Observation device for observation target gas, method of observing target ions, and sample holder

Patent metadata

Field	Value
Publication number	US-2023221268-A1
Application number	US-202117928991-A
Country	US
Kind code	A1
Filing date	Apr 28, 2021
Priority date	Jun 9, 2020
Publication date	Jul 13, 2023
Grant date	—

Abstract

The observation device comprises: a scanning electron microscope for detecting secondary electrons generated by irradiating the sample with an electron beam within the analysis chamber; a sample holder having a cell for housing the observation target gas, an open window of the cell, and a sample mounting part to which the sample can be mounted so as to block the open window; and an observation target ion detecting unit for irradiating the front surface of the sample with an electron beam in a state where the observation target gas in the cell contacts the back surface of the sample and detecting observation target ions derived from the observation target gas generated by the electron beam. In a state where the observation target gas is housed in the cell and the sample is mounted to the sample mounting part of the sample holder, the entire hydrogen cell can be sealed.

First claim

1 . An observation device for observation target gas, comprising:
a scanning electron microscope for detecting secondary electrons generated by emitting an electron beam to a sample within an analysis chamber; a sample holder having a cell for housing the observation target gas, an open window of the cell, and a sample mounting part to which the sample can be mounted in a state blocking the open window; and an observation target ion detecting unit for detecting observation target ions derived from the observation target gas generated by the electron beam after emitting the electron beam to the front surface of the sample in a state where the observation target gas in the cell contacts the back surface of the sample, wherein the entire cell can be sealed in a state where the observation target gas is housed in the cell and the sample is mounted to the sample mounting part of the sample holder.

2 . The observation device for observation target gas as set forth in claim 1 , wherein an absorbing material of the observation target gas is housed in the cell.

3 . The observation device for observation target gas as set forth in claim 1 , wherein the sample mounting part has a window frame area around the open window against which the sample can abut air-tightly, and the window frame area comprises: an internal seal surrounding the open window; an outer seal surrounding the inner seal; an exhaust port for exhausting the space between the inner seal and the outer seal; and a valve for opening and closing the exhaust port.

4 . The observation device for observation target gas as set forth in claim 3 , wherein a differential exhaust port extension pipe is installed in the sample holder, communicating with the exhaust port, in an attachable and detachable state.

5 . The observation device for observation target gas as set forth in claim 1 , wherein the sample holder comprises: an exhaust port and introduction path for exhausting the cell and introducing the observation target gas at a position different from the open window; and a valve for opening and closing the exhaust port and introduction path.

6 . The observation device for observation target gas as set forth in claim 5 , wherein the exhaust port and the introduction path is installed in a state attachable to and detachable from the sample holder.

7 . The observation device for observation target gas as set forth in claim 1 , wherein the sample holder is attached to a sample stage in a state removable to outside the analysis chamber.

8 . The observation device for observation target gas as set forth in claim 7 , wherein the sample stage is installed within the analysis chamber in an insertable and removable state.

9 . The observation device for observation target gas as set forth in claim 8 , wherein the sample stage comprises: a rotating mechanism; a temperature control; and an ion focusing mechanism, and the sample stage is configured to heat the sample.

10 . A method of observing target ions by using the observation device for observation target gas as set forth in claim 1 , the method of observing target ions comprising the steps of:
mounting the sample to the sample mounting part to block the open window; housing the observation target gas in the cell, placing the entire sample holder within the analysis chamber with the entire cell sealed; and detecting the observation target ions derived from the observation target gas generated by emitting the electron beam to the front surface of the sample in a state where the observation target gas contacts the back surface of the sample.

11 . The method of observing target ions as set forth in claim 10 , wherein the observation target ions are detected by precisely changing the position of the sample holder within the analysis chamber.

12 . The method of observing target ions as set forth in claim 10 , wherein a material for absorbing the observation target gas and the observation target gas are housed in the cell.

13 . The method of observing target ions as set forth in claim 10 , wherein
mounting the sample to the sample mounting part in a state where the sample is appressed against a window frame area surrounding the open window, blocking the open window; exhausting the cell and introducing the observation target gas to the cell at a position different from the open window; and placing the entire sample holder within the analysis chamber after the entire cell is sealed.

14 . A sample holder, comprising:
a holder main body that can be housed within an analysis chamber of a scanning electron microscope for detecting secondary electrons by emitting an electron beam; a cell for housing an observation target gas provided within the holder; a sample mounting part to which a sample can be mounted; and an open window of the cell provided at the sample mounting part, wherein by mounting the sample to the sample mounting part, blocking the open window, the cell is sealed in a state where the observation target gas contacts the back surface of the sample.

Assignees

• Nat Inst Materials Science

Inventors

• Nakamura Akiko
• Murase Yoshiharu
• Miyauchi Naoya
• Yakabe Taro

Classifications

• H01J37/20 Primary

  Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support · CPC title

• G01N23/2251 Primary

  using incident electron beams, e.g. scanning electron microscopy [SEM] · CPC title

• G01N23/2204

  Specimen supports therefor; Sample conveying means therefore · CPC title

• H01J2237/2003

  Environmental cells · CPC title

• G01N33/005

  H2 · CPC title