Optical inspection device and optical inspection method

Patent metadata

Field	Value
Publication number	US-2023417662-A1
Application number	US-202118276082-A
Country	US
Kind code	A1
Filing date	Dec 8, 2021
Priority date	Mar 26, 2021
Publication date	Dec 28, 2023
Grant date	—

Abstract

One mode of an optical inspection apparatus according to the present invention is an optical inspection apparatus for optically inspecting an object, the optical inspection apparatus including: a biasing section ( 20 ) configured to apply, to a group of objects ( 23 A) on a stage, a force for moving the group of objects away with respect to the stage ( 22 ); a catching section ( 24 ) including an adhesion portion ( 241 ) to which an object in the group of objects moved from the stage adheres; and an analysis section ( 3 ) configured to optically analyze the object caught by the catching section. This makes it possible to efficiently and satisfactorily perform optical analysis of individual microplastics by eliminating manual work of picking up the microplastics one by one.

First claim

1 . An optical inspection apparatus for optically inspecting an object, the optical inspection apparatus comprising:
a biasing section configured to apply, to a group of objects on a stage, a force for moving the group of objects away with respect to the stage; a catching section including an adhesion portion to which an object in the group of objects moved from the stage adheres, the adhesion portion being capable of holding the object while the force applied by the biasing section is canceled; and an analysis section configured to optically analyze the object held by the adhesion portion.

2 . The optical inspection apparatus according to claim 1 , wherein the catching section is disposed above the stage in a vertical direction.

3 . The optical inspection apparatus according to claim 1 , wherein the stage has a mesh shape, and wherein the biasing section includes an air flow generating section configured to generate an air flow from a lower side to an upper side of the stage in a vertical direction.

4 . The optical inspection apparatus according to claim 1 , wherein a plurality of the adhesion portions are provided in the catching section according to a predetermined pattern.

5 . The optical inspection apparatus according to claim 1 , wherein the catching section is provided with a reference marker indicating a reference position of a plurality of the adhesion portions.

6 . The optical inspection apparatus according to claim 1 , wherein
the catching section includes first and second mesh-shaped members disposed above the stage in a vertical direction so as to be separated from each other in a height direction, and the first and second mesh-shaped members have opening sizes different from each other.

7 . The optical inspection apparatus according to claim 1 , further comprising:
a pretreatment section configured to perform at least one of cleaning treatment of the group of objects and separation treatment of the group of objects and impurities on a sample including the group of objects, wherein the stage is a mesh-shaped filter which filters a treatment liquid including the sample after the treatment performed by the pretreatment section.

8 . The optical inspection apparatus according to claim 1 , wherein the analysis section is a Fourier transform infrared spectrophotometer.

9 . An optical inspection method for optically inspecting an object, the optical inspection method comprising:
a sample creation step of applying, to a group of objects on a stage, a force for moving the group of objects away with respect to the stage, and adhering an object in the group of objects moved from the stage to an adhesion portion which is capable of holding the object while the force is canceled; and an analysis step of optically analyzing the object caught by the catching section.

10 - 15 . (canceled)

16 . The optical inspection method according to claim 9 , wherein the object is a microplastic.

17 . The optical inspection method according to claim 9 , wherein Fourier transform infrared spectroscopic analysis is performed in the analysis step.

18 . (canceled)

Assignees

• Shimadzu Corp

Inventors

• Ono Takashi
• Ihara Masahiro
• Maruno Hiromasa
• Matsuoka Satoshi
• Matsutani Eri
• Koga Yusuke

Classifications

• G01N15/1433

  using image recognition · CPC title

• G01N15/0227

  using imaging; using holography · CPC title

• G01N2015/1497

  Particle shape · CPC title

• G01N2015/1493

  Particle size · CPC title

• G01N2015/0294

  Particle shape · CPC title