Substrate transfer unit and substrate treatment apparatus including the same

Patent metadata

Field	Value
Publication number	US-2024162070-A1
Application number	US-202318129082-A
Country	US
Kind code	A1
Filing date	Mar 31, 2023
Priority date	Nov 10, 2022
Publication date	May 16, 2024
Grant date	—

Abstract

A substrate transfer unit is provided. The substrate transfer unit includes: a rail part having a length in a horizontal direction; a vertical part moving along the rail part, guiding the vertical movement of a robot, which transfers a substrate, and having, formed therein, first flow paths that a fluid is introduced into and passes through; main duct parts having, formed therein, second flow paths which communicate with the first flow paths, having first end portions connected to the vertical part, and including outlets, which are formed at second end portions of the main duct parts and face a bottom surface of the index module, and through holes, which are formed on one or both sides of each of the second end portions; and auxiliary duct parts surrounding the through holes at the second end portions of the main duct parts and having, formed therein, expansion spaces which communicate with the second flow paths.

First claim

What is claimed is:

1 . A substrate transfer unit comprising:
a rail part having a length in a horizontal direction; a vertical part moving along the rail part, guiding the vertical movement of a robot, which transfers a substrate, and having, formed therein, first flow paths that a fluid is introduced into and passes through; main duct parts having, formed therein, second flow paths which communicate with the first flow paths, having first end portions connected to the vertical part, and including outlets, which are formed at second end portions of the main duct parts and face downward, and through holes, which are formed on one or both sides of each of the second end portions; and auxiliary duct parts surrounding the through holes at the second end portions of the main duct parts and having, formed therein, expansion spaces which communicate with the second flow paths.

2 . The substrate transfer unit of claim 1 , wherein
the through holes are positioned at the rear of the outlets, and openings are formed at lower parts of the auxiliary duct parts, adjacent to the outlets of the main duct parts.

3 . The substrate transfer unit of claim 2 , wherein the auxiliary duct parts include first surfaces, which are connected to the main duct parts and are provided at the rear of the auxiliary duct parts, second surfaces, which are connected to the main duct parts and are provided at the front of the auxiliary duct parts to face the first surfaces, third surfaces, which are connected to the main duct parts, connect the first surfaces and the second surfaces, and form top surfaces of the auxiliary duct parts, and fourth surfaces, which are connected to the first surfaces, the second surfaces, and the third surfaces and face the through holes.

4 . The substrate transfer unit of claim 3 , wherein
the second end portions of the main duct parts include inclined surfaces, which are downwardly inclined from the rear to the front of the main duct parts to guide the movement of a fluid passing through the second flow paths in a downward direction, and the second surfaces form the same inclination as the inclined surfaces.

5 . The substrate transfer unit of claim 3 , wherein the first surfaces and the fourth surfaces of the auxiliary duct parts extend downwardly below lower ends of the main duct parts.

6 . The substrate transfer unit of claim 5 , wherein the auxiliary duct parts further include fifth surfaces, which extend downwardly from the second surfaces and have the same is height at lower ends thereof as lower ends of the first surfaces and lower ends of the fourth surfaces.

7 . The substrate transfer unit of claim 1 , wherein upper parts of the expansion spaces are formed to be narrower than lower parts of the expansion spaces.

8 . The substrate transfer unit of claim 7 , wherein inclined plates, which face the through holes and are downwardly inclined in directions from the main duct parts to the auxiliary duct parts, are formed in the auxiliary duct parts.

9 . The substrate transfer unit of claim 1 , wherein the main duct parts further include screens, which face the through holes at the rear of the outlets, extend from inner side surfaces of the main duct parts toward the front of the main duct parts, and are bent such that spaces are formed between the screens and the through holes and that the width of the second flow paths is reduced.

10 . A substrate treatment apparatus comprising:
an index module; one or more treatment modules into which a substrate is introduced from the index module to be treated; and a transfer module transferring the substrate between the treatment modules, wherein at least one of the index module and the transfer module includes a substrate transfer unit, and the substrate transfer unit includes a rail part having a length in a horizontal direction, a vertical part moving along the rail part, guiding the vertical movement of a robot, which transfers the substrate, and having, formed therein, first flow paths that a fluid is introduced into and passes through, main duct parts having, formed therein, second flow paths which communicate with the first flow paths, having first end portions connected to the vertical part, and including outlets, which are formed at second end portions of the main duct parts and face a bottom surface of the index module, and through holes, which are formed on one or both sides of each of the second end portions, and auxiliary duct parts surrounding the through holes at the second end portions of the main duct parts and having, formed therein, expansion spaces which communicate with the second flow paths.

11 . The substrate treatment apparatus of claim 10 , wherein the through holes are positioned at the rear of the outlets.

12 . The substrate treatment apparatus of claim 10 , wherein
the substrate transfer unit is provided in the index module, exhaust holes, which communicate with the outlets of the main duct parts, are formed at the bottom surface of the index module, and the substrate treatment apparatus further comprises exhaust units, which are connected to the exhaust holes and forcibly discharge a fluid passing through the second flow paths.

13 . The substrate treatment apparatus of claim 12 , wherein
the auxiliary duct parts include first surfaces, which are connected to the main duct parts and are provided at the rear of the auxiliary duct parts, second surfaces, which are connected to the main duct parts and are provided at the front of the auxiliary duct parts to face the first surfaces, third surfaces, which are connected to the main duct parts, connect the first surfaces and the second surfaces, and form top surfaces of the auxiliary duct parts, and fourth surfaces, which are connected to the first surfaces, the second surfaces, and the third surfaces and face the through holes, and openings, which face the third surfaces, are formed at lower parts of the auxiliary duct parts, adjacent to the outlets of the main duct parts.

14 . The substrate treatment apparatus of claim 13 , wherein
the second end portions of the main duct parts include inclined surfaces, which are downwardly inclined from the rear to the front of the main duct parts to guide the movement of the fluid passing through the second flow paths in a downward direction, and the second surfaces form the same inclination as the inclined surfaces.

15 . The substrate treatment apparatus of claim 13 , wherein the first surfaces and the fourth surfaces of the auxiliary duct parts extend downwardly below lower ends of the main duct parts.

16 . The substrate treatment apparatus of claim 15 , wherein the auxiliary duct parts further include fifth surfaces, which extend downwardly from the second surfaces and have the same height at lower ends thereof as lower ends of the first surfaces and lower ends of the fourth surfaces.

17 . The substrate treatment apparatus of claim 10 , wherein upper parts of the expansion spaces are formed to be narrower than lower parts of the expansion spaces.

18 . The substrate treatment apparatus of claim 17 , wherein inclined plates, which face the through holes and are downwardly inclined in directions from the main duct parts to the auxiliary duct parts, are formed in the auxiliary duct parts.

19 . The substrate treatment apparatus of claim 10 , wherein the main duct parts further include screens, which face the through holes at the rear of the outlets, extend from inner side surfaces of the main duct parts toward the front of the main duct p

Assignees

• Semes Co Ltd

Inventors

• Hong Nam Ki
• Lee Eun Ju
• Kim Gui Hun

Classifications

• H10P72/7602 Primary

  the wafers being placed on a robot blade or gripped by a gripper for conveyance · CPC title

• H10P72/3206

  the substrate being handled substantially vertically · CPC title

• H10P72/3202 Primary

  Mechanical details, e.g. rollers or belts · CPC title

• H10P72/3302 Primary

  Mechanical parts of transfer devices · CPC title

• H10P72/0464

  characterised by the construction of the transfer chamber · CPC title