Information processing device, information processing method, and semiconductor manufacturing system

Patent metadata

Field	Value
Publication number	US-2022342311-A1
Application number	US-202217858674-A
Country	US
Kind code	A1
Filing date	Jul 6, 2022
Priority date	Feb 12, 2020
Publication date	Oct 27, 2022
Grant date	—

Abstract

An information processing device includes a processor and a storage device. The processor is configured to acquire data for each parameter provided from each of a light source device which generates pulse light and an exposure apparatus which performs exposure on a wafer with the pulse light output from the light source device, and time data associated with the data; to perform classification, based on the acquired data and time data, for each record of the data associated with same time data for distinguishing whether being data during exposure in which the wafer is irradiated with the pulse light or being data during non-exposure; to associate attribute information indicating an attribute according to the classification with each of the records; to cause the storage device to store the data and the time data associated with the attribute information; and to generate a chart using data read from the storage device.

First claim

What is claimed is:

1 . An information processing device comprising a processor and a storage device,
the processor being configured: to acquire data for each parameter provided from each of a light source device which generates pulse light and an exposure apparatus which performs exposure on a wafer with the pulse light output from the light source device, and time data associated with the data; to perform classification, based on the acquired data and time data, for each record of the data associated with same time data for distinguishing whether being data during exposure in which the wafer is irradiated with the pulse light or being data during non-exposure other than during the exposure; to associate attribute information indicating an attribute according to the classification with each of the records; to cause the storage device to store the data and the time data associated with the attribute information; and to generate a chart using data read from the storage device.

2 . The information processing device according to claim 1 , further comprising a display,
wherein the processor causes the display to display the chart.

3 . The information processing device according to claim 1 ,
wherein the processor generates a table in which the records are arranged in time series based on the time data.

4 . The information processing device according to claim 1 ,
wherein the processor generates the records in which data related to a plurality of parameters is unitized based on the time data.

5 . The information processing device according to claim 1 ,
wherein the attribute information includes exposure information indicating data being during the exposure and non-exposure information indicating data being during the non-exposure, and the processor associates each of the records with the exposure information or the non-exposure information.

6 . The information processing device according to claim 5 ,
wherein the data provided from the exposure apparatus includes wafer identification information for identifying the wafer to be exposed, a scan number for identifying a position of a scan region in the wafer, exposure start time and exposure end time for each wafer, and data related to an exposure condition, and the processor uses, as the exposure information, at least one of wafer number as the wafer identification information and the scan number.

7 . The information processing device according to claim 5 ,
wherein the non-exposure information includes information indicating data being during adjustment oscillation.

8 . The information processing device according to claim 1 ,
wherein the chart is a timeline format chart.

9 . The information processing device according to claim 8 ,
wherein the timeline format chart includes highlight display indicating whether being a period during the exposure or a period during the non-exposure in a distinguishing manner.

10 . The information processing device according to claim 8 ,
wherein the processor causes wafer identification information identifying the wafer to be exposed to be displayed in an area corresponding to a period during the exposure in the timeline format chart in a superimposed manner.

11 . The information processing device according to claim 8 ,
wherein the processor generates a wafer shape mapped image using the data during the exposure for each of the wafers to be exposed, and displays the mapped image in an area corresponding to a period during the exposure in the timeline format chart in a superimposed manner.

12 . The information processing device according to claim 8 ,
wherein the processor causes character information indicating being during the non-exposure to be displayed in an area corresponding to a period during the non-exposure in the timeline format chart in a superimposed manner.

13 . The information processing device according to claim 8 ,
wherein the processor generates a chart related to a parameter during the non-exposure only using the data during the non-exposure among the data during the non-exposure and the data during the exposure, and causes the chart related to the parameter during the non-exposure to be displayed in an area corresponding to a period during the non-exposure in the timeline format chart in a superimposed manner.

14 . The information processing device according to claim 1 ,
wherein the chart is a dayline format chart.

15 . The information processing device according to claim 14 ,
wherein the dayline format chart is a chart showing transition of a number of pulses.

16 . The information processing device according to claim 14 ,
wherein the dayline format chart is a chart displaying transition of a number of pulses during the exposure and transition of a number of pulses during the non-exposure in a distinguishing manner.

17 . The information processing device according to claim 14 ,
wherein the dayline format chart is a chart showing transition of a cumulative number of pulses.

18 . The information processing device according to claim 1 , further comprising a display and an input device,
wherein the processor receives input of information designating a type of a chart to display on the display, and causes the display to display the designated type of the chart in accordance with the information input from the input device.

19 . An information processing method to be executed by a processor, the method comprising:
acquiring data for each parameter provided from each of a light source device which generates pulse light and an exposure apparatus which performs exposure on a wafer with the pulse light output from the light source device, and time data associated with the data; performing classification, based on the acquired data and time data, for each record of the data associated with same time data for distinguishing whether being data during exposure in which the wafer is irradiated with the pulse light or being data during non-exposure other than during the exposure; associating attribute information indicating an attribute according to the classification with each of the records; causing a storage device to store the data and the time data associated with the attribute information; and generating a chart using data read from the storage device.

20 . A semiconductor manufacturing system comprising:
a light source device which generates pulse light; an exposure apparatus which performs exposure on a wafer with the pulse light output from the light source device; and an information processing device, the information processing device including a processor and a storage device, and the processor being configured: to acquire data for each parameter provided from each of a light source device which generates pulse light and an exposure apparatus which performs exposure on a wafer with the pulse light output from the light source device, and time data associated with the data; to perform classification, based on the acquired data and time data, for each record of the data associated with same time data for distinguishing whether being data during exposure in which the wafer is irradiated with the pulse light or being data during non-exposure other than during the exposure; to associate attribute information indicating an attribute according to the classification with each of the records; to cause the storage device to store the data and the time data associated with the attribute information; and to generate a chart using data read

Assignees

• Gigaphoton Inc

Inventors

• Igarashi Yutaka
• Kikuchi Satoru
• Abe Kunihiko
• Minegishi Yuji

Classifications

• G03F7/70491

  Information management, e.g. software; Active and passive control, e.g. details of controlling exposure processes or exposure tool monitoring processes · CPC title

• G03F7/70558

  Dose control, i.e. achievement of a desired dose · CPC title

• G03F7/70041 Primary

  by pulsed sources, e.g. multiplexing, pulse duration, interval control or intensity control · CPC title

• G03F7/20 Primary

  Exposure; Apparatus therefor (photographic printing apparatus for making copies G03B27/00) · CPC title

• H01S5/0014

  Measuring characteristics or properties thereof (measuring techniques per se G01J, G01K, G01N, G01R) · CPC title