Optical deflection device and LIDAR apparatus
US-11079541-B2 · Aug 3, 2021 · US
US2023314899A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2023314899-A1 |
| Application number | US-202318331270-A |
| Country | US |
| Kind code | A1 |
| Filing date | Jun 8, 2023 |
| Priority date | Feb 1, 2021 |
| Publication date | Oct 5, 2023 |
| Grant date | — |
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There is provided an optical scanning element, which has a large scan angle, is quickly responsive, and can be downsized. An optical scanning element according to an embodiment of the present invention includes: a first light-deflecting unit for emitting light to a first area; and a second light-deflecting unit for emitting the light that has been emitted to the first area to a second area wider than the first area. The first light-deflecting unit is configured to be changed in refractive index by a change in applied voltage, and to adjust the first area through the change in refractive index, and the second light-deflecting unit is configured to adjust the second area through diffraction.
Opening claim text (preview).
What is claimed is: 1 . An optical scanning element, comprising: first light-deflecting means for emitting light to a first area; and second light-deflecting means for emitting the light that has been emitted to the first area to a second area wider than the first area, wherein the first light-deflecting means is configured to be changed in refractive index by a change in applied voltage, and to adjust the first area through the change in refractive index, and wherein the second light-deflecting means is configured to adjust the second area through diffraction. 2 . The optical scanning element according to claim 1 , wherein the first light-deflecting means is one selected from the group consisting of: a combination of a photonic crystal and a diffraction grating; an optical phased array; and a variable optical metasurface. 3 . The optical scanning element according to claim 2 , wherein the second light-deflecting means is a diffraction grating. 4 . The optical scanning element according to claim 1 , wherein the first light-deflecting means includes: a photonic crystal layer obtained by periodically forming holes in an electro-optical crystal substrate; a line-defect optical waveguide formed in the photonic crystal layer; a diffraction grating arranged in at least one portion selected from an upper portion, a left side surface portion, and a right side surface portion of the optical waveguide; and electrodes arranged on a left side and a right side of the optical waveguide, and is configured so that an emission angle of light emitted from an upper surface of the optical waveguide changes. 5 . The optical scanning element according to claim 4 , wherein the diffraction grating has a plurality of grating grooves extending in a direction substantially perpendicular to a waveguide direction of the optical waveguide. 6 . The optical scanning element according to claim 5 , wherein the second light-deflecting means is a diffraction grating having grating grooves, and wherein the direction in which the grating grooves extend in the first light-deflecting means and a direction in which the grating grooves extend in the second light-deflecting means are substantially perpendicular to each other. 7 . The optical scanning element according to claim 5 , wherein the second light-deflecting means is a diffraction grating having grating grooves, and wherein the direction in which the grating grooves extend in the first light-deflecting means and a direction in which the grating grooves extend in the second light-deflecting means are substantially parallel to each other. 8 . The optical scanning element according to claim 4 , wherein the first light-deflecting means further includes: a support substrate arranged below the electro-optical crystal substrate, the support substrate being configured to support the electro-optical crystal substrate; a joining portion configured to integrate the electro-optical crystal substrate and the support substrate with each other; and a cavity defined by a lower surface of the electro-optical crystal substrate, an upper surface of the support substrate, and the joining portion. 9 . The optical scanning element according to claim 4 , wherein the electro-optical crystal substrate includes one selected from the group consisting of: lithium niobate; lithium tantalate; potassium titanate phosphate; potassium lithium niobate; potassium niobate; potassium tantalate niobate; and a solid solution of lithium niobate and lithium tantalate.
by controlled diffraction or phased-array beam steering (controlled diffraction for optical waveguide switching G02F1/313) · CPC title
Photonic crystals · CPC title
{Analog deflection from or} in an optical waveguide structure] · CPC title
Geodesic lenses or integrated gratings · CPC title
Basic optical elements, e.g. light-guiding paths · CPC title
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