Efficient energy recovery in a nanosecond pulser circuit

Patent metadata

Field	Value
Publication number	US-2024304417-A1
Application number	US-202418413975-A
Country	US
Kind code	A1
Filing date	Jan 16, 2024
Priority date	Jul 27, 2018
Publication date	Sep 12, 2024
Grant date	—

Abstract

Some embodiments include a nanosecond pulser circuit. In some embodiments, a nanosecond pulser circuit may include: a high voltage power supply; a nanosecond pulser electrically coupled with the high voltage power supply and switches voltage from the high voltage power supply at high frequencies; a transformer having a primary side and a secondary side, the nanosecond pulser electrically coupled with the primary side of the transformer; and an energy recovery circuit electrically coupled with the secondary side of the transformer. In some embodiments, the energy recovery circuit comprises: an inductor electrically coupled with the high voltage power supply; a crowbar diode arranged in parallel with the secondary side of the transformer; and a second diode disposed in series with the inductor and arranged to conduct current from a load to the high voltage power supply.

First claim

1 . A plasma deposition system comprising:
an energy storage capacitor; a plurality of switches electrically coupled with the energy storage capacitor that switch voltage from the energy storage capacitor at high frequencies; a transformer having a primary side and a secondary side, the plurality of switches electrically coupled with the primary side of the transformer; a plasma deposition chamber electrically coupled with the secondary side of the transformer; and an energy recovery circuit electrically coupled with the secondary side of the transformer, the energy recovery circuit comprising:
an energy recovery inductor electrically coupled with the energy storage capacitor;
a crowbar diode arranged in parallel with the secondary side of the transformer; and
a second diode disposed in series with the energy recovery inductor and arranged to conduct current from a load through the energy recovery inductor to the energy storage capacitor.

2 . The plasma deposition system according to claim 1 , wherein the energy recovery inductor comprises an inductance greater than about 50 μH.

3 . The plasma deposition system according to claim 1 , wherein the plurality of switches switches voltage from the energy storage capacitor at frequencies of about 400 kHz.

4 . The plasma deposition system according to claim 1 , wherein the plurality of switches provides voltage greater than 5 kV to a load.

5 . The plasma deposition system according to claim 1 , wherein the plurality of switches are part of a nanosecond pulser.

6 . The plasma deposition system according to claim 1 , wherein the plurality of switches comprise an RF driver in a full-bridge or half-bridge configuration that operates at frequencies above about 400 kHz.

7 . The plasma deposition system according to claim 1 , wherein the energy recovery circuit further comprises a high voltage switch in series with the second diode and the energy recovery inductor.

8 . The plasma deposition system according to claim 7 , wherein the high voltage switch switches voltages greater than 5 kV.

9 . The plasma deposition system according to claim 1 , wherein the energy storage capacitor is electrically coupled with a high voltage power supply and provides DC power with a voltage greater than 1 kV.

10 . A plasma deposition system comprising:
a storage capacitor; a switching circuit coupled with the storage capacitator, the switching circuit outputs waveforms with voltages greater than I kV and with a frequencies greater than 1 kHz; a transformer having a primary side and a secondary side, the switching circuit electrically coupled with the primary side of the transformer; a plasma deposition chamber electrically coupled with the secondary side of the transformer; and an energy recovery circuit electrically coupled with the secondary side of the transformer and the storage capacitor, the energy recovery circuit comprising:
an energy recovery inductor electrically coupled with the high voltage power supply; and
a second diode disposed in series with the energy recovery inductor and arranged to conduct current from the plasma deposition chamber through the energy recovery inductor to the high voltage power supply.

11 . The plasma deposition system according to claim 10 , wherein the energy recovery circuit comprises a crowbar diode arranged in parallel with the secondary side of the transformer.

12 . The plasma deposition system according to claim 10 , wherein the switching circuit comprises a nanosecond pulser.

13 . The plasma deposition system according to claim 10 , wherein the switching circuit comprises an RF driver that operates at frequencies above about 400 kHz.

14 . The plasma deposition system according to claim 13 , wherein the RF driver comprises either a half-bridge driver or a full-bridge driver.

15 . The plasma deposition system according to claim 10 , further comprising a bias compensation circuit includes a bias compensation diode in parallel with the bias compensation switch; and a DC power supply arranged in series with the bias compensation diode and the bias compensation switch.

16 . The plasma deposition system according to claim 10 , wherein the energy recovery inductor comprises an inductance greater than 50 μH.

17 . (canceled)

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29 . A method comprising:
closing one or more switches to create a first pulse, the one or more switches are coupled with an energy storage capacitor and a primary side of a transformer, wherein the first, the first pulse has a voltage greater than about 1 kV and pulse width less than about 1,000 ns, and the first pulse is introduced into a plasma deposition chamber via a secondary side of the transformer; opening the one or more switches for period of time less than about 100 microseconds and allowing charge from the plasma deposition chamber to flow through an energy recovery circuit to the energy storage capacitor; closing the one or more switches to create a second pulse that is introduced into a plasma deposition chamber via a secondary side of the transformer; and opening the one or more switches for period of time less than about 100 microseconds and allowing charge from the plasma deposition chamber to flow through an energy recovery circuit to the energy storage capacitor.

30 . The method according to claim 29 , wherein the energy recovery circuit comprises an inductor and a diode in series.

31 . The method according to claim 29 , wherein charge flows from the plasma deposition chamber to the energy storage capacitor when the charge t the plasma deposition chamber is greater than the charge the energy storage capacitor.

32 . The method according to claim 29 , further comprising:
opening a bias compensation switch that is electrically coupled with the secondary side of the transformer and the plasma deposition chamber at substantially the same time when the one or more switches are closed; and closing the bias compensation switch at substantially the same time when the one or more switches are open.

33 . The method according to claim 29 , further comprising:
opening an energy recovery switch within the energy recovery circuit at substantially the same time when the one or more switches are closed; and closing the energy recovery switch at substantially the same time when the one or more switches are open.

Assignees

• Eagle Harbor Tech Inc

Inventors

• Prager James
• Ziemba Timothy
• Miller Kenneth
• Slobodov Ilia
• Quinley Morgan

Classifications

• H10P72/722

  Details of electrostatic chucks · CPC title

• H01J37/32715

  Workpiece holder · CPC title

• H01J37/32174

  Circuits specially adapted for controlling the RF discharge · CPC title

• H01J37/32128

  using particular waveforms, e.g. polarised waves · CPC title

• H01J37/32091

  the radio frequency energy being capacitively coupled to the plasma · CPC title