Method of manufacturing a semiconductor body and semiconductor device

Patent metadata

Field	Value
Publication number	US-2023411556-A1
Application number	US-202118251160-A
Country	US
Kind code	A1
Filing date	Oct 29, 2021
Priority date	Oct 30, 2020
Publication date	Dec 21, 2023
Grant date	—

Abstract

In an embodiment a method for manufacturing a semiconductor body includes providing an subcarrier, generating a layer sequence with a first layer having a doped semiconductor material and a second layer deposited thereon, the second layer having an undoped semiconductor material, providing an electrochemical porosification of the first layer, wherein a degree of porosity is at least 20% by volume, forming mesa structures in the second layer and at least partially in the porous first layer and epitaxially producing a functional layer sequence having at least one planar third layer which is applied to the second layer comprising the mesa structures, wherein the at least one planar third layer has a specific lattice constant which is different from a lattice constant of the second layer.

First claim

1 - 28 . (canceled)

29 . A method for manufacturing a semiconductor body comprising:
providing an subcarrier; generating a layer sequence with a first layer having a doped semiconductor material and a second layer deposited thereon, the second layer having an undoped semiconductor material; providing an electrochemical porosification of the first layer, wherein a degree of porosity is at least 20% by volume; forming mesa structures in the second layer and at least partially in the porous first layer; and epitaxially producing a functional layer sequence having at least one planar third layer which is applied to the second layer comprising the mesa structures, wherein the at least one planar third layer has a specific lattice constant which is different from a lattice constant of the second layer.

30 . The method according to claim 29 , further comprising:
detaching the functional layer sequence from the first layer, optionally leaving the second layer attached to the functional layer sequence; or detaching the functional layer sequence from the subcarrier so that the porous first layer remains on the functional layer sequence, the first layer optionally being designed as an outcoupling structure for electromagnetic radiation.

31 . The method according to claim 29 , wherein the functional layer sequence comprises at least one active region configured for light emission.

32 . The method according to claim 29 , wherein forming the mesa structures comprises:
generating a structured mask on the second layer, and etching the second and the porous first layer to form depressions.

33 . The method according to claim 32 , wherein the depressions comprise trenches having a width in a range from 5 nm to 500 nm, and wherein the trenches optionally extend up to the subcarrier.

34 . The method according to claim 32 , wherein the depressions comprise trenches, and wherein two adjacent trenches comprise a spacing in a range from 400 nm to 4 μm.

35 . The method according to claim 32 , wherein the depression comprise trenches, and wherein a ratio between a width of a mesa structure and a width of a trench is in a range of 4 to 15.

36 . The method according to claim 29 , wherein generating the layer sequence during an epitaxial deposition of the first layer comprises depositing a thin undoped release layer so that the first layer is divided into a region facing a support and a region facing away from the support.

37 . The method according to claim 29 , wherein generating the layer sequence during an epitaxial deposition of the first layer introducing a dopant into the first layer having at least 2 different dopant concentrations.

38 . The method according to claim 29 , wherein generating the layer sequence comprises generating non-porous regions by:
applying a patterned mask to the second layer to create non-porous areas beneath the patterned mask; and removing the structured mask after the electrochemical porosification of the first layer.

39 . The method according to claim 38 , wherein dimensions in the patterned mask are selected to be slightly larger than the area or areas of the first layer below the patterned mask that are not to be porosified.

40 . The method according to claim 38 , wherein the functional layer sequence is implemented with an active region configured to emit light of a first wavelength over a porous region and an active region configured to emit light of a second wavelength over a non-porous region.

41 . The method according to claim 29 , wherein the third layer is a sheet-like third layer, and wherein a lattice constant of the sheet-like third layer deviates from a lattice constant of the second layer in a range between 0.2% and 3%.

42 . The method according to claim 29 , wherein the first and second layers comprise at least one of GaN, GaP, AlGaN, InGaN, AlInGaN, AlInGaP or AlGaAs, and wherein the first layer is provided with a dopant during an epitaxial deposition.

43 . The method according to claim 29 , wherein the second layer comprises undoped GaN and the planar third layer comprises an indium-containing material, with an indium content in a range between 0.0001% to 25%.

44 . The method according to claim 29 , wherein materials having a wurtzite structure coalescent surfaces are oriented so that they are perpendicular to an a-axis.

45 . The method according to claim 29 , wherein epitaxially generating the functional layer sequence comprises generating a multiple quantum well structure configured to emit light, and wherein the multiple quantum well structure extends over at least one mesa structure.

46 . The method according to claim 29 , wherein epitaxially generating the functional layer sequence comprises depositing the planar third layer on the mesa-structured second layer, leaving the mesa structure substantially unfilled.

47 . The method according to claim 46 , wherein a material of the third layer forms a bridge over an end portion of the mesa structure facing away from a support.

48 . A semiconductor device comprising:
a subcarrier; a layer sequence comprising a first layer having a doped semiconductor material and a second layer deposited thereon, the second layer comprising an undoped semiconductor material, wherein the first layer comprises at least one porous region, a porosity level of which is at least 20% by volume; a mesa structure introduced in the first and second layers and comprising several depressions; and a functional layer sequence comprising at least one planar third layer located at the second layer comprising the mesa structure, wherein the at least one planar third layer has a lattice constant which is different from a lattice constant of the second layer.

49 . The semiconductor device according to claim 48 , wherein a width of a depression is about ⅕ to 1/20 of a distance between two adjacent depressions.

50 . The semiconductor device according to claim 48 , wherein the first layer comprises at least one non-porous region at least partially surrounded by a porous region.

51 . The semiconductor device according to claim 50 , wherein the at least one non-porous region is separated from the porous region by a trench forming the mesa structure.

52 . The semiconductor device according to claim 48 , wherein the functional layer sequence comprises a multiple quantum well structure arranged on the third layer.

53 . The semiconductor device according to claim 52 , wherein a first region of the multiple quantum well structure overlying a porous region of the first layer is configured to emit light of a first wavelength and a second region of the multiple quantum well structure overlying a non-porous region of the first layer is configured to emit light of a second shorter wavelength.

54 . The semiconductor device according to claim 48 , wherein the first layer comprises a first sub-region having a first degree of porosity and a second sub-region having a second degree of porosity, the first sub-region being separated from the second sub-region by an optional separation layer.

55 . The semiconductor device according to claim 48 , wherein the first layer comprises n-doping and the second layer is undoped, the first and second layers comprising the same base material.

56 . The semiconductor device according to claim 48 , wherein the second layer comprises an u

Assignees

• Ams Osram Int Gmbh

Inventors

• Avramescu Adrian
• Von Malm Norwin
• Stauss Peter

Classifications

• H10H20/01335

  the light-emitting regions comprising nitride materials · CPC title

• H10H20/825

  containing nitrogen, e.g. GaN · CPC title

• H10H20/819

  characterised by their shape, e.g. curved or truncated substrates · CPC title

• H10H20/817 Primary

  characterised by the crystal structures or orientations, e.g. polycrystalline, amorphous or porous · CPC title

• H10H20/01

  Manufacture or treatment · CPC title