Optomechanically calibrated photonic thermometer and calibrating a photonic thermometer

Patent metadata

Field	Value
Publication number	US-2024328863-A1
Application number	US-202418625879-A
Country	US
Kind code	A1
Filing date	Apr 3, 2024
Priority date	Apr 3, 2023
Publication date	Oct 3, 2024
Grant date	—

Abstract

A thermometer system includes a photonic thermometer; and an optomechanical thermometer configured to calibrate the photonic thermometer, thereby making the thermometer system an optomechanically calibrated photonic thermometer.

First claim

What is claimed is:

1 . A nanophotonic thermometer system comprising:
a photonic thermometer; and an optomechanical thermometer configured to calibrate the photonic thermometer, thereby making the thermometer system an optomechanically calibrated photonic thermometer.

2 . The nanophotonic thermometer system of claim 1 , wherein the optomechanical thermometer is a fin-type optomechanical oscillator.

3 . The nanophotonic thermometer system of claim 1 , wherein the photonic thermometer is a photonic crystal cavity.

4 . The nanophotonic thermometer system of claim 1 , wherein the photonic thermometer is a ring resonator.

5 . The nanophotonic thermometer system of claim 1 , wherein the photonic thermometer is a disk resonator.

6 . The nanophotonic thermometer system of claim 2 , further comprising:
a bus waveguide; and a secondary layer of photoresist or dielectric oxide deposited onto the bus waveguide, the photonic thermometer, and the fin-type optomechanical thermometer.

7 . The nanophotonic thermometer system of claim 2 , further comprising:
a bus waveguide; and a silicon oxide substrate etched down beneath the bus waveguide, the photonic thermometer, and the fin-type optomechanical thermometer.

8 . The nanophotonic thermometer system of claim 1 , further comprising a temperature control device integrated on-chip with the photonic thermometer and the optomechanical thermometer.

9 . A method of calibrating a nanophotonic thermometer system comprising:
activating a temperature control device of the nanophotonic thermometer system; adjusting the temperature control device while iteratively measuring a relative temperature of the nanophotonic thermometer system until the photonic thermometer provides a fixed resonance frequency response; and measuring an absolute temperature of the nanophotonic thermometer system using an optomechanical thermometer; and calibrating the photonic thermometer using the absolute temperature measurement and a stable relative temperature measurement.

10 . The method of claim 9 , further comprising the step of changing to a different stable resonance frequency response of the photonic thermometer by adjusting the temperature control device.

11 . A method of calibrating a nanophotonic thermometer system comprising:
measuring a relative temperature of a sample using a photonic thermometer; measuring an absolute temperature of the sample using an optomechanical thermometer; and calibrating the photonic thermometer using the absolute temperature measurement and the relative temperature measurement.

12 . The method of claim 11 , further comprising the steps of:
removing the nanophotonic thermometer system from a process environment at a predetermined calibration interval; placing the nanophotonic thermometer system in a bath environment; and returning the nanophotonic thermometer system to the process environment after the step of calibrating.

13 . The method of claim 12 , further comprising the step of changing a temperature of the bath environment or moving the nanophotonic thermometer system into a different bath environment at a different temperature.

14 . A method of operating a nanophotonic thermometer system comprising the steps of:
operating the nanophotonic thermometer system in a process environment; measuring a relative temperature of a sample using a photonic thermometer of the nanophotonic thermometer system; measuring an absolute temperature of the sample using an optomechanical thermometer of the nanophotonic thermometer system; comparing the absolute temperature measurement and the relative temperature measurement; and if the measurements disagree, correcting the calibration of the photonic thermometer, and if the measurements agree, continuing operation without correction.

15 . The method of claim 14 , further comprising the step of:
if the measurements disagree, removing the nanophotonic thermometer system from the process environment; placing the nanophotonic thermometer system in a bath environment; measuring a relative temperature of the bath environment using the photonic thermometer; measuring an absolute temperature of the bath environment using the optomechanical thermometer; and calibrating the photonic thermometer using the absolute temperature measurement of the bath environment and the relative temperature measurement of the bath environment.

Assignees

• Government Of The Us Secretary Of Commerce

Inventors

• Barker Daniel Schaeder
• Klimov Nikolai Nikolaevich
• Purdy Thomas Patrick

Classifications

• G01K11/00

  Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 · CPC title

• G01J5/023

  Particular leg structure or construction or shape; Nanotubes · CPC title

• G01K15/005

  Calibration · CPC title

• G01J5/0818

  Waveguides · CPC title

• G01J5/80

  Calibration (using comparison with reference sources G01J5/52) · CPC title