System and method for parallel two-photon lithography using a metalens array
US-2022252761-A1 · Aug 11, 2022 · US
US2023375747A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2023375747-A1 |
| Application number | US-202217746508-A |
| Country | US |
| Kind code | A1 |
| Filing date | May 17, 2022 |
| Priority date | May 17, 2022 |
| Publication date | Nov 23, 2023 |
| Grant date | — |
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Systems and methods which provide single nanostructure-integrated metalens configurations implementing projector and light shaper functionality are described. A single nanostructure-integrated metalens may comprise an optical substrate having a preconfigured mapping of integrated nanostructures providing metasurfaces for modulating the behaviors of electromagnetic waves to implement a thin, flat lens. A period distance for the nanostructures, a height of the nanostructures, and a quantization for lateral sizes of the nanostructures may be selected for a particular single nanostructure-integrated metalens configuration. A first phase map may be computed with respect to structured light generation and a second phase map may be computed with respect to light collimation, wherein fusion of these phase maps may be used to define a preconfigured mapping for the nanostructures of a single nanostructure-integrated metalens implementation. The phase distribution of the first phase map may be inverse designed, such as using an inverse phase design technique.
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What is claimed is: 1 . A metalens comprising: an optical substrate having a transparent spectral range of at least 50 nm corresponding to an operation wavelength of a light emission device to be used with the metalens; and a plurality of nanostructures integrated on at least one surface of the optical substrate in accordance with a phase distribution of a phase mapping configured for providing both light collimation functionality and structured light projection functionality, wherein the nanostructures are provided in at least 4 quantized lateral sizes and are spaced according to a period distance (P), wherein P is in a range from (λ c *0.8)/2 to (λ c *1.2)/2, and wherein λ c is an operation wavelength region of the metalens. 2 . The metalens of claim 1 , wherein the plurality of nanostructures each have a same height (H), and wherein H in a range from λ c /10 to λ c . 3 . The metalens of claim 1 , wherein the plurality of nanostructures comprise a material having a refractive index with respect the operation wavelength region of the metalens not smaller than 1.5. 4 . The metalens of claim 1 , wherein the plurality of nanostructures comprise a plasmonic metallic material. 5 . The metalens of claim 1 , wherein the phase mapping is provided at least in part by an inverse calculation iterative Fourier transform algorithm (IFTA) based on a target image, and the phase mapping is provided at least in part based on a calculation for phase focusing light to a nanostructure layer of the plurality of nanostructures. 6 . The metalens of claim 5 , wherein the inverse calculation IFTA based on the target image utilizes a distance between adjacent dots in a first axis (d x ) of a plane of the target image, a distance between adjacent dots in a second axis (d y ) of the plane of the target image, and an offset distance (f m ) of lateral shift between alternate rows of dots of the target image, wherein the first axis and the second axis are perpendicular. 7 . The metalens of claim 1 , wherein the nanostructures are provided in 4 or 8 quantized lateral sizes. 8 . The metalens of claim 7 , wherein the nanostructures are provided in 4 quantized lateral sizes corresponding to 4 levels of phase change, wherein the 4 levels of phase correspond to phase changes of π/2, π, 3π/2, and 2π, and wherein the nanostructures are configured to have a same spatial resolution in x and y axes. 9 . The metalens of claim 1 , wherein the metalens is disposed in a support structure of a projector device including the light emission device, the support structure, and the metalens, and wherein the metalens is oriented in the support structure so that a first surface of the at least one surface of the optical substrate having nanostructures of the plurality of nanostructures integrated thereon faces the light emission device. 10 . A method for providing a metalens configured for providing both light collimation functionality and structured light projection functionality, the method comprising: determining corporeal aspects with respect to nanostructures for a particular configuration of a single nanostructure-integrated metalens comprising the metalens, wherein the corporeal aspects include a period distance (P) with respect to the nanostructures and sizes with respect to the nanostructures, wherein the period distance comprises a row-to-row and column-to-column center distance implemented with respect to adjacent ones of the nanostructures, and wherein the sizes provide at least 4 quantized lateral sizes for the nanostructures corresponding to levels of phase change to be implemented by the nanostructures; determining a mapping of the nanostructures for integration upon a surface of an optical substrate of the metalens implementing projector and light shaper functionality by a single nanostructure-integrated metalens comprising the metalens, wherein determining the mapping of the nanostructures comprises: determining a structured light phase map using an inverse designed phase distribution based upon a target image; determining a collimation light phase map using a phase focusing design technique; and fusing the structured light phase map and the collimation light phase map to provide a preconfigured mapping for the nanostructures for the single nanostructure-integrated metalens providing desired spatial pattern of optical phase changes according to the mapping of the nanostructures; and integrating the nanostructures having the corporeal aspects upon the optical substrate according to the mapping to provide the metalens for use as the single nanostructure-integrated metalens. 11 . The method of claim 10 , wherein P is in a range from (λ c *0.8)/2 to (λ c *1.2)/2, and wherein λ c is an operation wavelength region of the metalens. 12 . The method of claim 11 , further comprising: determining a height (H) of the nanostructures, wherein H in a range from λ c /10 to λ c and the height of each of the nanostructures is a same value of H. 13 . The method of claim 10 , wherein determining the structured light phase map uses an inverse calculation iterative Fourier-transform algorithm (IFTA) based on the target image. 14 . The method of claim 13 , wherein determining the collimation light phase map uses a binary diffractive phase function. 15 . The method of claim 14 , wherein fusing the structured light phase map and the collimation light phase map uses a convolution of a surface function. 16 . The method of claim 10 , further comprising: disposing the metalens in a support structure of a projector device including a light emission device, the support structure, and the metalens, wherein the metalens is oriented in the support structure so that a first surface of the optical substrate having the nanostructures integrated thereon faces the light emission device. 17 . A light projector apparatus comprising: a single nanostructure-integrated metalens, wherein the single nanostructure-integrated metalens comprises: an optical substrate having a spectral range of at least 50 nm corresponding to an operation wavelength of a light emission device to be used with the single nanostructure-integrated metalens; and a plurality of nanostructures integrated on at least one surface of the optical substrate in accordance with a phase distribution of a phase mapping configured for providing both light collimation functionality and structured light projection functionality, wherein the nanostructures are provided in at least 4 quantized lateral sizes and are spaced according to a period distance (P), wherein P is in a range from (λ c *0.8)/2 to (λ c *1.2)/2, and wherein λ c is an operation wavelength region of the single nanostructure-integrated metalens; the light emission device having one or more light sources configured to provide emission of light in a light emission plane of the light emission device, wherein the one or more light sources emit light having a center wavelength of λ c ; and a support structure configured to hold the single nanostructure-integrated metalens in a desired predetermined relationship with the light emission plane of the light emission device, wherein the support structure is configured to hold the single nanostructure-integrated metalens oriented in the support structure so that a first surface of the optical substrate having nanostructures of the plurality of nanostructures integrated thereon faces the light emission device. 18 . The light projector apparatus of claim 17 , wherein the light emission device has a plurality of light sources num
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