Nanoparticle-Based Holographic Photopolymer Materials and Related Applications

Patent metadata

Field	Value
Publication number	US-2023266512-A1
Application number	US-202118005564-A
Country	US
Kind code	A1
Filing date	Jul 14, 2021
Priority date	Jul 14, 2020
Publication date	Aug 24, 2023
Grant date	—

Abstract

Disclosed herein is a holographic mixture including nanoparticles used to form gratings through holographic exposure. In various embodiments, exposure of the holographic mixture causes the nanoparticles to diffuse to dark fringe regions which creates nanoparticle rich regions and nanoparticle poor regions. Some embodiments include a multi-layer grating which includes a layer formed through the exposed holographic mixture and another layer directly applied above the exposed holographic mixture. The other layer may also be exposed through a holographic recording beam.

First claim

What is claimed is:

1 . A method of forming a grating, the method comprising:
providing a starting cell comprising:
a bottom substrate;
a first removable substrate; and
a first holographic material comprising monomers and nanoparticles, wherein the first holographic material is positioned between the bottom substrate and the first removable substrate;
exposing the first holographic material with a holographic recording beam so the nanoparticles diffuse into dark fringe regions to create nanoparticle poor regions and nanoparticle rich regions to form a bottom grating; removing the first removable substrate; depositing a second holographic material on top of the exposed first holographic material; positioning a second removable substrate on top of the second holographic material; and exposing the second holographic material with another holographic recording beam to form a top grating.

2 . The method of claim 1 , wherein the bottom grating and the top grating have different slant directions.

3 . The method of claim 1 , wherein the bottom grating and the top grating have the same slant direction.

4 . The method of claim 1 , wherein the second holographic material comprises monomers and nanoparticle, and wherein exposing the second holographic material diffuses the nanoparticles into dark fringe regions to create nanoparticle poor regions and nanoparticle rich regions.

5 . The method of claim 1 , wherein the second holographic material comprises photopolymerizable monomers and inert liquid.

6 . The method of claim 5 , wherein the second holographic material further comprises nanoparticles.

7 . The method of claim 6 , wherein the inert liquid comprises a liquid crystal material.

8 . The method of claim 7 , wherein the nanoparticles are dispersed within the liquid crystal material.

9 . The method of claim 1 , further comprising providing a release layer on the surface of the first removable substrate contacting the first holographic material.

10 . The method of claim 9 , wherein the release layer comprises a silane-based fluoropolymer or fluoromonomer.

11 . The method of claim 1 , wherein exposing the first holographic material and the second holographic material with the holographic recording beam polymerizes the monomers to create a polymer matrix.

12 . The method of claim 11 , further comprising ashing the exposed first holographic material and second holographic material to remove at least a portion of the polymer matrix.

13 . The method of claim 12 , further comprising selectively etching a portion of the ashed first holographic material and second holographic material.

14 . The method of claim 1 , wherein the nanoparticles are selected from the group consisting of nanotubes, metals, insulators, ferroelectric materials, nanotubes, nanorods and nanospheres.

15 . A method of forming a grating, the method comprising:
providing a starting cell comprising:
a bottom substrate;
a removable substrate; and
a holographic material comprising monomers and nanoparticles, wherein the holographic material is positioned between the bottom substrate and the removable substrate;
exposing the holographic material with a holographic recording beam so the nanoparticles diffuse into dark fringe regions to create nanoparticle poor regions and nanoparticle rich regions to form a grating; removing the removable substrate; and ashing the exposed holographic material to form a surface relief grating on top of a volume grating.

16 . The method of claim 15 , further comprising further ashing the exposed holographic material to form an inorganic grating structure made of the nanoparticles.

17 . The method of claim 16 , further comprising sintering the nanoparticles at a high temperature to remove grain boundaries between the nanoparticles.

18 . The method of claim 17 , further comprising coating an additional material onto the nanoparticles, wherein at least a portion of the additional material is positioned between adjacent nanoparticle rich regions.

19 . The method of claim 18 , further comprising depositing another holographic material on top of the additional material; and
exposing the other holographic material with another holographic recording beam to create a top grating.

20 . A waveguide device comprising:
a waveguide supporting an input grating and a fold grating, wherein the fold grating comprises alternating nanoparticle rich regions and nanoparticle poor regions, and wherein the input grating comprises alternating liquid crystal rich regions and liquid crystal poor regions.

21 . The waveguide device of claim 20 , wherein the liquid crystal poor regions comprise air gaps.

22 . The waveguide device of claim 20 , wherein the nanoparticle poor regions comprise air gap regions on top of polymer matrix regions.

23 . The waveguide device of claim 20 , wherein the fold grating is an integrated multiplexed grating which functions as both a fold grating and an output grating.

24 . The waveguide device of claim 20 , wherein the alternating nanoparticle rich regions and nanoparticle poor regions include nanoparticles comprising a metal.

25 . The waveguide device of claim 24 , wherein the nanoparticles comprise a metal oxide core.

26 . The waveguide device of claim 25 , wherein the metal oxide core comprises ZrO 2 , TiO 2 , WO 3 , ZnO, Co 3 O 4 , CuO, and/or NiO.

27 . The waveguide device of claim 26 , wherein the nanoparticles further comprise a ligand functionalized derivative of ZrO 2 , TiO 2 , WO 3 , ZnO, Co 3 O 4 , CuO, and/or NiO which surrounds the metal oxide core.

28 . The waveguide device of claim 24 , wherein the metal comprises Pt, Au, and/or Ag.

29 . The waveguide device of claim 24 , wherein the nanoparticles are diameter less than 15 nm.

30 . The waveguide device of claim 29 , wherein the nanoparticles are diameter of about 4 nm to 10 nm.

31 . The waveguide device of claim 20 , wherein the alternating nanoparticle rich regions and nanoparticle poor regions include nanoparticles comprising a piezoelectric material.

32 . The waveguide device of claim 31 , wherein the piezoelectric material comprises PZT, barium titanate, and/or lithium niobate.

33 . A waveguide device comprising:
a waveguide supporting a grating, wherein the grating comprises:
nanoparticle rich regions and nanoparticle poor regions, wherein the nanoparticle poor regions comprise air gap regions on top of polymer matrix regions,
wherein the air gap regions along with the nanoparticle rich regions on the same horizontal level make up a surface relief grating, and
wherein the polymer matrix regions along with the nanoparticle rich regions on the same horizontal level make up a volume grating.

34 . A waveguide device comprising:
a waveguide supporting an inorganic grating, wherein the grating comprises:
nanoparticle rich regions, wherein nanoparticles in the nanoparticle rich regions are sintered at high temperature to remove grain boundaries between the nanoparticles; and
air gaps between adjacent nanoparticle rich regions.

35 . A waveguide device comprising:
a waveguide supporting a multi-layered grating produced using the method of any one of claims 1 - 14 .

Assignees

• Digilens Inc

Inventors

• Buxton Gerald
• Abraham Shibu
• Bergstrom Jr Richard E
• Grant Alastair John
• Ho Tsung-Jui
• Hill Baeddan George
• Callens Michiel Koen
• Gu Hua

Classifications

• G03H2260/61

  Producing material deformation · CPC title

• G03H2260/33

  Having dispersed compound · CPC title

• G03H2260/12

  Photopolymer · CPC title

• G03H2001/0264

  Organic recording material · CPC title

• G02B5/1814

  structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings (G02B5/189 takes precedence) · CPC title