Laminate film
US-2015376357-A1 · Dec 31, 2015 · US
Optical filter and method for manufacturing same
US2022381962A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2022381962-A1 |
| Application number | US-202017775412-A |
| Country | US |
| Kind code | A1 |
| Filing date | Dec 3, 2020 |
| Priority date | Dec 11, 2019 |
| Publication date | Dec 1, 2022 |
| Grant date | — |
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Abstract
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Provided is an optical filter capable of reducing the dependency on the angle of light incidence. An optical filter 1 includes a hydrogenated silicon-containing film 4, wherein in a Raman spectrum of the hydrogenated silicon-containing film 4 measured by Raman spectroscopy a ratio (SiH/SiH2) obtained from a ratio between an area of a peak derived from SiH and an area of a peak derived from SiH2 is 0.7 or more.
First claim
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1 . An optical filter comprising a hydrogenated silicon-containing film, wherein in a Raman spectrum of the hydrogenated silicon-containing film measured by Raman spectroscopy a ratio (SiH/SiH 2 ) obtained from a ratio between an area of a peak derived from SiH and an area of a peak derived from SiH 2 is 0.7 or more. 2 . An optical filter comprising a hydrogenated silicon-containing film, wherein a ratio (H/Si) between a content of hydrogen atoms in the hydrogenated silicon-containing film measured by hydrogen forward scattering spectroscopy and a content of silicon atoms in the hydrogenated silicon-containing film measured by Rutherford backscattering spectroscopy is 0.4 or less. 3 . The optical filter according to claim 1 , comprising: a transparent substrate; and a filter portion provided on one of both principal surfaces of the transparent substrate and made of a multi-layer including a high-refractive index film with a relatively high refractive index and a low-refractive index film with a relatively low refractive index, wherein the high-refractive index film is the hydrogenated silicon-containing film. 4 . The optical filter according to claim 3 , wherein the low-refractive index film is a silicon oxide-containing film. 5 . The optical filter according to claim 3 , further comprising an antireflection film provided on the other principal surface of the transparent substrate and containing hydrogenated silicon. 6 . A method for manufacturing the optical filter according to claim 1 , the method comprising the steps of: depositing a silicon film by sputtering; and hydrogenating the silicon film after the step of depositing the silicon film.
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Classifications
comprising an alternation of high and low refractive indexes · CPC title
comprising silicon, hydrogenated silicon or a silicide · CPC title
Underside coating of a glass sheet · CPC title
- C23C14/10Primary
Glass or silica · CPC title
Reactive treatment · CPC title
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- What does patent US2022381962A1 cover?
- Provided is an optical filter capable of reducing the dependency on the angle of light incidence. An optical filter 1 includes a hydrogenated silicon-containing film 4, wherein in a Raman spectrum of the hydrogenated silicon-containing film 4 measured by Raman spectroscopy a ratio (SiH/SiH2) obtained from a ratio between an area of a peak derived from SiH and an area of a peak derived from SiH2…
- Who is the assignee on this patent?
- Nippon Electric Glass Co
- What technology area does this patent fall under?
- Primary CPC classification C23C14/10. Mapped technology areas include Chemistry & Metallurgy.
- When was this patent published?
- Publication date Thu Dec 01 2022 00:00:00 GMT+0000 (Coordinated Universal Time) (A1). Legal status and post-grant events are not shown on this page.
- What related patents are in patentsdb?
- We list 8 related publications on this page (citations in our corpus or others sharing the same primary CPC).