Temperature stabilization of an on-chip temperature-sensitive element
US-2016380637-A1 · Dec 29, 2016 · US
US2022381617A1 · US · A1
| Field | Value |
|---|---|
| Publication number | US-2022381617-A1 |
| Application number | US-202017784289-A |
| Country | US |
| Kind code | A1 |
| Filing date | Dec 21, 2020 |
| Priority date | Dec 27, 2019 |
| Publication date | Dec 1, 2022 |
| Grant date | — |
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A sensor device according to the present disclosure includes a Peltier element, a sensor element thermally connected to a cooling surface of the Peltier element, and a window member that faces a light receiving surface of the sensor element and is made of borosilicate glass.
Opening claim text (preview).
What is claimed is: 1 . A sensor device comprising: a Peltier element; a sensor element thermally connected to a cooling surface of the Peltier element; and a window member that faces a light receiving surface of the sensor element and is made of borosilicate glass. 2 . The sensor device according to claim 1 , wherein an effective pixel region that receives incident light from the window member is arranged on the light receiving surface of the sensor element. 3 . The sensor device according to claim 2 , further comprising a support member arranged between the sensor element and the window member, wherein the support member has an opening that allows passage of the incident light and a frame that supports the window member. 4 . The sensor device according to claim 3 , wherein the frame is arranged outside the effective pixel region in a plan view. 5 . The sensor device according to claim 3 , wherein an area of the opening is larger than an area of the effective pixel region. 6 . The sensor device according to claim 3 , wherein the window member is arranged to cover the opening. 7 . The sensor device according to claim 1 , wherein the cooling surface of the Peltier element is larger than a surface of the sensor element opposite to the light receiving surface. 8 . The sensor device according to claim 1 , further comprising a package substrate that is thermally connected to a heat dissipation surface of the Peltier element, and accommodates the Peltier element and the sensor element. 9 . The sensor device according to claim 8 , further comprising a relay substrate that is arranged between the cooling surface of the Peltier element and the sensor element, and relays electrical connection between the package substrate and the sensor element. 10 . The sensor device according to claim 1 , wherein the sensor element is a short wave infrared (SWIR) image sensor.
comprising Peltier coolers · CPC title
Arrangements for thermal protection or thermal control (integrated devices comprising arrangements for thermal protection H10D89/60) · CPC title
Arrangements of circuitry being divided between different or multiple substrates, chips or circuit boards, e.g. stacked image sensors · CPC title
Elements optimising image sensor operation, e.g. for electromagnetic interference [EMI] protection or temperature control by heat transfer or cooling elements · CPC title
Imaging · CPC title
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