Radio frequency micro-electro-mechanical switch and radio frequency device

Patent metadata

Field	Value
Publication number	US-2024186095-A1
Application number	US-202117796501-A
Country	US
Kind code	A1
Filing date	Aug 25, 2021
Priority date	Aug 25, 2021
Publication date	Jun 6, 2024
Grant date	—

Abstract

The present disclosure provides a radio frequency micro-electro-mechanical switch and a radio frequency device, belong to the field of micro-electro-mechanical systems technology, and can at least partially solve a problem that functional performance of an existing radio frequency micro-electro-mechanical switch is easily to be affected in scenarios such as bending deformation of devices. The radio frequency micro-electro-mechanical switch provided by the present disclosure includes: a substrate; and a signal electrode, a first ground electrode, a second ground electrode and a connecting membrane bridge disposed on the substrate, the connecting membrane bridge crosses over the signal electrode, two ends of the connecting membrane bridge are connected to the first ground electrode and the second ground electrode respectively, and the connecting membrane bridge includes a stretchable structure being stretchable in a stretchable direction the same as an extending direction in which the connecting membrane bridge extends.

First claim

1 . A radio frequency micro-electro-mechanical switch, comprising:
a substrate; and a signal electrode, a first ground electrode, a second ground electrode and a connecting membrane bridge, wherein the signal electrode, the first ground electrode, the second ground electrode and the connecting membrane bridge are disposed on the substrate, the connecting membrane bridge crosses over the signal electrode, and two ends of the connecting membrane bridge are connected to the first ground electrode and the second ground electrode respectively, and the connecting membrane bridge comprises a stretchable structure being stretchable in a stretchable direction the same as an extending direction in which the connecting membrane bridge extends.

2 . The radio frequency micro-electro-mechanical switch of claim 1 , wherein the connecting membrane bridge extends in a first direction; and the stretchable structure comprises:
a plurality of first connection portions arranged in the first direction and each extending in a second direction that intersects the first direction; and a plurality of second connection portions, each of the second connection portions extending in the first direction, wherein any two adjacent first connection portions are connected end to end through the second connection portion.

3 . The radio frequency micro-electro-mechanical switch of claim 2 , wherein each of lengths of the second connection portions is not greater than each of lengths of the first connection portions.

4 . The radio frequency micro-electro-mechanical switch of claim 2 , wherein the connecting membrane bridge comprises a plurality of stretchable structures; and
in part of the stretchable structures, the first connection portions have a same length and different widths; and the second connection portions have a same length and a same width.

5 . The radio frequency micro-electro-mechanical switch of claim 1 , wherein the connecting membrane bridge further comprises: a body portion; and
an end of the body portion is connected to the first ground electrode through at least one stretchable structure, and another end of the body portion is connected to the second ground electrode through at least one stretchable structure.

6 . The radio frequency micro-electro-mechanical switch of claim 5 , wherein the body portion comprises: a base material of the connecting membrane bridge provided with a plurality of opening patterns therein, and the opening patterns each penetrate through the base material of the connecting membrane bridge.

7 . The radio frequency micro-electro-mechanical switch of claim 6 , wherein the plurality of opening patterns are uniformly arranged.

8 . The radio frequency micro-electro-mechanical switch of claim 6 , wherein shapes of the opening patterns comprise a circular shape.

9 . The radio frequency micro-electro-mechanical switch of claim 6 , wherein a thickness of the base material of the connecting membrane bridge is in a range from 1 μm to 3 μm.

10 . The radio frequency micro-electro-mechanical switch of claim 5 , wherein the body portion and the stretchable structure are formed into one piece.

11 . The radio frequency micro-electro-mechanical switch of claim 8 , wherein a material of the connecting membrane bridge comprises a conductive metal.

12 . The radio frequency micro-electro-mechanical switch of claim 1 , wherein the substrate comprises a flexible substrate.

13 . A radio frequency device, comprising the radio frequency micro-electro-mechanical switch of claim 1 .

14 . The radio frequency device of claim 13 , comprising: any one of a filter, a voltage-controlled oscillator, a phase shifter and a reconfigurable antenna.

Assignees

• Beijing Boe Technology Dev Co Ltd
• Boe Technology Group Co Ltd

Inventors

• Shi Yingli

Classifications

• B81B2203/0109

  Bridges · CPC title

• B81B3/0072

  For controlling internal stress or strain in moving or flexible elements, e.g. stress compensating layers · CPC title

• B81B2201/016

  having a bridge fixed on two ends and connected to one or more dimples · CPC title

• H01H2059/0027

  Movable electrode connected to ground in the open position, for improving isolation · CPC title

• H01H59/0009 Primary

  making use of micromechanics · CPC title