Molecule Sensor Component and Method for Manufacturing Same

Patent metadata

Field	Value
Publication number	US-2023017101-A1
Application number	US-202017779995-A
Country	US
Kind code	A1
Filing date	Nov 27, 2020
Priority date	Nov 27, 2019
Publication date	Jan 19, 2023
Grant date	—

Abstract

A method for manufacturing a component and a component are provided for sensing a molecule. The method includes controlling a temperature during a reaction of two gases that react to produce a crystalline film spanning at least a cross-sectional area of a nanoaperture defined by a substrate among an array of nanoapertures aligned with crater structures defined by the substrate. A unique chemical vapor deposition (CVD) method that introduces a first gas and a second gas allows for formation of the crystalline film. When used in a molecule sensor, the component enables a user to record double-stranded DNA (dsDNA) translocations at unprecedented high (e.g., 1 MHz) bandwidths. The method for manufacturing the component enables development of applications requiring single-layer membranes built at- scale and enables high throughput 2-dimensional (2D) nanofluidics and nanopore studies.

First claim

What is claimed is:

1 . A method of manufacturing a component for a molecule sensor, the method comprising:
exposing a substrate to a first gas and a second gas, the substrate defining an array of crater structures and nanoapertures aligned therewith, the gases being at a temperature that induces a reaction that produces a nucleus coupled to a surface of the substrate at the nanoapertures and forms a curvature into the nanoapertures; and controlling the temperature of the first gas and the second gas to continue the reaction at least until a formation of crystalline film of a solid product of the gases, extending from the nucleus, fills a cross-sectional area of at least a subset of the nanoapertures.

2 . The method of manufacturing of claim 1 , wherein controlling the temperature is performed as a function of a diameter of the nanoaperture.

3 . The method of manufacturing of claim 1 , wherein controlling the temperature is performed as a function of a ratio between the diameter of the nanoapertures and a layer of thickness of the crystalline film.

4 . The method of manufacturing of claim 1 , wherein controlling the temperature is performed as a function of a geometry of the cross-sectional area of the nanoaperture, the geometry selected from a group consisting of circular, ovular, rectangular, polygonal, curvilinear, or a combination thereof.

5 . The method of manufacturing of claim 1 , further comprising flowing the first gas with an inert gas across a first surface of the substrate and evenly distributing the second gas across the second surface of the substrate and within the crater structures.

6 . The method of manufacturing of claim 1 , wherein the first gas includes a sulfur vapor and the second gas includes a molybdenum dioxide vapor, and wherein the nucleus includes molybdenum disulfide

7 . The method of manufacturing of claim 1 , wherein the nucleus is coupled to the substrate via a membrane.

8 . The method of manufacturing of claim 1 , wherein the substrate is a target substrate, and further comprising positioning a backing substrate in parallel arrangement with the target substrate, the arrangement of the target substrate and the backing substrate defining a gap in which the first gas flows at a controllable rate into at least a subset of the craters of the array of crater structures, wherein the gap has a dimension that controls a flow rate of the first gas into at least the subset of craters sufficient for the first gas to react with the second gas to produce the crystalline film at at least the subset of the nanoapertures.

9 . The method of manufacturing of claim 6 , further comprising a source substrate, and wherein the method of manufacturing further comprises (i) coating the source substrate with a chemical agent that produces the second gas at a given temperature and (ii) aligning the source substrate in offset parallel arrangement of the target substrate in a plane opposite the target substrate relative to a plane of the backing substrate.

10 . The method of manufacturing of claim 1 , further comprising removing a sacrificial layer that is coupled to the substrate at a location between a given crater structure and a corresponding crystalline film.

11 . The method of manufacturing of claim 1 , further comprising pre-forming the substrate by pre-applying a pattern of positive resist on the substrate and exposing the substrate to an electron beam to form the array of crater structures in the substrate.

12 . The method of manufacturing of claim 1 , further comprising exposing the substrate to a solution containing between about 5% to about 10% hydrogen for up to ten hours at pressure ranging from 50 Torr to 100 Torr at a temperature sufficient to stabilize crystals in the cross-sectional area of the nanoapertures.

13 . The method of manufacturing of claim 1 , wherein exposing the substrate to the first gas and the second gas is performed for a length of time known to induce controlled growth of the crystalline film at the nanoapertures.

14 . The method of manufacturing of claim 1 , further comprising applying an electric field to the crystalline film at a level that produces a nanopore therethrough.

15 . The method of manufacturing of claim 1 , further comprising separating the array of crater structures into individual components that includes a respective portion of the substrate, a respective crater, and crystalline film.

16 . The method of manufacturing of claim 14 , further comprising packaging an individual component into a housing that forms a molecule sensor.

17 . A component for a molecule sensor, the component comprising:
a substrate defining an array of crater structures and nanoapertures aligned therewith; a nucleus coupled to the substrate at the nanoapertures and forms a curvature into the nanoapertures; and a crystalline film extending from the nucleus and filling a cross-sectional area of at least a subset of the nanoapertures.

18 . The component of claim 16 , wherein the crystalline film defines a respective nanopore through which a molecule may pass.

19 . The component of claim 16 , wherein the nanopore has a diameter from about 50 nm to about 200 nm.

20 . The component of claim 16 , wherein the curvature is defined by layers of the nucleus at the nanoaperture.

21 . The component of claim 17 , wherein the nucleus is a product of a reaction between a sulfur vapor and a molybdenum dioxide vapor.

22 . The component of claim 17 , wherein the nucleus is coupled to the substrate via a membrane.

23 . A molecule sensor, comprising:
a substrate defining a crater structure and nanoaperture aligned therewith; a nucleus coupled to the substrate that forms a curvature into the nanoaperture; and a crystalline film that extends from the nucleus and fills a cross-sectional area of the nanoaperture, the crystalline film defining a nanopore with a dimension sufficient to enable a molecule to pass therethrough.

24 . The molecule sensor of claim 23 , wherein the crystalline film is at least partially below a surface of the substrate within the nanoaperture.

25 . The molecule sensor of claim 23 , further comprising:
electrodes that, when energized, cause the molecule to pass through the nanopore; and a sensor configured to detect a change of an electrical signal, the change of the electrical signal indicating that the molecule entered, is within, or passed through the nanopore.

Assignees

• Univ Northeastern

Inventors

• Alibakhshi Mohammadamin
• Wanunu Meni
• Kang Xinqi

Classifications

• B01D2323/35

  Use of magnetic or electrical fields · CPC title

• B01D69/105

  Support pretreatment · CPC title

• B81C1/00182

  Arrangements of deformable or non-deformable structures, e.g. membrane and cavity for use in a transducer · CPC title

• B81B2203/0353

  Holes · CPC title

• B01D67/0088

  Physical treatment with compounds, e.g. swelling, coating or impregnation · CPC title