Galvanometer and lidar

Patent metadata

Field	Value
Publication number	US-2023213622-A1
Application number	US-202218084475-A
Country	US
Kind code	A1
Filing date	Dec 19, 2022
Priority date	Dec 31, 2021
Publication date	Jul 6, 2023
Grant date	—

Abstract

This application discloses a galvanometer and a LiDAR. The galvanometer includes a first shaft and a second shaft. A first shaft drive voltage is used to control the galvanometer to vibrate around the first shaft, a second shaft drive voltage is used to control the galvanometer to vibrate around the second shaft, and the first shaft drive voltage and the second shaft drive voltage are superimposed to drive the galvanometer. There are N working intervals in a second shaft drive period, and in the N working intervals, the second shaft drive voltage and the first shaft drive voltage jointly drive the galvanometer to form N scanning tracks. The N scanning tracks do not coincide and N is a positive integer.

First claim

What is claimed is:

1 . A galvanometer, comprising:
a first shaft and a second shaft, wherein
a first shaft drive voltage is used to control the galvanometer to vibrate around the first shaft;
a second shaft drive voltage is used to control the galvanometer to vibrate around the second shaft;
the first shaft drive voltage and the second shaft drive voltage are superimposed to drive the galvanometer; and
there are N working intervals in a second shaft drive period, and in the N working intervals, the second shaft drive voltage and the first shaft drive voltage jointly drive the galvanometer to form N scanning tracks, wherein the N scanning tracks do not coincide and N is a positive integer.

2 . The galvanometer according to claim 1 , wherein
N equals to 2; and the second shaft drive period comprises a first working interval and a second working interval, wherein
a voltage changing rate of the first working interval and a voltage changing rate of the second working interval are opposite numbers;
a maximum voltage value of the first working interval is the same as a maximum voltage value of the second working interval; and
a minimum voltage value of the first working interval is the same as a minimum voltage value of the second working interval.

3 . The galvanometer according to claim 2 , wherein the second shaft drive period is corresponding to (M+1/2) first shaft drive periods, M being a positive integer, and a start moment of the first working interval is the same as a start moment of an initial first shaft drive period.

4 . The galvanometer according to claim 3 , wherein when M is an odd number, an end moment of the first working interval is the same as a moment corresponding to a ([M/2]+3/4) th first shaft drive period, and a start moment of the second working interval is the same as the end moment of the first working interval; or when M is an even number, the end moment of the first working interval is the same as a moment corresponding to a ([M/2]+1/4) th second shaft drive period, and a start moment of the second working interval is the same as the end moment of the first working interval.

5 . The galvanometer according to claim 1 , wherein N is greater than or equal to 2; and voltage changing rates respectively corresponding to N working intervals are the same, maximum voltage values respectively corresponding to the N working intervals are the same, and minimum voltage values respectively corresponding to the N working intervals are the same.

6 . The galvanometer according to claim 5 , wherein each working interval is corresponding to X consecutive first shaft drive periods, X being a positive integer; and
a difference between an initial phase of an initial first shaft drive period corresponding to an i th working interval and an initial phase of an initial first shaft drive period corresponding to a first working interval is

i
-
1

N

×
360
⁢
°

,

 wherein i is a positive integer less than or equal to N.

7 . The galvanometer according to claim 5 , wherein there are further a flyback interval and a delay interval between two adjacent working intervals, a start moment of the flyback interval is the same as an end moment of a previous working interval, an end moment of the flyback interval is the same as a start moment of the delay interval, an end moment of the delay interval is the same as a start moment of a next working interval, a maximum voltage value of the flyback interval is the same as a maximum voltage value of any working interval, and a minimum voltage value of the flyback interval is the same as a minimum voltage value of any working interval.

8 . The galvanometer according to claim 7 , wherein flyback intervals have equal duration and delay intervals have equal duration.

9 . The galvanometer according to claim 7 , wherein a sum of the duration of the flyback interval and the delay interval is the same as a duration corresponding to

1
N

first shaft drive periods.

10 . A LiDAR, comprising: a laser emitter, a controller, and the galvanometer according to claim 1 , wherein
the laser emitter is configured to emit a laser beam; the controller is connected to both the laser emitter and the galvanometer, and is configured to: control the laser emitter to emit a laser beam, and control a first shaft drive voltage and a second shaft drive voltage of the galvanometer; and the galvanometer is configured to receive and deflect the laser beam emitted by the laser emitter, to change an outgoing angle of the laser beam to implement scanning.

Assignees

• Suteng Innovation Tech Co Ltd

Inventors

• Li Yipeng

Classifications

• G02B26/105

  with one or more pivoting mirrors or galvano-mirrors (G02B26/101 takes precedence) · CPC title

• G02B26/0833

  the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD (G02B26/0825 takes precedence; micromechanical devices in general B81B) · CPC title

• G01S7/4817 Primary

  relating to scanning · CPC title

• G02B26/101 Primary

  with both horizontal and vertical deflecting means, e.g. raster or XY scanners (colour television using laser beams scanning a display screen H04N9/3129) · CPC title

• Y02A90/10

  Information and communication technologies [ICT] supporting adaptation to climate change, e.g. for weather forecasting or climate simulation · CPC title