Electrostatic chuck assembly for cryogenic applications
US-2022270864-A1 · Aug 25, 2022 · US
Electrostatic chuck
US2024356465A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2024356465-A1 |
| Application number | US-202418635344-A |
| Country | US |
| Kind code | A1 |
| Filing date | Apr 15, 2024 |
| Priority date | Apr 24, 2023 |
| Publication date | Oct 24, 2024 |
| Grant date | — |
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Abstract
Official abstract text for this publication.
An electrostatic chuck 10 includes: a dielectric substrate 100 ; a base plate 200 formed of a metal material; and a joining layer 300 which is provided between the dielectric substrate 100 and the base plate 200 . When a thickness of the joining layer 300 is T (μm) and a Young's modulus of the joining layer 300 at −100° C. is E (MPa), a condition expressed as E≤0.04×T−0.04 is satisfied.
First claim
Opening claim text (preview).
What is claimed is: 1 . An electrostatic chuck, comprising: a dielectric substrate; a base plate formed of a metal material; and a joining layer which is provided between the dielectric substrate and the base plate, wherein when a thickness of the joining layer is T (μm) and a Young's modulus of the joining layer at −100° C. is E (MPa), a condition expressed as E ≤ 0.04 × T - 0.04 is satisfied. 2 . The electrostatic chuck according to claim 1 , wherein a through hole is formed in the dielectric substrate. 3 . The electrostatic chuck according to claim 2 , wherein a diameter at an end of the through hole on an opposite side to the joining layer is equal to or smaller than 0.2 mm. 4 . The electrostatic chuck according to claim 1 , wherein the thickness of the joining layer is equal to or smaller than 100 μm. 5 . The electrostatic chuck according to claim 1 , wherein the joining layer is a layer generated by curing a silicone adhesive.
Assignees
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Classifications
characterised by a coating, a hardness or a material · CPC title
using electrostatic chucks · CPC title
- H10P72/722Primary
Details of electrostatic chucks · CPC title
Polysiloxanes · CPC title
Devices for holding work using magnetic or electric force acting directly on the work · CPC title
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- What does patent US2024356465A1 cover?
- An electrostatic chuck 10 includes: a dielectric substrate 100 ; a base plate 200 formed of a metal material; and a joining layer 300 which is provided between the dielectric substrate 100 and the base plate 200 . When a thickness of the joining layer 300 is T (μm) and a Young's modulus of the joining layer 300 at −100° C. is E (MPa), a condition expressed as E≤0.04×T−0.04 is sati…
- Who is the assignee on this patent?
- Toto Ltd
- What technology area does this patent fall under?
- Primary CPC classification H10P72/722. Mapped technology areas include Electricity.
- When was this patent published?
- Publication date Thu Oct 24 2024 00:00:00 GMT+0000 (Coordinated Universal Time) (A1). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 1 related publication on this page (citations in our corpus or others sharing the same primary CPC).