Multilayer electrode, strain resistance film with electrode, and pressure sensor

Patent metadata

Field	Value
Publication number	US-2024255371-A1
Application number	US-202418623315-A
Country	US
Kind code	A1
Filing date	Apr 1, 2024
Priority date	Oct 7, 2021
Publication date	Aug 1, 2024
Grant date	—

Abstract

There is provided a multilayer electrode including a contact layer capable of being superposed on a strain resistance film; a diffusion prevention layer superposed on the contact layer; and a mounting layer superposed on the diffusion prevention layer, in which the diffusion prevention layer contains a transition element belonging to the fifth or sixth periods.

First claim

What is claimed is:

1 . A multilayer electrode comprising:
a contact layer capable of being superposed on a strain resistance film; a diffusion prevention layer superposed on the contact layer; and a mounting layer superposed on the diffusion prevention layer, wherein the diffusion prevention layer contains a transition element belonging to the fifth or sixth period.

2 . The multilayer electrode according to claim 1 , wherein the diffusion prevention layer contains a platinum group element.

3 . The multilayer electrode according to claim 1 , wherein the contact layer contains at least one of Cr, Ti, Ni, and Mo.

4 . The multilayer electrode according to claim 1 , wherein the contact layer contains Ti.

5 . The multilayer electrode according to claim 1 , wherein the mounting layer contains Au.

6 . A strain resistance film with electrode, comprising:
a strain resistance film; and the multilayer electrode according to claim 1 provided on the strain resistance film by superposing the contact layer on the strain resistance film.

7 . The strain resistance film with electrode according to claim 6 , wherein the strain resistance film contains Cr and Al.

8 . The strain resistance film with electrode according to claim 6 , wherein the strain resistance film contains 50 to 99 at % of Cr and 1 to 50 at % of Al.

9 . A pressure sensor comprising:
a strain resistance film; the multilayer electrode according to claim 1 provided on the strain resistance film by superposing the contact layer on the strain resistance film; and a membrane on which the strain resistance film is provided.

10 . The pressure sensor according to claim 9 , wherein the strain resistance film contains Cr and Al.

11 . The pressure sensor according to claim 9 , wherein the strain resistance film contains 50 to 99 at % of Cr and 1 to 50 at % of Al.

Assignees

• Tdk Corp

Inventors

• Kobayashi Masanori
• Haemori Masamitsu
• Unno Ken
• Sasahara Tetsuya
• Nawaoka Kohei

Classifications

• G01L1/2287

  constructional details of the strain gauges (adjustable resistors H01C10/00) · CPC title

• G01L9/04 Primary

  of resistance-strain gauges · CPC title

• G01L1/26

  Auxiliary measures taken, or devices used, in connection with the measurement of force, e.g. for preventing influence of transverse components of force, for preventing overload · CPC title

• G01L1/22

  using resistance strain gauges · CPC title

• G01B7/16

  for measuring the deformation in a solid, e.g. by resistance strain gauge · CPC title