X-ray transmission inspection apparatus and x-ray transmission inspection method

Patent metadata

Field	Value
Publication number	US-2024255444-A1
Application number	US-202418412139-A
Country	US
Kind code	A1
Filing date	Jan 12, 2024
Priority date	Jan 31, 2023
Publication date	Aug 1, 2024
Grant date	—

Abstract

Proposed are an X-ray transmission inspection apparatus and an X-ray transmission inspection method, in which transmission images with large difference between irradiation angles are obtained so that the depth of the position of a foreign object can be obtained with high precision. The X-ray transmission inspection apparatus includes an X-ray source, an X-ray sensor configured to detect a transmitted X-ray, a moving mechanism configured to move the sample, and a calculation part configured to calculate a height position of a foreign object in a thickness direction in the sample, wherein the X-ray source performs irradiation with X-rays in a direction tilted with respect to the thickness direction of the sample and a transport direction of the sample, and the moving mechanism is capable of moving the sample in a first transport direction and in a second transport direction, and of changing X-ray irradiation angles.

First claim

What is claimed is:

1 . An X-ray transmission inspection apparatus comprising:
an X-ray source configured to irradiate a sample with X-rays: an X-ray sensor installed on a side opposite to the X-ray source with respect to the sample and configured to detect transmitted X-rays when X-rays pass through the sample: a moving mechanism configured to move the sample relative to the X-ray source and the X-ray sensor; and a calculation part configured to calculate a height position of a foreign object in a thickness direction in the sample based on the transmitted X-rays detected by the X-ray sensor, wherein the X-ray source performs irradiation with X-rays in a direction tiled with respect to the thickness direction of the sample and a transport direction of the sample, and the moving mechanism is capable of moving the sample in a first transport direction orthogonal to the thickness direction and in a second transport direction opposite to the first transport direction, and is capable of changing an X-ray irradiation angle for the sample when the moving mechanism moves the sample in the first transport direction and an X-ray irradiation angle for the sample when the moving mechanism moves the sample in the second transport direction by moving the X-ray source, the X-ray sensor, and the sample relative to one another.

2 . The X-ray transmission inspection apparatus according to claim 1 , wherein the calculation part calculates the height position of the foreign object by using an amount of misalignment between an X-ray transmission image detected when the sample is moved in the first transport direction and an X-ray transmission image detected when the sample is moved in the second transport direction.

3 . The X-ray transmission inspection apparatus according to claim 1 , wherein the X-ray sensor is a TDI sensor.

4 . The X-ray transmission inspection apparatus according to claim 2 , wherein the X-ray sensor is a TDI sensor.

5 . The X-ray transmission inspection apparatus according to claim 1 , wherein the moving mechanism is capable of changing the X-ray irradiation angles by moving at least the X-ray source.

6 . The X-ray transmission inspection apparatus according to claim 2 , wherein the moving mechanism is capable of changing the X-ray irradiation angles by moving at least the X-ray source.

7 . The X-ray transmission inspection apparatus according to claim 1 , wherein the moving mechanism is capable of rotating the sample 180° with respect to a rotation axis according to an inspection width direction or a rotation axis according to the transport direction.

8 . The X-ray transmission inspection apparatus according to claim 2 , wherein the moving mechanism is capable of rotating the sample 180° with respect to a rotation axis according to an inspection width direction or a rotation axis according to the transport direction.

9 . The X-ray transmission inspection apparatus according to claim 1 , further comprising:
a reference piece installed on a surface of the moving mechanism or the sample, wherein the calculation part calculates the height position of the foreign object by comparing the height position of the foreign object with a height position of the reference piece.

10 . An X-ray transmission inspection method using the X-ray transmission inspection apparatus according to claim 1 , the method comprising:
a first movement step moving the sample in the first transport direction; a first passing point detection step detecting a position, as a first passing point, in the first transport direction at which a foreign object in the sample is detected based on transmitted X-rays detected by the X-ray sensor during the first movement step; a second movement step moving the sample in the second transport direction; a second passing point detection step detecting a position, as a second passing point, in the second transport direction at which the foreign object in the sample is detected based on transmitted X-rays detected by the X-ray sensor during the second movement step; and a calculation step calculating a height position of the foreign object in the sample based on the first passing point, the second passing point, the X-ray irradiation angle when the sample is moved in the first transport direction, and the X-ray irradiation angle when the sample is moved in the second transport direction.

Assignees

• Hitachi High Tech Science Corp

Inventors

• Matsubara Satoshi

Classifications

• G01N2223/309

  support of sample holder · CPC title

• G01N2223/646

  flaws, defects · CPC title

• G01N2223/1016

  X-ray · CPC title

• G01N2223/03

  by transmission · CPC title

• G01N23/02 Primary

  by transmitting the radiation through the material · CPC title