Plasma device using coaxial waveguide, and substrate treatment method
US-2021013010-A1 · Jan 14, 2021 · US
US2023398247A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2023398247-A1 |
| Application number | US-202118033945-A |
| Country | US |
| Kind code | A1 |
| Filing date | Oct 19, 2021 |
| Priority date | Nov 23, 2020 |
| Publication date | Dec 14, 2023 |
| Grant date | — |
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Sterilisation apparatus suitable for generating hydroxyl radicals for sterilising an enclosed space, in which energy and water mist feeds are combined in a manner that permit the apparatus to be readily scaled to the size of enclosure. In particular, the sterilisation apparatus provides a manifold for providing a plasma generating region to form a plasma arc through which a flow of water mist is directed to form the hydroxyl radicals. A power distribution device transmits microwave energy generated by a microwave source to the manifold and distributes the received microwave energy to a plurality of output ports connected to the manifold.
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1 . A sterilisation apparatus comprising: a microwave source arranged to generate microwave energy; a mist generator arranged to generate a flow of water mist; a manifold connected to receive the flow of water mist from the mist generator and configured to direct the flow of water mist through an internal volume thereof towards a manifold outlet; and a power distribution device having an input port coupled to the microwave source and a plurality of output ports coupled to the internal volume of the manifold, wherein the power distribution device is configured as a power splitter that operates to distribute microwave energy received at the input port between the plurality of output ports to generate a plasma in a plasma generating region of the internal volume. 2 . The sterilisation apparatus of claim 1 , wherein the power distribution device comprises an assembly of interconnected waveguides. 3 . The sterilisation apparatus of claim 2 , wherein each waveguide comprises a hole in a block made from a conductive material. 4 . The sterilisation apparatus of claim 2 , wherein each waveguide includes a waveguide body made from a plastic material, wherein the waveguide body has a passageway formed therein, an inner surface of which is covered by a conductive layer. 5 . The sterilisation apparatus of claim 1 , wherein the power distribution device comprises a ring coupler, wherein the plurality of output ports extend radially inwards from the ring coupler. 6 . The sterilisation apparatus of claim 5 , wherein a distance between adjacent output ports around the ring coupler is nλ/2, wherein n is an integer and λ is the wavelength of the microwave energy. 7 . The sterilisation apparatus of claim 5 , wherein the input port is disposed on the ring coupler at a location that is equidistant between a pair of output ports. 8 . The sterilisation apparatus of claim 2 , wherein the assembly of interconnected waveguides comprises a plurality of interconnected straight waveguides that provide a plurality of paths from the input port to the outlet ports, where each path comprises a plurality of orthogonally disposed waveguide sections that interconnect junctions between the waveguides. 9 . The sterilisation apparatus of claim 1 , wherein the power distribution device comprises a Wilkinson power divider. 10 . The sterilisation apparatus of claim 1 further comprises a plurality of plasma applicators, which each plasma applicator is connected to a respective output port. 11 . The sterilisation apparatus of claim 10 , further comprising an adapter for connecting the output port to the plasma applicator. 12 . The sterilisation apparatus of claim 1 , wherein the plurality of output ports is disposed around the plasma generating region. 13 . The sterilisation apparatus of claim 1 , wherein the plasma generating region has a torus shape. 14 . The sterilisation apparatus of claim 1 , wherein the manifold comprises a first portion defining a first plasma generating region and a second portion defining a second plasma generating region, wherein preferably the power distribution device is arranged between the first portion and the second portion. 15 . The sterilisation apparatus of claim 1 , comprising a gas supply which is connected to deliver a gas flow to the mist generator, wherein preferably the gas flow entrains water mist formed by the mist generator to create the flow of water mist. 16 . The sterilisation apparatus of claim 10 , wherein each plasma applicator comprises: a conductive tube; and an elongate conductive member extending along a longitudinal axis of the conductive tube, wherein the conductive tube and elongate conductive member provide a first coaxial transmission line at a proximal end of the plasma applicator, and a second coaxial transmission line at a distal end of the plasma applicator, and wherein the first coaxial transmission line is configured as a quarter wavelength impedance transformer. 17 . The sterilisation apparatus of claim 16 , wherein the second coaxial transmission line is configured with a higher impedance than the first coaxial transmission line. 18 . The sterilisation apparatus of claim 16 , wherein the flow of gas received by each plasma applicator passes between the conductive tube and elongate conductive member. 19 . The sterilisation apparatus of claim 16 , wherein each plasma applicator comprises a gas inlet tube configured to deliver the flow of gas to a space between the conductive tube and the elongate conductive member, wherein the gas inlet tube extends transversely to the longitudinal axis of the conductive tube. 20 . The sterilisation apparatus of claim 1 , wherein the microwave source comprises a magnetron. 21 . The sterilisation apparatus of claim 1 , wherein a manifold outlet of the manifold is couplable to an enclosure that defines a space to be sterilised.
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