Substrate treatment apparatus and method

Patent metadata

Field	Value
Publication number	US-2022355345-A1
Application number	US-202217734047-A
Country	US
Kind code	A1
Filing date	Apr 30, 2022
Priority date	May 10, 2021
Publication date	Nov 10, 2022
Grant date	—

Abstract

Provided are a substrate treatment apparatus and method for treating a substrate while preventing the surface of the substrate from drying out. The substrate treatment method includes: moving a first nozzle to above a first point on a substrate; ejecting a first substrate treatment liquid onto the substrate from the first nozzle; moving a second nozzle to above the first point; and ejecting a second substrate treatment liquid onto the substrate from the second nozzle, wherein the second nozzle is positioned above a second point on the substrate before moving to above the first point.

First claim

What is claimed is:

1 . A substrate treatment method comprising:
moving a first nozzle to above a first point on a substrate; ejecting a first substrate treatment liquid onto the substrate from the first nozzle; moving a second nozzle to above the first point; and ejecting a second substrate treatment liquid onto the substrate from the second nozzle, wherein the second nozzle is positioned above a second point on the substrate before moving to above the first point.

2 . The method of claim 1 , wherein the first point is a center point of the substrate.

3 . The method of claim 2 , wherein the second point is closer to the first point than to an edge of the substrate.

4 . The method of claim 1 , wherein the second nozzle moves to above the second point when the first nozzle moves to above the first point or moves to above the second point when the first nozzle ejects the first substrate treatment liquid onto the substrate.

5 . The method of claim 1 , wherein the first nozzle moves from above the substrate while the second nozzle moves to above the first point.

6 . The method of claim 1 , wherein the second nozzle is at a different height from the first nozzle.

7 . The method of claim 1 , wherein while the second nozzle moves to above the first point, the first nozzle ejects the first substrate treatment liquid onto the substrate, or the second nozzle ejects the second substrate treatment liquid onto the substrate or ejects deionized water onto the substrate.

8 . The method of claim 1 , wherein the first substrate treatment liquid comprises a component not included in the second substrate treatment liquid.

9 . The method of claim 8 , wherein the first substrate treatment liquid comprises a hydrofluoric acid component, and the second substrate treatment liquid comprises an ammonia water component.

10 . The method of claim 1 , further comprising:
moving an n-th nozzle to above the first point; and ejecting an n-th substrate treatment liquid onto the substrate from the n-th nozzle, wherein n is a natural number equal to or greater than 3.

11 . The method of claim 1 , further comprising ejecting deionized water onto the substrate when the ejecting of the second substrate treatment liquid is finished.

12 . A substrate treatment method comprising:
moving a first nozzle to above a first point on a substrate; ejecting a first substrate treatment liquid onto the substrate from the first nozzle; moving a second nozzle to above the first point; and ejecting a second substrate treatment liquid onto the substrate from the second nozzle, wherein the second nozzle is positioned above a second point on the substrate, which is closer to the first point than to an edge of the substrate, before moving to above the first point, and while the second nozzle moves to above the first point, the first nozzle ejects the first substrate treatment liquid onto the substrate, or the second nozzle ejects the second substrate treatment liquid onto the substrate or ejects deionized water onto the substrate.

13 . A substrate treatment apparatus comprising:
a first nozzle ejecting a first substrate treatment liquid onto a substrate when moving to above a first point on the substrate; and a second nozzle ejecting a second substrate treatment liquid onto the substrate when moving to above the first point, wherein the second nozzle is positioned above a second point on the substrate before moving to above the first point.

14 . The apparatus of claim 13 , wherein the first nozzle and the second nozzle are installed at ends of a first nozzle support and a second nozzle support, respectively.

15 . The apparatus of claim 14 , wherein when the second nozzle moves to above the first point, the first nozzle support and the second nozzle support simultaneously move.

16 . The apparatus of claim 15 , wherein the first nozzle support and the second nozzle support move to cross each other.

17 . The apparatus of claim 13 , wherein the first nozzle and the second nozzle are respectively installed at both ends of a third nozzle support coupled to an end of a first nozzle support.

18 . The apparatus of claim 17 , wherein when the second nozzle moves to above the first point, the third nozzle support rotates or reciprocates.

19 . The apparatus of claim 13 , being an apparatus for cleaning the substrate.

20 . The apparatus of claim 13 , wherein while the second nozzle moves to above the first point, the first nozzle ejects the first substrate treatment liquid onto the substrate, the second nozzle ejects the second substrate treatment liquid onto the substrate, or a third nozzle ejects deionized water onto the substrate.

Assignees

• Semes Co Ltd

Inventors

• Kwon Sang Young
• Kwak Ki Young

Classifications

• H10P72/0414 Primary

  using mainly spraying means, e.g. nozzles · CPC title

• H10P72/7626

  characterised by the construction of the shaft · CPC title

• H10P72/0448

  Apparatus for applying a liquid, a resin, an ink or the like · CPC title

• B05B13/0421

  with rotating spray heads · CPC title

• B05B13/041

  with spray heads reciprocating along a straight line · CPC title