Resonator, linear accelerator configuration and ion implantation system having rotating exciter

Patent metadata

Field	Value
Publication number	US-2023124350-A1
Application number	US-202117506185-A
Country	US
Kind code	A1
Filing date	Oct 20, 2021
Priority date	Oct 20, 2021
Publication date	Apr 20, 2023
Grant date	—

Abstract

An exciter for a high frequency resonator. The exciter may include an exciter coil inner portion, extending along an exciter axis, an exciter coil loop, disposed at a distal end of the exciter coil inner portion. The exciter may also include a drive mechanism, including at least a rotation component to rotate the exciter coil loop around the exciter axis.

First claim

1 . An exciter for a high frequency resonator, comprising:
an exciter coil inner portion, extending along an exciter axis; an exciter coil loop, disposed at a distal end of the exciter coil inner portion; and a drive mechanism, the drive mechanism comprising at least a rotation component to rotate the exciter coil loop around the exciter axis.

2 . The exciter of claim 1 , the drive mechanism further comprising a translation component, to move the exciter coil loop along a first direction parallel to the exciter axis.

3 . The exciter of claim 1 , wherein the exciter coil loop comprises a circular shape.

4 . The exciter of claim 1 , further comprising an insulating sleeve, disposed around the exciter coil inner portion; and a conductive sleeve, disposed around the insulating sleeve, wherein the exciter coil loop has a first end, connected to the distal end of the exciter coil inner portion, and a second end, connected to conductive sleeve.

5 . The exciter of claim 4 , wherein the exciter coil inner portion is coupled to receive an RF signal, and wherein the conductive sleeve is coupled to ground.

6 . The exciter of claim 4 , further comprising a conductive ring, disposed circumferentially around the conductive sleeve, for connecting to a resonator.

7 . A resonator for a linear accelerator, comprising:
a toroidal resonator coil, the toroidal resonator coil defining a toroidal shape; and an exciter, disposed at least partially within the toroidal resonator coil and further comprising:
an exciter coil inner portion, extending along an exciter axis;
an exciter coil loop, disposed at a distal end of the exciter coil inner portion; and
a drive mechanism, the drive mechanism comprising at least a rotation component to rotate the exciter coil loop around the exciter axis.

8 . The resonator of claim 7 , wherein the toroidal resonator coil defines an azimuthal axis, and wherein the exciter coil loop is centered on the azimuthal axis.

9 . The resonator of claim 7 , wherein the toroidal resonator coil defines a minor radius, wherein the exciter coil loop has a loop radius, and wherein a ratio of the loop radius to the minor radius lies between 0.2 and 0.3.

10 . The resonator of claim 9 , wherein the ratio of the loop radius to the minor radius lies between 0.22 and 0.28.

11 . The resonator of claim 7 , wherein the toroidal resonator coil defines a midplane, and wherein the exciter coil loop is disposed in the midplane.

12 . The resonator of claim 7 , the drive mechanism further comprising a translation component, to move the exciter coil loop along a first direction parallel to the exciter axis.

13 . The resonator of claim 7 , the exciter further comprising an insulating sleeve, disposed around the exciter coil inner portion; and a conductive sleeve, disposed around the insulating sleeve, wherein the exciter coil loop has a first end, connected to the distal end of the exciter coil inner portion, and a second end, connected to conductive sleeve.

14 . The resonator of claim 13 , wherein the exciter coil inner portion is coupled to receive an RF signal, and wherein the conductive sleeve is coupled to ground.

15 . The resonator of claim 13 ,
wherein the toroidal resonator coil comprises a toroidal coil post, wherein the exciter coil inner portion, the insulating sleeve, and the conductive sleeve together define an exciter shaft, and wherein the exciter shaft is disposed at least partially within the toroidal coil post.

16 . A method of operating a linear accelerator, comprising:
sending RF power to an exciter of an RF resonator in the linear accelerator, wherein the RF resonator comprises a toroidal resonator coil and a resonator can, and wherein the exciter comprises an exciter loop, disposed within the toroidal resonator coil; conducting an ion beam through the linear accelerator; and rotating the exciter loop while the ion beam is conducted through the linear accelerator, wherein a power coupling between the exciter and the toroidal resonator coil is adjusted.

17 . The method of claim 16 , wherein the exciter coil comprises an exciter coil inner portion extending along an exciter axis, and connected to the exciter loop, wherein the exciter coil inner portion is coupled to a drive mechanism, wherein the rotating the exciter loop comprises using the drive mechanism to rotate the exciter coil inner portion about the exciter axis.

18 . The method of claim 16 , further comprising:
before the conducting the ion beam through the linear accelerator, tuning resonator circuit conditions of the RF resonator using an adjustable capacitance component disposed within a resonator chamber housing the toroidal resonator coil.

19 . The method of claim 16 , wherein the toroidal resonator coil defines a minor radius, wherein the exciter loop has a loop radius, and wherein a ratio of the loop radius to the minor radius lies between 0.2 and 0.3.

Assignees

• Applied Materials Inc

Inventors

• Biloiu Costel
• Blahnik David T
• Tam Wai-Ming
• Carlson Charles T
• Sinclair Frank

Classifications

• H05H2007/025

  Radiofrequency systems · CPC title

• H05H2277/12

  Ion implantation · CPC title

• H05H7/22 Primary

  Details of linear accelerators, e.g. drift tubes (H05H7/02 - H05H7/20 take precedence) · CPC title

• H05H9/00

  Linear accelerators · CPC title

• H05H7/12

  Arrangements for varying final energy of beam · CPC title