Temperature-sensitive and strain-sensitive composite sensor

Patent metadata

Field	Value
Publication number	US-2024264013-A1
Application number	US-202418613244-A
Country	US
Kind code	A1
Filing date	Mar 22, 2024
Priority date	Sep 29, 2021
Publication date	Aug 8, 2024
Grant date	—

Abstract

A temperature-sensitive and strain-sensitive composite sensor includes a strain-sensitive resistive film and a temperature-sensitive resistive film. The strain-sensitive resistive film is represented by a formula of Cr(100-x-y)AlxNy, and 5<x≤50 and 0.1≤y≤20 are satisfied. The temperature-sensitive resistive film has an absolute value of temperature coefficient of resistance (TCR) of 2000 ppm/° C. or more in a temperature range of −50° C. or more and 450° C. or less.

First claim

What is claimed is:

1 . A temperature-sensitive and strain-sensitive composite sensor comprising:
a strain-sensitive resistive film represented by a formula of Cr (100-x-y) Al x N y , 5<x≤50 and 0.1≤y≤20 being satisfied; and a temperature-sensitive resistive film having an absolute value of temperature coefficient of resistance (TCR) of 2000 ppm/° C. or more in a temperature range of −50° C. or more and 450° C. or less.

2 . The temperature-sensitive and strain-sensitive composite sensor according to claim 1 , wherein the temperature-sensitive resistive film has an absolute value of temperature coefficient of sensitivity (TCS) of 500 ppm/° C. or less in the temperature range of −50° C. or more and 450° C. or less.

3 . The temperature-sensitive and strain-sensitive composite sensor according to claim 1 , wherein TCR t ≥(2.5×k t ×ε t ) is satisfied, where TCR t is a temperature coefficient of resistance of the temperature-sensitive resistive film,
k t is a gauge factor of the temperature-sensitive resistive film, and
ε t is a maximum amount of strain applied to an installation location of the temperature-sensitive resistive film.

4 . The temperature-sensitive and strain-sensitive composite sensor according to claim 1 , wherein
the strain-sensitive resistive film has a gauge factor k d of 4 or more in the temperature range of −50° C. or more and 450° C. or less, and TCR t ≥(10×k t ×ε t ) is satisfied, where
TCR t is a temperature coefficient of resistance of the temperature-sensitive resistive film,
k t is a gauge factor of the temperature-sensitive resistive film, and
ε t is a maximum amount of strain applied to an installation location of the temperature-sensitive resistive film.

5 . The temperature-sensitive and strain-sensitive composite sensor according to claim 1 , wherein composition regions of x and y of the strain-sensitive resistive film are 25<x≤50 and 0.1≤y≤20, respectively.

Assignees

• Tdk Corp

Inventors

• Nawaoka Kohei
• Unno Ken
• Kobayashi Masanori
• Sasahara Tetsuya

Classifications

• G01L1/22 Primary

  using resistance strain gauges · CPC title

• G01L9/04

  of resistance-strain gauges · CPC title

• G01K7/22 Primary

  the element being a non-linear resistance, e.g. thermistor (G01K7/26 takes precedence) · CPC title

• G01L1/18

  using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material · CPC title