Light emitting sealed body and light source device

Patent metadata

Field	Value
Publication number	US-2023103662-A1
Application number	US-202217956237-A
Country	US
Kind code	A1
Filing date	Sep 29, 2022
Priority date	Oct 4, 2021
Publication date	Apr 6, 2023
Grant date	—

Abstract

A light emitting sealed body includes: a housing containing light-emitting gas in an internal space; a first window portion provided to the housing and on which first light that is laser light for maintaining a plasma generated in the light-emitting gas is incident; and a second window portion provided to the housing and from which second light that is light from the plasma is emitted. The second window portion includes a second window member made of a material containing diamond. A protective layer made of an inorganic material is formed at least on a surface of the second window member on a side of the internal space.

First claim

What is claimed is:

1 . A light emitting sealed body comprising:
a housing containing light-emitting gas in an internal space; a first window portion provided to the housing and on which first light is incident, wherein the first light is laser light for maintaining a plasma generated in the light-emitting gas; and a second window portion provided to the housing and from which second light is emitted, where in the second light is light from the plasma, wherein at least one of the first window portion and the second window portion includes a window member made of a material containing diamond, and at least one protective layer made of an inorganic material is formed at least on a surface of the window member on a side of the internal space.

2 . The light emitting sealed body according to claim 1 ,
wherein the at least one protective layer includes a plurality of layers.

3 . The light emitting sealed body according to claim 1 ,
wherein the at least one protective layer contains a material having a lower transmittance to ultraviolet light than a transmittance of diamond.

4 . The light emitting sealed body according to claim 1 ,
wherein the at least one protective layer contains a material having a higher transmittance to ultraviolet light than a transmittance of diamond.

5 . The light emitting sealed body according to claim 1 ,
wherein the at least one protective layer includes an ALD layer.

6 . The light emitting sealed body according to claim 1 ,
wherein the at least one protective layer includes a first ALD layer consisting of a first material and a second ALD layer consisting of a second material different from the first material.

7 . The light emitting sealed body according to claim 1 ,
wherein the at least one protective layer includes a layer consist of Al 2 O 3 .

8 . The light emitting sealed body according to claim 1 ,
wherein the at least one protective layer includes a layer consisting of SiO 2 .

9 . The light emitting sealed body according to claim 1 ,
wherein the at least one protective layer includes a layer consisting of TiO 2 .

10 . The light emitting sealed body according to claim 1 ,
wherein the at least one protective layer consists of a layer consisting of Al 2 O 3 .

11 . The light emitting sealed body according to claim 1 ,
wherein the at least one protective layer includes a first layer consist of Al 2 O 3 and a second layer consisting of SiO 2 .

12 . The light emitting sealed body according to claim 1 ,
wherein the at least one protective layer includes a first layer consisting of Al 2 O 3 and a second layer consisting of TiO 2 .

13 . The light emitting sealed body according to claim 1 ,
wherein the at least one protective layer consists of one or a plurality of ALD layers.

14 . The light emitting sealed body according to claim 1 ,
wherein the housing is made of a metal material.

15 . The light emitting sealed body according to claim 1 ,
wherein the window member is fixed to a frame member made of a metal material and is fixed to the housing via the frame member, and the at least one protective layer is formed to reach the frame member from the window member.

16 . The light emitting sealed body according to claim 15 ,
wherein the window member is fixed to the frame member by a joining material, and the at least one protective layer covers the joining material.

17 . The light emitting sealed body according to claim 1 ,
wherein a charging pressure of the light-emitting gas in the housing is 3 MPa or more.

18 . A light source device comprising:
the light emitting sealed body according to claim 1 ; and a light introduction unit that causes the first light to be incident on the first window portion.

Assignees

• Hamamatsu Photonics Kk

Inventors

• Suzuki Akio
• Fujita Toru
• Ohba Shinichi
• ASAI Akinori
• Nakazawa Tomoya
• Morimoto Taiga

Classifications

• H01J61/302 Primary

  characterised by the material of the vessel · CPC title

• H01J61/35

  provided with coatings on the walls thereof; Selection of materials for the coatings (using coloured coatings H01J61/40; using luminescent coatings H01J61/42) · CPC title

• H01J65/04 Primary

  Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating {plasma display panels} · CPC title

• H01J61/025

  Associated optical elements · CPC title