Substrate conveying robot and substrate processing system with pair of blade members arranged in position out of vertical direction
US-10381257-B2 · Aug 13, 2019 · US
US2023191627A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2023191627-A1 |
| Application number | US-202117926109-A |
| Country | US |
| Kind code | A1 |
| Filing date | May 19, 2021 |
| Priority date | May 19, 2020 |
| Publication date | Jun 22, 2023 |
| Grant date | — |
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An apparatus, system and method for providing a variable swath end effector. The variable swath end effector may include: two arms, each for retaining a portion of a retained element; two pairs of bearing rails, each pair being uniquely mechanically associated with a one of the two arms, wherein a level of one pair of bearing rails is staggered from a second level of the other pair of earing rails in a perpendicular axis, and wherein the staggered pairs of bearing rails are interleaved with each other; and a motor capable of driving a belt in mechanical association with each of the two arms, wherein actuation of the motor drives the belt to synchronously move each of the two arms across a respective one of the pairs of bearing rails to vary the swath between the two arms.
Opening claim text (preview).
What is claimed is: 1 . A variable swath end effector, comprising: two arms, each for retaining a portion of a retained element; two pairs of bearing rails, each pair being uniquely mechanically associated with a one of the two arms, wherein a level of one pair of bearing rails is staggered from a second level of the other pair of earing rails in a perpendicular axis, and wherein the staggered pairs of bearing rails are interleaved with each other; and a motor capable of driving a belt in mechanical association with each of the two arms, wherein actuation of the motor drives the belt to synchronously move each of the two arms across a respective one of the pairs of bearing rails to vary the swath between the two arms. 2 . The variable swath end effector of claim 1 , further comprising a main housing encompassing the two pairs of bearing rails, the motor, and the drive belt. 3 . The variable swath end effector of claim 2 , the main housing further comprising a feed through of a pneumatic line to each of the arms. 4 . The variable swath end effector of claim 3 , wherein a connection of the pneumatic line to each of the arms comprises a port. 5 . The variable swath end effector of claim 4 , wherein the port comprises an o-ring port. 6 . The variable swath end effector of claim 3 , wherein the pneumatic line feeds at least one vacuum port on each arm. 7 . The variable swath end effector of claim 3 , wherein the pneumatic line feeds at least one Bernoulli cup on each arm. 8 . The variable swath end effector of claim 2 , the main housing further comprising a feed through of an optical fiber line to each of the arms. 9 . The variable swath end effector of claim 8 , wherein a connection of the optical fiber line to each of the arms comprises a port. 10 . The variable swath end effector of claim 9 , wherein the port comprises a splice port. 11 . The variable swath end effector of claim 1 , further comprising a back end opposite the two arms. 12 . The variable swath end effector of claim 11 , wherein the back end comprises a network connection. 13 . The variable swath end effector of claim 11 , wherein the back end comprises a control board. 14 . The variable swath end effector of claim 1 , wherein the synchronous movement is encoded. 15 . The variable swath end effector of claim 14 , wherein the encoding is resistance-based. 16 . The variable swath end effector of claim 14 , wherein the encoding is absolute encoding. 17 . The variable swath end effector of claim 1 , wherein the swath varies between about 50 mm and about 200 mm. 18 . The variable swath end effector of claim 1 , further comprising a pitch adjustment to adjust the pitch of at least one of the two arms. 19 . The variable swath end effector of claim 18 , wherein the pitch adjustment comprises a cylinder driven by a jack screw. 20 . The variable swath end effector of claim 1 , wherein the motor is a servo-motor.
Details of suction cup structure, e.g. grooves or ridges · CPC title
actuated by chains, cables or ribbons · CPC title
having fork, comb or plate shaped means for engaging the lower surface on a object to be transported · CPC title
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