Film Forming Apparatus, Film Forming Method, and Formed Film

Patent metadata

Field	Value
Publication number	US-2023234084-A1
Application number	US-202117916077-A
Country	US
Kind code	A1
Filing date	Mar 31, 2021
Priority date	Mar 31, 2020
Publication date	Jul 27, 2023
Grant date	—

Abstract

Provided is a film forming apparatus capable of stably supplying a large amount of ceramic raw material powder for a long time and forming a homogeneous and dense film. A film forming apparatus 1 for forming a film on a base material K includes an aerosol transport path 10 for ejecting an aerosol obtained by dispersing a ceramic raw material powder in a gas, from an ejection end 10 a toward the base material K, in which a flow path cross-section at an ejection end 10 a of the aerosol transport path 10 has a substantially circular shape with an area of 10 mm 2 or more.

First claim

1 . A film forming apparatus for forming a film on a base material, comprising:
an aerosol transport path for ejecting an aerosol obtained by dispersing a ceramic raw material powder in a gas, from an ejection end toward the base material, and wherein a flow path cross-section at the ejection end of the aerosol transport path has a substantially circular shape with an area of 10 mm 2 or more.

2 . The film forming apparatus according to claim 1 ,
wherein a distance from the ejection end of the aerosol transport path to the base material is 100 mm or less.

3 . The film forming apparatus according to claim 1 ,
wherein a value obtained by dividing the area of the flow path cross-section at the ejection end of the aerosol transport path by a square of a distance between the ejection end of the aerosol transport path and the base material is 0.001 or more.

4 . The film forming apparatus according to claim 1 , further comprising:
a processing chamber with an inner space in which at least a portion on a side of the ejection end of the aerosol transport path and the base material are arranged, and wherein a flow path cross-section of the aerosol transport path at a processing chamber internal transport section located in the processing chamber has a substantially circular shape with an area of 10 mm 2 or more.

5 . The film forming apparatus according to claim 4 ,
wherein the shape of the flow path cross-section at the processing chamber internal transport section corresponds to the shape of the flow path cross-section at the ejection end.

6 . The film forming apparatus according to claim 4 ,
wherein a pressure in the processing chamber is 0.6 kPa or less.

7 . The film forming apparatus according to claim 1 ,
wherein the aerosol transport path is a straight pipe member.

8 . The film forming apparatus according to claim 1 ,
wherein a density of particles of the ceramic raw material powder is 4.0 g/cm 3 or more.

9 . The film forming apparatus according to claim 1 ,
wherein the ceramic raw material powder is stabilized zirconia.

10 . A film forming method for forming a film on a base material comprising ejecting an aerosol obtained by dispersing a ceramic raw material powder in a gas, from an ejection end of an aerosol transport path toward the base material, and
wherein ejecting the aerosol toward the base material from the ejection end has a flow path cross-section that has a substantially circular shape with an area of 10 mm 2 or more.

11 . The film forming method according to claim 10 ,
wherein a distance from the ejection end of the aerosol transport path to the base material is 100 mm or less.

12 . The film forming method according to claim 10 ,
wherein a value obtained by dividing a flow path cross-sectional area at the ejection end of the aerosol transport path by a square of a distance between the ejection end of the aerosol transport path and the base material is 0.001 or more.

13 . The film forming method according to claim 10 , further comprising:
arranging at least a portion on a side of the ejection end of the aerosol transport path and the base material in an inner space of a processing chamber, and ejecting the aerosol toward the base material from the ejection end of the aerosol transport path in which a flow path cross-section at a processing chamber internal transport section located in the processing chamber has a substantially circular shape with an area of 10 mm 2 or more.

14 . The film forming method according to claim 13 ,
wherein the shape of the flow path cross-section at the processing chamber internal transport section corresponds to the shape of the flow path cross-section at the ejection end.

15 . The film forming method according to claim 13 ,
wherein a pressure in the processing chamber is 0.6 kPa or less.

16 . The film forming method according to claim 10 ,
wherein the aerosol transport path is a straight pipe member.

17 . The film forming method according to claim 10 ,
wherein a density of particles of the ceramic raw material powder is 4.0 g/cm 3 or more.

18 . The film forming method according to claim 10 ,
wherein the ceramic raw material powder is stabilized zirconia.

19 . A formed film formed by the film forming apparatus according to claim 1 .

20 . A formed film formed through the film forming method according to claim 10 .

Assignees

• Osaka Gas Co Ltd
• Aist

Inventors

• Manabe Kyohei
• Higaki Katsuki
• Ohnishi Hisao
• Echigo Mitsuaki
• Sogi Tadayuki
• Akedo Jun
• Aoyagi Rintaro
• Matsui Hiroaki
• Shinoda Kentaro
• Tsuda Hiroki

Classifications

• B05B7/0012 Primary

  Apparatus for achieving spraying before discharge from the apparatus · CPC title

• B05B16/60

  Ventilation arrangements specially adapted therefor · CPC title

• B05B7/1404

  Arrangements for supplying particulate material · CPC title

• B05B7/1486

  for spraying particulate material in dry state · CPC title

• C23C24/04 Primary

  Impact or kinetic deposition of particles · CPC title