Glass processing method

Patent metadata

Field	Value
Publication number	US-2023219171-A1
Application number	US-202318180495-A
Country	US
Kind code	A1
Filing date	Mar 8, 2023
Priority date	Oct 13, 2020
Publication date	Jul 13, 2023
Grant date	—

Abstract

A glass processing method according to a viewpoint of the present disclosure includes generating a pulse laser beam by using a laser oscillator, and irradiating alkali-free glass to be processed with the pulse laser beam. The wavelength of the pulse laser beam ranges from 248 nm to 266 nm, and the pulse laser beam has an energy ratio greater than or equal to 91% but smaller than or equal to 99% in the region from 5 ns after a pulse rises to 400 ns.

First claim

What is claimed is:

1 . A glass processing method comprising:
generating a pulse laser beam by using a laser oscillator; and irradiating alkali-free glass to be processed with the pulse laser beam, a wavelength of the pulse laser beam ranging from 248 nm to 266 nm, and the pulse laser beam having an energy ratio greater than or equal to 91% but smaller than or equal to 99% in a region from 5 ns after a pulse rises to 400 ns.

2 . The glass processing method according to claim 1 ,
wherein the laser oscillator is a KrF excimer laser apparatus.

3 . The glass processing method according to claim 1 ,
wherein the laser oscillator includes a solid-state laser apparatus configured to output a laser beam having a wavelength of 1030 nm or 1064 nm, and a wavelength converter configured to generate fourth harmonic of the laser beam.

4 . The glass processing method according to claim 3 ,
wherein the wavelength converter includes two second harmonic generating crystals or one fourth harmonic generating crystal.

5 . The glass processing method according to claim 1 ,
wherein let I(t) be optical intensity of a temporal waveform of the pulse laser beam at time t, and a pulse width defined by TIS=[∫I(t)dt] 2 /∫I(t) 2 dt
is greater than or equal to 62 ns but smaller than or equal to 259 ns.

6 . The glass processing method according to claim 1 ,
wherein the energy ratio of the pulse laser beam in the region from 5 ns after a pulse rises to 400 ns is greater than or equal to 91% but smaller than or equal to 95%.

7 . The glass processing method according to claim 1 ,
wherein the alkali-free glass is processed to form a through hole by irradiating the alkali-free glass with the pulse laser beam multiple times.

8 . A glass processing method comprising:
generating a first pulse laser beam having a wavelength ranging from 248 nm to 266 nm by using a laser oscillator; generating a second pulse laser beam having an energy ratio greater than or equal to 91% but smaller than or equal to 99% in a region from 5 ns after a pulse rises to 400 ns by using an optical pulse stretcher disposed in an optical path of the first pulse laser beam to stretch a pulse width of the first pulse laser beam; and irradiating alkali-free glass to be processed with the second pulse laser beam.

9 . The glass processing method according to claim 8 ,
wherein the optical pulse stretcher includes a beam splitter and a plurality of concave mirrors.

10 . The glass processing method according to claim 8 ,
wherein the optical pulse stretcher includes two or more optical pulse stretchers.

11 . The glass processing method according to claim 8 ,
wherein the second pulse laser beam has a pulse waveform having a pulse of a no-circulation beam that is part of the first pulse laser beam that does not circulate on an optical delay path of the optical pulse stretcher but passes through the optical pulse stretcher and a pulse of a circulation beam that is other part of the first pulse laser beam that circulates on the optical delay path at least once and exits out of the optical pulse stretcher, the pulses successively combined with each other, and the pulse of the circulation beam partially overlaps with a preceding pulse.

12 . A glass processing method comprising:
generating a plurality of pulse laser beams each having a wavelength ranging from 248 nm to 266 nm by using a plurality of laser oscillators at different timings; generating a combined pulse laser beam having an energy ratio greater than or equal to 91% but smaller than or equal to 99% in a region from 5 ns after a pulse rises to 400 ns by using a propagation optical system configured to parallelize optical path axes of the plurality of pulse laser beams to combine the plurality of pulse laser beams with one another; and irradiating alkali-free glass as an object to be processed with the combined pulse laser beam.

13 . The glass processing method according to claim 12 ,
wherein the laser oscillator is a KrF excimer laser apparatus.

14 . The glass processing method according to claim 12 ,
wherein the laser oscillator includes a solid-state laser apparatus configured to output a laser beam having a wavelength of 1030 nm or 1064 nm, and a wavelength converter configured to generate fourth harmonic of the laser beam.

15 . The glass processing method according to claim 14 ,
wherein the wavelength converter includes two second harmonic generating crystals or one fourth harmonic generating crystal.

16 . The glass processing method according to claim 12 ,
wherein let I(t) be optical intensity of a temporal waveform of the combined pulse laser beam at time t, a pulse width defined by TIS=[∫I(t)dt] 2 /∫I(t) 2 dt
is greater than or equal to 62 ns but smaller than or equal to 259 ns.

17 . The glass processing method according to claim 12 ,
wherein the generating of the plurality of pulse laser beams comprises generating the plurality of pulse laser beams at the different timings by using a processor configured to set delay periods indicating time differences between timings at which the plurality of pulse laser beams are emitted and set timings at which emission trigger signals are transmitted to the plurality of laser oscillators, and a delay circuit configured to transmit the emission trigger signals to the plurality of laser oscillators at the timings set by the processor.

18 . The glass processing method according to claim 12 ,
wherein the plurality of laser oscillators include a first laser oscillator, a second laser oscillator, and a third laser oscillator, the plurality of pulse laser beams include first pulses outputted from the first laser oscillator, second pulses outputted from the second laser oscillator, and third pulses outputted from the third laser oscillator, the propagation optical system includes a first mirror and a first knife-edge mirror configured to reflect the first pulses outputted from the first laser oscillator in such a way that an optical path axis of the first pulses is parallel to an optical path axis of the second pulses, and a second mirror and a second knife-edge mirror configured to reflect the third pulses outputted from the third laser oscillator in such a way that an optical path axis of the third pulses is parallel to the optical path axis of the second pulses.

19 . The glass processing method according to claim 12 ,
wherein the alkali-free glass is processed to form a through hole by irradiating the alkali-free glass with the combined pulse laser beam multiple times.

20 . The glass processing method according to claim 12 ,
wherein the combined pulse laser beam has a pulse waveform having pulses of the plurality of pulse laser beams successively combined with one another, and successive pulses of the plurality of pulse laser beams partially overlap with each other.

Assignees

• Gigaphoton Inc

Inventors

• Kawasuji Yasufumi
• Suwa Akira
• Adachi Yasuhiro

Classifications

• C03B33/0222

  Scoring using a focussed radiation beam, e.g. laser · CPC title

• B23K26/0622

  by shaping pulses · CPC title

• H01S3/225

  comprising an excimer or exciplex · CPC title

• H01S3/0057

  Temporal shaping, e.g. pulse compression, frequency chirping (soliton generation and propagation G02F1/3513, H01S3/063 and H01S3/108) · CPC title

• H01S3/134

  in gas lasers · CPC title