.
Assignees
Inventors
Classifications
Measuring geometric parameters of semiconductor structures, e.g. profile, critical dimensions or trench depth · CPC title
- G01B11/2433Primary
for measuring outlines by shadow casting · CPC title
- G01B11/24Primary
for measuring contours or curvatures · CPC title
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- What does patent US2024377189A1 cover?
- An optical system for a shape measuring device of the present invention includes a parallel light irradiation system and an imaging optical system, in which the parallel light irradiation system includes a point light source, a collimator lens, and a telecentric lens having a both side or object side telecentric structure to be irradiated with light from the collimator lens through an object to…
- Who is the assignee on this patent?
- Kobe Steel Ltd, Kobelco Res Institute Inc
- What technology area does this patent fall under?
- Primary CPC classification G01B11/2433. Mapped technology areas include Physics.
- When was this patent published?
- Publication date Thu Nov 14 2024 00:00:00 GMT+0000 (Coordinated Universal Time) (A1). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).