Multicathode deposition system and methods
US-12051576-B2 · Jul 30, 2024 · US
Mask assembly, deposition apparatus including the same, and fabricating method of the mask assembly
US2023220535A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2023220535-A1 |
| Application number | US-202318122644-A |
| Country | US |
| Kind code | A1 |
| Filing date | Mar 16, 2023 |
| Priority date | Sep 27, 2016 |
| Publication date | Jul 13, 2023 |
| Grant date | — |
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- Title
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- Abstract
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Abstract
Official abstract text for this publication.
A mask assembly includes: a mask frame; a mask supported by the mask frame, the mask including a plurality of pattern holes; and a magnetic part disposed on one surface of the mask. The magnetic part provides a magnetic force between the mask and a target substrate and improves an adhesion between the mask and the target substrate to prevent deposition defects.
First claim
Opening claim text (preview).
What is claimed is: 1 . A method for fabricating a mask assembly, the method comprising: forming a mask having a plurality of pattern holes; disposing a magnetic part on one surface of the mask; and magnetically adhering the mask onto a mask frame. 2 . The method of claim 1 , wherein the disposing of the magnetic part comprises: disposing a solvent mixture comprising a magnetic particle and a resin on the one surface of the mask; and curing the solvent mixture. 3 . The method of claim 2 , wherein the magnetic particle is formed by coating a ferromagnetic material on a plastic particle.
Assignees
Inventors
Classifications
- C23C14/042Primary
using masks · CPC title
Vacuum evaporation · CPC title
Crucibles for source material (C23C14/28, C23C14/30 take precedence) · CPC title
Coating on selected surface areas, e.g. using masks · CPC title
Manufacture or treatment specially adapted for the organic devices covered by this subclass · CPC title
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Frequently asked questions
Answers are generated from the same data shown on this page.
- What does patent US2023220535A1 cover?
- A mask assembly includes: a mask frame; a mask supported by the mask frame, the mask including a plurality of pattern holes; and a magnetic part disposed on one surface of the mask. The magnetic part provides a magnetic force between the mask and a target substrate and improves an adhesion between the mask and the target substrate to prevent deposition defects.
- Who is the assignee on this patent?
- Samsung Display Co Ltd
- What technology area does this patent fall under?
- Primary CPC classification C23C14/042. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Thu Jul 13 2023 00:00:00 GMT+0000 (Coordinated Universal Time) (A1). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).