Substrate treatment method and substrate treatment apparatus
US-2024162032-A1 · May 16, 2024 · US
US2023002912A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2023002912-A1 |
| Application number | US-202017782513-A |
| Country | US |
| Kind code | A1 |
| Filing date | Jun 24, 2020 |
| Priority date | Jun 18, 2020 |
| Publication date | Jan 5, 2023 |
| Grant date | — |
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The present disclosure relates to a workpiece cleaning device and a cleaning method. The workpiece cleaning device comprises: a frame ( 1 ); and a plurality of cleaning tanks disposed on the frame ( 1 ) side by side, comprising a molten salt cleaning tank ( 2 ) for cleaning a workpiece with molten salt, a first rinsing tank ( 5 ) for rinsing the workpiece cleaned with the molten salt, a de-rusting cleaning tank ( 6 ) for cleaning the workpiece rinsed in the first rinsing tank ( 5 ) with a de-rusting agent, a second rinsing tank ( 7 ) for rinsing the workpiece cleaned with the de-rusting agent, and an anti-rust cleaning tank ( 8 ) for cleaning the workpiece rinsed in the second rinsing tank ( 7 ) with anti-rust liquid, which are sequentially disposed from upstream to downstream in terms of procedure.
Opening claim text (preview).
1 . A workpiece cleaning device, comprising: a frame; and a plurality of cleaning tanks, disposed side by side on the frame, the plurality of cleaning tanks comprise a molten salt cleaning tank configured to clean a workpiece with molten salt, a first rinsing tank configured to rinse the workpiece cleaned with the molten salt, a de-rusting cleaning tank configured to clean the rinsed workpiece with a de-rusting agent, a second rinsing tank configured to rinse the workpiece cleaned with the de-rusting agent, and an anti-rust cleaning tank configured to clean the workpiece rinsed in the second rinsing tank with anti-rust liquid, which are sequentially disposed from upstream to downstream in terms of procedure. 2 . The workpiece cleaning device according to claim 1 , wherein the molten salt cleaning tank, the first rinsing tank, the de-rusting cleaning tank, the second rinsing tank and the anti-rust cleaning tank are sequentially arranged. 3 . The workpiece cleaning device according to claim 1 , further comprising a plurality of heating members disposed in one-to-one correspondence with at least some of the plurality of cleaning tanks, the heating members being configured to heat the corresponding cleaning tanks. 4 . The workpiece cleaning device according to claim 1 , further comprising a plurality of vibration members disposed in one-to-one correspondence with at least some of the plurality of cleaning tanks, the vibration members being configured to trigger vibrations of cleaning liquid in the corresponding cleaning tanks. 5 . The workpiece cleaning device according to claim 4 , wherein, the vibration member is disposed outside the cleaning tank; or the vibration member is disposed inside the cleaning tank. 6 . The workpiece cleaning device according to claim 5 , wherein the vibration member is disposed outside the cleaning tank, and a heat insulation board is disposed between the vibration member and the cleaning tank. 7 . The workpiece cleaning device according to claim 1 , further comprising a bearing member connected to the frame and extended into the cleaning tank, so as to bear a workpiece to be cleaned in the cleaning tank and protect the heating member in the cleaning tank. 8 . The workpiece cleaning device according to claim 1 , wherein reinforcing ribs in a form of frame structures, are provided on side walls of the molten salt cleaning tank, to prevent the side walls of the molten salt cleaning tank from being deformed after being heated. 9 . The workpiece cleaning device according to claim 1 , further comprising a plurality of cleaning liquid circulation loops disposed in one-to-one correspondence with at least some of the plurality of cleaning tanks, the cleaning liquid circulation loop comprising: a circulation pipe, comprising an inlet communicated with the cleaning tank and an outlet communicated with the cleaning tank; a filter, disposed in the circulation pipe to filter cleaning liquid flowing therethrough; and an acid and alkali resistant circulation pump, communicated with the circulation pipe and the filter to enable a circular filtration of the cleaning liquid in the corresponding cleaning tank. 10 . The workpiece cleaning device according to claim 9 , wherein the first rinsing tank, the de-rusting cleaning tank, the second rinsing tank and the anti-rust cleaning tank are each provided with the cleaning liquid circulation loop correspondingly. 11 . The workpiece cleaning device according to claim 1 , further comprising a waste water treatment portion communicated with at least some of the plurality of cleaning tanks. 12 . The workpiece cleaning device according to claim 11 , wherein the first rinsing tank, the de-rusting cleaning tank, the second rinsing tank and the anti-rust cleaning tank are each communicated with the waste water treatment portion. 13 . The workpiece cleaning device according to claim 1 , further comprising a waste gas treatment portion communicated with at least some of the plurality of cleaning tanks. 14 . The workpiece cleaning device according to claim 13 , wherein the molten salt cleaning tank, the first rinsing tank, the de-rusting cleaning tank, the second rinsing tank and the anti-rust cleaning tank are each communicated with the waste gas treatment portion. 15 . A cleaning method of the workpiece cleaning device according to claim 1 , comprising: placing a workpiece to be cleaned into the molten salt cleaning tank, heating the molten salt cleaning tank to a first predetermined temperature, and cleaning the workpiece with molten salt by vibration; after the workpiece cleaned by molten salt is cooled to a second predetermined temperature, placing the workpiece into the first rinsing tank, and removing residual molten salt on a surface of the workpiece with cleaning liquid by vibration; placing the workpiece rinsed in the first rinsing tank into the de-rusting cleaning tank, and de-rusting the workpiece with a de-rusting agent by vibration; placing the workpiece cleaned in the de-rusting cleaning tank into the second rinsing tank, and removing residual de-rusting agent on the surface of the workpiece with cleaning liquid by vibration; and placing the workpiece rinsed in the second rinsing tank into an anti-rust cleaning tank, cleaning the surface of the workpiece by vibration, and forming a protective film on the surface of the workpiece with an anti-rust agent. 16 . The cleaning method according to claim 15 , wherein, the first predetermined temperature is not higher than 350° C.; the second predetermined temperature is about 150° C.; the de-rusting agent is one of a weak acid de-rusting agent and a neutral de-rusting agent; the cleaning liquid in the second rinsing tank is one of deionized water and purified water; and the anti-rust agent comprises an aqueous anti-rust agent.
Safety devices · CPC title
Regeneration of waste pickling liquors · CPC title
with neutral solutions · CPC title
the liquid having chemical or dissolving effect · CPC title
with acid solutions · CPC title
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