Integrated fesem and ldi-tof-ms analysis system

Patent metadata

Field	Value
Publication number	US-2024369504-A1
Application number	US-202218688499-A
Country	US
Kind code	A1
Filing date	Dec 23, 2022
Priority date	May 3, 2022
Publication date	Nov 7, 2024
Grant date	—

Abstract

The present disclosure relates to an integrated FESEM and LDI-TOF-MS analysis system, and provides an integrated FESEM and LDI-TOF-MS analysis system that can perform FESEM analysis and LDI-TOF-MS analysis on a single sample to be analyzed without exposing the sample to the atmosphere.

First claim

What is claimed is:

1 . An integrated analysis system, comprising:
a first sample holder having a first closed space formed therein; a second sample holder having a second closed space formed therein; a first analyzing unit on which the first sample holder is mounted and in which a first analysis is performed on a sample for analysis; a second analyzing unit on which the second sample holder is mounted and in which a second analysis is performed on the sample for analysis; a sample plate mounted in the first closed space in the first sample holder or the second closed space in the second sample holder, wherein the sample for analysis is mounted on an upper surface of the sample plate; and a glove box unit in which a sample transfer space is formed, wherein the sample plate is accommodated in one of the first closed space, the sample transfer space, and the second closed space in a state of non-exposure to an atmosphere, and in the sample transfer space, the sample plate is transferred from one of the first sample holder and the second sample holder to the other one.

2 . The integrated analysis system of claim 1 , wherein:
the sample plate has a shape of a disc, a fixing hole through which a fastener penetrates is formed at a center of the sample plate, an alignment hole for alignment of the sample plate is formed on the sample plate at a position spaced in a first predetermined distance apart from the fixing hole, and a positioning marker for recognition of coordinate transformation between the first analyzing unit and the second analyzing unit is formed on the upper surface of the sample plate at a position spaced in a second predetermined distance apart from the fixing hole.

3 . The integrated analysis system of claim 2 , wherein a plurality of grid lines that intersect perpendicularly to each other are formed on the upper surface of the sample plate.

4 . The integrated analysis system of claim 2 , wherein the first sample holder comprises:
a body having an upper surface on which the sample plate is mounted; a lower housing in which a lower end of the body is accommodated such that an upper end of the body protrudes upward; and an upper housing configured to cover the upper surface of the body and coupled to an upper part of the lower housing to form the first closed space.

5 . The integrated analysis system of claim 4 , wherein:
a fixing groove into which the fastener is inserted is formed on the upper surface of the body at a position facing the fixing hole, and a first alignment protrusion which is inserted into the alignment hole is formed on the upper surface of the body at a position facing the alignment hole.

6 . The integrated analysis system of claim 5 , wherein:
the fastener is a bolt, threads are formed on an inner circumferential surface of the fixing groove, and the fastener and the fixing groove are screwed to fix the sample plate onto the upper surface of the body.

7 . The integrated analysis system of claim 4 , wherein the second sample holder comprises:
a mounting plate having an upper surface on which the sample plate is mounted; a stopper coupled to the upper surface of the mounting plate to form the second closed space; and a knob detachably coupled to an upper end of the stopper.

8 . The integrated analysis system of claim 7 , wherein;
a sample mounting area on which the sample plate is mounted is formed on the upper surface of the mounting plate, a stopper insertion groove into which a lower end of the stopper is inserted is formed on the upper surface of the mounting plate, and the stopper insertion groove is formed in a shape of a closed loop to surround the sample mounting area.

9 . The integrated analysis system of claim 8 , wherein a second alignment protrusion which is inserted into the alignment hole is formed in the sample mounting area at a position facing the alignment hole.

10 . The integrated analysis system of claim 8 , wherein;
the sample plate is formed of a ferromagnetic material, and a magnetic fixing part configured to fix the sample plate with a magnetic force is provided in the sample mounting area.

11 . The integrated analysis system of claim 8 , wherein;
a sealing member insertion groove into which a sealing member that is formed of an elastic material is inserted is formed on an outer circumferential surface of the stopper, and the sealing member is in close contact with an inner wall of the stopper insertion groove.

12 . The integrated analysis system of claim 11 , wherein an identification step is formed on the outer circumferential surface of the stopper above the sealing member insertion groove.

13 . The integrated analysis system of claim 7 , wherein;
a fastening bolt for coupling with the stopper is formed at a lower end of the knob, a fastening groove into which the fastening bolt is inserted is formed on an upper surface of the stopper, and the fastening bolt and the fastening groove are screwed to each other.

14 . The integrated analysis system of claim 7 , wherein a vacuum vent hole configured to relieve a vacuum generated in the second closed space is provided on an upper surface of the stopper.

Assignees

• Lg Energy Solution Ltd

Inventors

• Kim Soeun
• Youn Yeu Young
• Kim Minkyoung
• Chae Byung Joon

Classifications

• H01J49/164

  Laser desorption/ionisation, e.g. matrix-assisted laser desorption/ionisation [MALDI] (sample holders H01J49/0418) · CPC title

• G01N23/2251

  using incident electron beams, e.g. scanning electron microscopy [SEM] · CPC title

• H01J49/0409

  Sample holders or containers (containers for retaining a material to be analyzed, B01L3/50, for DNA, C12Q1/6834, for biological materials, G01N33/543) · CPC title

• G01N27/64

  using wave or particle radiation to ionise a gas, e.g. in an ionisation chamber · CPC title

• G01N23/2206

  Combination of two or more measurements, at least one measurement being that of secondary emission, e.g. combination of secondary electron [SE] measurement and back-scattered electron [BSE] measurement · CPC title