X-ray transmission inspection apparatus and x-ray transmission inspection method

Patent metadata

Field	Value
Publication number	US-2024255445-A1
Application number	US-202418409492-A
Country	US
Kind code	A1
Filing date	Jan 10, 2024
Priority date	Jan 31, 2023
Publication date	Aug 1, 2024
Grant date	—

Abstract

Proposed are an X-ray transmission inspection apparatus and an X-ray transmission inspection method, in which the size (planar area) a foreign object can be obtained with higher precision. The inspection apparatus includes an X-ray source configured to irradiate a sample with an X-rays, an X-ray sensor configured to detect transmitted X-rays, and a calculation part configured to calculate a planar area of a foreign object in the sample, wherein the calculation part obtains luminance distribution divided into a plurality of pixels according to luminance of the transmitted X-rays in a plane perpendicular to an irradiation direction of the X-rays, calculates, as numbers of effective pixels, numbers of the pixels having luminance reduction amounts greater than or equal to a luminance reduction threshold, and calculates the planar area of the foreign object based on the numbers of the effective pixels.

First claim

What is claimed is:

1 . An X-ray transmission inspection apparatus comprising:
an X-ray source configured to irradiate a sample with X-rays; an X-ray sensor installed on a side opposite to the X-ray source with respect to the sample and configured to detect transmitted X-rays when the X-rays pass through the sample; and a calculation part configured to calculate a planar area of a foreign object in the sample based on the transmitted X-rays detected by the X-ray sensor, wherein the calculation part obtains luminance distribution divided into a plurality of pixels according to luminance of the transmitted X-rays in a plane perpendicular to an irradiation direction of the X-rays, calculates, as numbers of effective pixels, numbers of the pixels having luminance reduction amounts greater than or equal to a luminance reduction threshold that is in a predetermined ratio to a maximum luminance reduction amount, which is the largest luminance reduction amount in the luminance distribution, and calculates the planar area of the foreign object based on the numbers of effective pixels.

2 . The X-ray transmission inspection apparatus according to claim 1 , wherein the calculation part calculates the planar area based on a plurality of the numbers of effective pixels calculated with a plurality of the luminance reduction thresholds that are different from one another.

3 . The X-ray transmission inspection apparatus according to claim 1 , wherein, the calculation part calculates thickness of the foreign object based on a relationship between the maximum luminance reduction amount and thickness of the foreign object obtained in advance.

4 . The X-ray transmission inspection apparatus according to claim 2 , wherein, the calculation part calculates thickness of the foreign object based on a relationship between the maximum luminance reduction amount and thickness of the foreign object obtained in advance.

5 . The X-ray transmission inspection apparatus according to claim 3 , wherein the calculation part calculates a volume of the foreign object from the obtained planar area and thickness of the foreign object.

6 . The X-ray transmission inspection apparatus according to claim 4 , wherein the calculation part calculates a volume of the foreign object from the obtained planar area and thickness of the foreign object.

7 . An X-ray transmission inspection method comprising:
irradiating a sample with X-rays from an X-ray source; detecting transmitted X-rays when the X-rays pass through the sample by using an X-ray sensor installed on a side opposite to the X-ray source with respect to the sample; and calculating a planar area of a foreign object in the sample based on the transmitted X-rays detected by the X-ray sensor, wherein the step of calculating a planar area of a foreign object in the sample based on the transmitted X-rays detected by the X-ray sensor comprises: obtaining luminance distribution divided into a plurality of pixels according to luminance of the transmitted X-rays in a plane perpendicular to an irradiation direction of the X-rays; calculating, as numbers of effective pixels, numbers of the pixels having luminance reduction amounts greater than or equal to a luminance reduction threshold that is in a predetermined ratio to a maximum luminance reduction amount, which is the largest luminance reduction amount in the luminance distribution; and calculating the planar area of the foreign object based on the numbers of effective pixels.

8 . The X-ray transmission inspection method according to claim 7 , wherein the step of calculating the numbers of the pixels having luminance reduction amounts greater than or equal to a luminance reduction threshold that is in a predetermined ratio to a maximum luminance reduction amount calculates a plurality of the numbers of effective pixels with a plurality of the luminance reduction thresholds that are different from one another, and
the step of calculating the planar area calculates the planar area based on the plurality of the numbers of effective pixels that are calculated.

9 . The X-ray transmission inspection method according to claim 7 , wherein the step of calculating the planar area comprises calculating thickness of the foreign object based on a relationship between the maximum luminance reduction amount and thickness of the foreign object obtained in advance.

10 . The X-ray transmission inspection method according to claim 8 , wherein the step of calculating the planar area comprises calculating thickness of the foreign object based on a relationship between the maximum luminance reduction amount and thickness of the foreign object obtained in advance.

8 . The X-ray transmission inspection method according to claim 7 , wherein the step of calculating the planar area comprises calculating a volume of the foreign object from the planar area that is obtained and thickness of the foreign object.

Assignees

• Hitachi High Tech Science Corp

Inventors

• Matsubara Satoshi

Classifications

• G01N23/04 Primary

  and forming images of the material · CPC title

• G01N2223/652

  impurities, foreign matter, trace amounts · CPC title

• G01N2223/633

  thickness, density, surface weight (unit area) · CPC title

• G01N2223/401

  image processing · CPC title

• G01N2223/1016

  X-ray · CPC title