Gas circulation apparatus, gas circulation method, pneumatic apparatus, and semiconductor device

Patent metadata

Field	Value
Publication number	US-2023041577-A1
Application number	US-202117454240-A
Country	US
Kind code	A1
Filing date	Nov 9, 2021
Priority date	Aug 9, 2021
Publication date	Feb 9, 2023
Grant date	—

Abstract

A gas circulation apparatus is applied to a pneumatic apparatus including a solenoid valve apparatus and a cylinder apparatus, and is connected in series between the solenoid valve apparatus and the cylinder apparatus. The gas circulation apparatus includes a valve core structure, a first circulation cavity, and a second circulation cavity. The valve core structure is configured to move in a first direction, so that compressed gas discharged from a first cylinder cavity of the cylinder apparatus and passing through the solenoid valve apparatus is collected and stored by the first circulation cavity, and a second cylinder cavity of the cylinder apparatus is supplied with compressed gas stored in the second circulation cavity together with the compressed gas supplied from the solenoid valve apparatus.

First claim

What is claimed is:

1 . A gas circulation apparatus, applied to a pneumatic apparatus comprising a solenoid valve apparatus and a cylinder apparatus, wherein the gas circulation apparatus is connected in series between the solenoid valve apparatus and the cylinder apparatus; the gas circulation apparatus comprises a valve core structure, a first circulation cavity, and a second circulation cavity; and
wherein the valve core structure is configured to move in a first direction, so that a compressed gas discharged from a first cylinder cavity of the cylinder apparatus and then passing through the solenoid valve apparatus is collected and stored by the first circulation cavity, and a second cylinder cavity of the cylinder apparatus is charged with a compressed gas stored in the second circulation cavity together with a compressed gas supplied from the solenoid valve apparatus.

2 . The gas circulation apparatus of claim 1 , wherein
the valve core structure is further configured to move in a second direction, so that the compressed gas discharged from the second cylinder cavity of the cylinder apparatus and then passing through the solenoid valve apparatus is collected and stored by the second circulation cavity, and the first cylinder cavity of the cylinder apparatus is charged with the compressed gas stored in the first circulation cavity together with the compressed gas supplied from the solenoid valve apparatus.

3 . The gas circulation apparatus of claim 1 , further comprising a connecting rod connected to the valve core structure, wherein
the connecting rod is configured to, drive the valve core structure to move in the first direction responsive to receiving a first driving instruction, so that the gas circulation apparatus is in a first working state; or, the connecting rod is further configured to, drive the valve core structure to move in a second direction responsive to receiving a second driving instruction, so that the gas circulation apparatus is in a second working state.

4 . The gas circulation apparatus of claim 3 , further comprising a first gas recovery hole and a second gas recovery hole, the first gas recovery hole being arranged on a side wall of the first circulation cavity, and the second gas recovery hole being arranged on a side wall of the second circulation cavity; wherein
the first gas recovery hole is configured to guide the compressed gas discharged from the first cylinder cavity into the first circulation cavity through the solenoid valve apparatus when the gas circulation apparatus is in the first working state; and the second gas recovery hole is configured to guide the compressed gas discharged from the second cylinder cavity into the second circulation cavity through the solenoid valve apparatus when the gas circulation apparatus is in the second working state.

5 . The gas circulation apparatus of claim 4 , wherein
the connecting rod is configured to drive the valve core structure to move in the first direction, and the valve core structure is stopped from moving when the valve core structure moves to a position in which the first gas recovery hole is opened and the second gas recovery hole is closed, so that the gas circulation apparatus is in the first working state; or, the connecting rod is configured to drive the valve core structure to move in the second direction, and the valve core structure is stopped from moving when the valve core structure moves to a position in which the first gas recovery hole is closed and the second gas recovery hole is opened, so that the gas circulation apparatus is in the second working state.

6 . The gas circulation apparatus of claim 4 , further comprising a first sealing structure and a second sealing structure, wherein the first sealing structure is arranged on an inner side of the first circulation cavity, and the second sealing structure is arranged on an inner side of the second circulation cavity;
the valve core structure comprises a first piston and a second piston, the first piston is located in the first circulation cavity, and the second piston is located in the second circulation cavity; wherein the valve core structure is further configured to, when moving in the first direction, control the first piston to move to a position in which the first gas recovery hole is opened, and control the second piston to move to engage with the second sealing structure to close the second gas recovery hole; or, the valve core structure is further configured to, when moving in the second direction, control the first piston to move to engage with the first sealing structure to close the first gas recovery hole, and control the second piston to move to a position in which the second gas recovery hole is opened.

7 . The gas circulation apparatus of claim 6 , wherein the valve core structure further comprises a third piston and a fourth piston, the third piston being located in the first circulation cavity, and the fourth piston being located in the second circulation cavity; wherein
the valve core structure is further configured to, when moving in the first direction, control the third piston to move to engage with the first sealing structure to divide the first circulation cavity into a first gas recovery cavity and a first gas passage, and control the fourth piston to move to a position in which a second gas recovery cavity and a second gas passage are combined into the second circulation cavity; or, the valve core structure is further configured to, when moving in the second direction, control the third piston to move to a position in which a first gas recovery cavity and a first gas passage are combined into the first circulation cavity, and control the fourth piston to move to engage with the second sealing structure to divide the second circulation cavity into a second gas recovery cavity and a second gas passage; and wherein the first gas passage is configured to communicate the first cylinder cavity with the solenoid valve apparatus, and the second gas passage is configured to communicate the second cylinder cavity with the solenoid valve apparatus.

8 . The gas circulation apparatus of claim 6 , wherein the valve core structure further comprises a fifth piston and a sixth piston, the fifth piston being located in the first circulation cavity, and the sixth piston being located in the second circulation cavity; wherein
side walls of the first circulation cavity comprise the first piston and the fifth piston; and side walls of the second circulation cavity comprise the second piston and the sixth piston.

9 . The gas circulation apparatus of claim 6 , wherein the valve core structure further comprises a fifth piston;
side walls of the first circulation cavity comprise the first piston and the fifth piston; and the side walls of the second circulation cavity comprise the second piston and the fifth piston.

10 . The gas circulation apparatus of claim 7 , wherein
the first gas passage comprises a first first-gas-hole and a first second-gas-hole, the first first-gas-hole is arranged on a side wall of the first circulation cavity close to the solenoid valve apparatus side, and the first second-gas-hole is arranged on a side wall of the first circulation cavity close to the first cylinder cavity side; and the second gas passage comprises a second first-gas-hole and a second second-gas-hole, the second first-gas-hole is arranged on a side wall of the second circulation cavity close to the solenoid valve apparatus side, and the second second-gas-hole is arranged on a side wall of the second circulation cavity close to the second cylinder cavity side.

11 . The gas circulation apparatus of claim 1 , wherei

Assignees

• Changxin Memory Tech Inc

Inventors

• Huang Qing

Classifications

• H10P72/0402

  Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence) · CPC title

• Y10T137/2678

  Four port reversing valve · CPC title

• Y10T137/86839

  Four port reversing valves · CPC title

• G05D7/0635 Primary

  by action on throttling means (G05D7/0688, G05D7/0694 take precedence) · CPC title

• F15B11/064 Primary

  with devices for saving the compressible medium · CPC title