Breaking-in and cleaning method and apparatus for wafer-cleaning brush
US-2024066566-A1 · Feb 29, 2024 · US
US2024226966A9 · US · A9
| Field | Value |
|---|---|
| Publication number | US-2024226966-A9 |
| Application number | US-202218547451-A |
| Country | US |
| Kind code | A9 |
| Filing date | Feb 25, 2022 |
| Priority date | Mar 3, 2021 |
| Publication date | Jul 11, 2024 |
| Grant date | — |
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The present invention relates to a contact cleaning apparatus ( 100 ) including an elastomeric roller ( 120 ), rotatably mounted within a contact cleaning apparatus such that an outer surface ( 123 ) of said elastomeric roller contactingly engages a substrate surface ( 112 ) during use. There is also provided an apparatus for evaluating said outer surface of said elastomeric roller, including an electromagnetic radiation source ( 140 ), configured to selectively emit electromagnetic radiation of a predetermined electromagnetic spectrum onto at least one predetermined region ( 125 ) of said outer surface, a detector ( 160 ), configured to receive at least a first reflection of said electromagnetic radiation from said at least one predetermined region, and a controller ( 270 ) operably coupled to said detector and adapted to determine at least one characteristic parameter of at least said first reflection. The present invention also relates to a method of evaluating a contact cleaning apparatus, including evaluating an elastomeric roller surface using electromagnetic radiation.
Opening claim text (preview).
1 . A contact cleaning apparatus, comprising: an elastomeric roller, rotatably mounted within said contact cleaning apparatus such that an outer surface of said elastomeric roller is contactingly engageable with a substrate surface; and an apparatus for evaluating said outer surface of said elastomeric roller, comprising: an electromagnetic radiation source, configured to selectively emit electromagnetic radiation of a predetermined electromagnetic spectrum onto at least one predetermined region of said outer surface; a detector, configured to receive at least a first reflection of said electromagnetic radiation from said at least one predetermined region; and a controller operably coupled to said detector and adapted to determine at least one characteristic parameter of at least said first reflection. 2 . A contact cleaning apparatus according to claim 1 , wherein said at least one characteristic parameter is a radiation scattering characteristic of at least said first reflection from said at least one predetermined region. 3 . A contact cleaning apparatus according to claim 1 , wherein said controller is adapted to determine a surface roughness of said elastomeric roller based upon said at least one characteristic parameter. 4 . A contact cleaning apparatus according to claim 1 , wherein said controller is adapted to monitor said at least one characteristic parameter and actuate an alarm signal when said at least one characteristic parameter deviates by a predetermined threshold. 5 . A contact cleaning apparatus according to claim 4 , wherein said controller is adapted to monitor said characteristic parameter continuously. 6 . A contact cleaning apparatus according to claim 4 , wherein said predetermined threshold is a maximum deviation from an initial value of said at least one characteristic parameter. 7 . A contact cleaning apparatus according to claim 1 , wherein said controller is further adapted to determine said at least one characteristic parameter from an intensity of at least said first reflection of said electromagnetic radiation from said at least one predetermined region. 8 . A contact cleaning apparatus according to claim 1 , wherein said apparatus is operable to emit said electromagnetic radiation onto a plurality of predetermined regions of said outer surface. 9 . A contact cleaning apparatus according to claim 8 , wherein said controller is adapted to provide an average of said predetermined characteristic parameter determined from at least a first reflection from each of said plurality of different regions. 10 . A method of evaluating an outer surface of an elastomeric roller for a contact cleaning apparatus, said method comprising: using an electromagnetic radiation source to selectively emit electromagnetic radiation of a predetermined electromagnetic spectrum onto a predetermined region of said outer surface; using a detector to detect at least a first reflection from said predetermined region; and using a controller to determine at least one characteristic parameter of at least said first reflection. 11 . A method according to claim 10 , wherein said at least one characteristic parameter is a radiation scattering characteristic of at least said first reflection from said at least one predetermined region. 12 . A method according to claim 11 , wherein said radiation scattering characteristic corresponds to a surface roughness of said elastomeric roller. 13 . A method according to claim 10 , further comprising actuating an alarm signal in response to said at least on characteristic parameter deviating by a predetermined threshold. 14 . A contact cleaning apparatus comprising: an elastomeric roller rotatably mounted within said contact cleaning apparatus such that an outer surface of said elastomeric roller is contactingly engageable a substrate surface, and an apparatus for evaluating a surface roughness of said outer surface of said elastomeric roller, comprising: an electromagnetic radiation source, configured to selectively emit electromagnetic radiation of a predetermined electromagnetic spectrum onto at least one predetermined region of said outer surface; a detector, configured to receive at least a first reflection of said electromagnetic radiation from said at least one predetermined region; and a controller operably coupled to said detector, said controller adapted to determine, based upon said at least said first reflection, a surface roughness of said outer surface. 15 . (canceled)
using mechanical tools · CPC title
rotating about an axis parallel to the surface · CPC title
involving cleaning of the cleaning members · CPC title
Cleaning of moving articles, e.g. of moving webs or of objects on a conveyor · CPC title
Inspecting the exterior surface of cylindrical bodies or wires (G01N21/956 takes precedence) · CPC title
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