Pellicle membrane, pellicle, membrane, graphene sheet, and method for producing the graphene sheet

Patent metadata

Field	Value
Publication number	US-2022413379-A1
Application number	US-202217894329-A
Country	US
Kind code	A1
Filing date	Aug 24, 2022
Priority date	Feb 27, 2020
Publication date	Dec 29, 2022
Grant date	—

Abstract

A technique that enables production of pellicle membranes that are better resistant to breakage when subjected to force exerted thereon in the thickness direction thereof and that have high transmittance to light. A pellicle membrane of the present invention includes a plurality of laminated layers, where at least one of the layers is provided with at least one hole having a width or diameter of 10 nm to 500 nm.

First claim

What is claimed is:

1 . A pellicle membrane, comprising:
a plurality of laminated layers, the laminated layers including at least a first layer and a second layer, wherein at least the first layer comprises at least one hole, the at least one hole having a width or diameter of 10 nm to 500 nm.

2 . A pellicle membrane, comprising:
a plurality of laminated layers, the laminated layers including at least a first layer and a second layer, wherein each of at least the first and second layers comprises at least one hole.

3 . The pellicle membrane of claim 1 , wherein the plurality of laminated layers are each comprised of a material selected from graphene, carbon nanotube, polysilicon, and silicon nitride.

4 . The pellicle membrane of claim 1 , wherein the plurality of laminated layers are each comprised of one or more materials that include one or more metal elements selected from zirconium, niobium, molybdenum, tantalum, hafnium, scandium, titanium, vanadium, and chromium.

5 . A pellicle membrane, comprising:
a plurality of laminated layers, the laminated layers including at least a first layer and a second layer, wherein: the laminated layers are each comprised of a material selected from graphene and carbon nanotube; and at least the first layer comprises at least one hole.

6 . The pellicle membrane of claim 1 , wherein the at least one hole has a width or diameter of 500 nm or less.

7 . The pellicle membrane of claim 1 , wherein
the at least one hole of at least the first layer comprises a plurality of holes, the plurality of holes being regularly arranged.

8 . The pellicle membrane of claim 1 , wherein
the at least one hole of at least the first layer comprises a plurality of holes, the plurality of holes being identical in shape to each other.

9 . The pellicle membrane of claim 1 , wherein:
the first and second layers are arranged adjacent to each other; the first layer comprises, as the at least one hole of the first layer, at least a first hole disposed at a first position in the first layer; the second layer comprises, as the at least one hole of the second layer, at least a second hole disposed at a second position in the second layer; and the first position of the at least one first hole is different from the second portion of the at least one second hole.

10 . The pellicle membrane of claim 1 , wherein the laminated layers include at least one hole-free layer provided with no holes.

11 . The pellicle membrane of claim 10 , wherein:
the laminated layers include a first outermost layer and a second outermost layer; and the at least one hole-free layer includes at least one of the first outermost layer and the second outermost layer.

12 . The pellicle membrane of claim 1 , wherein the plurality of laminated layers are each comprised of a graphene sheet.

13 . A pellicle membrane, comprising:
a plurality of laminated graphene sheets, each of the graphene sheets having a true density and an apparent density, the apparent density being less than the true density.

14 . A pellicle membrane, comprising:
a laminate comprising a plurality of laminated graphene sheets, the laminate having a first thickness and a first level of transmittance, the first thickness of the laminate being equal to a second thickness of a reference laminate, the first level of transmittance being higher than a second level of light transmittance of the reference laminate, the reference laminate comprising a plurality of laminated graphene continuous-membrane sheets.

15 . The pellicle membrane of claim 1 , wherein the pellicle membrane has a thickness of 200 nm or less.

16 . A pellicle, comprising:
the pellicle membrane of claim 1 ; and a frame supporting the pellicle membrane.

17 . A membrane, comprising:
a plurality of laminated graphene sheets, the laminated graphene sheets including at least a first graphene sheet and a second graphene sheet, wherein at least the first graphene sheet comprises at least one hole.

18 . The membrane of claim 17 , wherein the at least one hole has a width or diameter of 500 nm or less.

19 . The membrane of claim 17 , wherein:
the first and second graphene sheets are arranged adjacent to each other; the first graphene sheet comprises, as the at least one hole of the first graphene sheet, at least a first hole disposed at a first position in the first graphene sheet; the second graphene sheet comprises, as the at least one hole of the second graphene sheet, at least a second hole disposed at a second position in the second graphene sheet; and the first position of the at least one first hole is different from the second position of the at least one second hole.

20 . The membrane of claim 17 , wherein the laminated graphene sheets include at least one hole-free sheet provided with no holes.

21 . The membrane of claim 20 , wherein:
the laminated graphene sheets include a first outermost sheet and a second outermost sheet; and the at least one hole-free sheet includes at least one of the first outermost sheet and the second outermost sheet.

22 . A membrane, comprising:
a plurality of laminated graphene sheets, each of the graphene sheets having a true density and an apparent density, the apparent density being less than the true density.

23 . A membrane, comprising:
a laminate comprising a plurality of laminated graphene sheets, the laminate having a first thickness and a first level of transmittance, the first thickness of the laminate being equal to a second thickness of a reference laminate, the first level of transmittance being higher than a second level of transmittance of the reference laminate, the reference laminate comprising a plurality of laminated graphene continuous-membrane sheets.

24 . A graphene sheet comprising at least one hole.

25 . A method for producing a graphene sheet, comprising the steps of:
forming at least one mask layer on a metal layer such that the at least one mask layer partially covers the metal layer; and producing graphene on a portion of the metal layer not covered by the mask layer.

26 . A method for producing a graphene sheet, comprising the steps of:
producing graphene on a metal layer having at least one hole.

Assignees

• Toppan Inc

Inventors

• Takada Naoya
• Seki Kazunori
• Kodera Yutaka

Classifications

• G03F1/62 Primary

  Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof · CPC title

• B32B9/04

  comprising such {particular} substance as the main or only constituent of a layer, {which is} next to another layer of {the same or of} a {different material (next to a glass layer B32B17/06; layered products with at least two ceramic layers composed mainly of ceramic B32B18/00)} · CPC title

• C01B2204/04

  Specific amount of layers or specific thickness · CPC title

• C01B32/194

  After-treatment · CPC title

• B32B9/007

  comprising carbon, e.g. graphite, composite carbon · CPC title