Systems and methods for storing molecular diborane

Patent metadata

Field	Value
Publication number	US-2023235856-A1
Application number	US-202318102259-A
Country	US
Kind code	A1
Filing date	Jan 27, 2023
Priority date	Jan 27, 2022
Publication date	Jul 27, 2023
Grant date	—

Abstract

Described are systems and methods of storing adsorbing diborane on carbon adsorption medium.

First claim

1 . A vessel for storing diborane, the vessel comprising:
a vessel interior, microporous carbon adsorbent in the vessel interior, diborane in the vessel interior at least partially adsorbed on the microporous adsorbent, and the microporous adsorbent comprises slit pores between graphite layers at a graphite layer spacing that increases an activation energy required for diborane degradation relative to an activation energy of degradation of non-adsorbed gaseous diborane at ambient pressure.

2 . The vessel of claim 1 , comprising diborane at a concentration of at least 50 percent (atomic) based on a total amount of adsorbed and gaseous chemical species in the vessel interior.

3 . The vessel of claim 1 , wherein the activation energy is a total of: one-half the activation energy of reaction (i), plus the activation energy of reaction (ii):
B 2 H 6 →2BH 3 ,  (i)
B 2 H 6 +BH 3 ,→B 3 H 9 .  (ii)

4 . The vessel of claim 1 , wherein the graphite sheets have a graphite layer spacing equal to or less than 0.8 nanometers.

5 . The vessel of claim 1 , wherein at least 50 percent of pores of the adsorbent have a graphite layer spacing in a range from 0.4 to 0.8 nanometers.

6 . The vessel of claim 1 , wherein at least 80 percent of pores of the adsorbent have a graphite layer spacing in a range from 0.4 to 0.8 nanometers.

7 . The vessel of claim 1 , wherein at least 80 percent of pores of the adsorbent have a graphite layer spacing in a range from 0.4 to 0.7 nanometers.

8 . The vessel of claim 5 , wherein the stored gaseous molecular diborane exhibits a reduced rate of degradation during storage at 22 degrees Celsius, compared to diborane stored on microporous carbon adsorbent having a lower percentage of pores that have a graphite layer spacing in a range from 0.4 to 0.8 nanometers.

9 . The vessel of claim 6 , wherein the stored gaseous molecular diborane exhibits a reduced rate of degradation during storage at 22 degrees Celsius, compared to diborane stored on microporous carbon adsorbent having a lower percentage of pores that have a graphite layer spacing in a range from 0.4 to 0.8 nanometers.

10 . The vessel of claim 7 , wherein the stored gaseous molecular diborane exhibits a reduced rate of degradation during storage at 22 degrees Celsius, compared to diborane stored on microporous carbon adsorbent having a lower percentage of pores that have a graphite layer spacing in a range from 0.4 to 0.7 nanometers.

11 . A method of reversibly storing diborane in a vessel, the method comprising:
to a storage vessel comprising microporous carbon adsorbent that comprises slit pores between graphite sheets that have a graphite layer spacing that increases an activation energy required for diborane degradation relative to an activation energy of degradation of non-adsorbed gaseous diborane, adding to the vessel diborane gas, the diborane becoming adsorbed onto the microporous carbon adsorbent, and storing the adsorbed diborane in the vessel.

12 . The method of claim 11 , wherein the vessel contains diborane at a concentration of at least 50 percent (atomic) based on a total amount of adsorbed and gaseous chemical species in the vessel interior.

13 . The method of claim 11 , wherein the activation energy is the total of: one-half the activation energy of reaction (i), plus the activation energy of reaction (ii):
B 2 H 6 →2BH 3 ,  (i)
B 2 H 6 +BH 3 ,→B 3 H 9 .  (ii)

14 . The method of claim 11 , wherein the stored diborane experiences reduced degradation during storage compared to an amount of degradation of gaseous molecular diborane stored on microporous carbon adsorbent having a lower percentage of pores that have a graphite layer spacing in a range from 0.4 to 0.8 nanometers.

Assignees

• Entegris Inc

Inventors

• Byl Oleg
• Morris John Robert
• Jones Nathan Ballard
• Troya Diego

Classifications

• F17C2270/0518

  Semiconductors · CPC title

• F17C2221/01

  Pure fluids · CPC title

• F17C2205/0323

  Valves · CPC title

• C01P2002/78

  by stacking-plane distances or stacking sequences · CPC title

• C01B6/10

  Monoborane; Diborane; Addition complexes thereof · CPC title