Sample carrier for use in a charged particle microscope, and a method of using such a sample carrier in a charged particle microscope

Patent metadata

Field	Value
Publication number	US-2022319801-A1
Application number	US-202217709391-A
Country	US
Kind code	A1
Filing date	Mar 30, 2022
Priority date	Mar 31, 2021
Publication date	Oct 6, 2022
Grant date	—

Abstract

The disclosure relates to a method of preparing a sample in a charged particle microscope. The method comprises the steps of providing a sample carrier having a mechanical support contour and a grid member connected thereto. The method comprises the step of connecting said sample carrier to a mechanical stage device of the charged particle microscope. Additionally, the method comprises the step of providing a sample, for example a chunk-shaped or lamella-shaped sample and connecting said sample to the grid member of the sample carrier. The method allows, in an embodiment, easy and reliable transfer of a sample between a bulk sample and a sample carrier.

First claim

1 . Method of preparing a sample in a charged particle microscope, comprising the steps of:
providing a sample carrier having a mechanical support contour and a grid member connected thereto; connecting said sample carrier to a mechanical stage device of said charged particle microscope; and providing a sample; Characterized by the step of connecting said sample to the grid member of the sample carrier in a condition wherein the mechanical support contour and the grid member are pre-connected to each other.

2 . Method according to claim 1 , comprising the step of connecting said sample to the grid member of the sample carrier in a condition wherein the sample carrier is connected to said mechanical stage device.

3 . Method according to claim 1 , wherein said grid member and said mechanical support contour are integrally formed.

4 . Method according to claim 1 , wherein said charged particle microscope comprises a focused ion beam microscope.

5 . Method according to claim 4 , wherein said step of providing said sample comprises the steps of:
providing a bulk sample; using said focused ion beam for creating said sample in said bulk sample.

6 . Method according to claim 5 , comprising the step of releasing said sample from said bulk sample and transferring said sample to said sample carrier.

7 . Method according to claim 6 , wherein an elongate transport member is used for transferring said sample.

8 . Method according to claim 7 , wherein said elongate transport member defines an angle with a plane defined by said sample carrier, and wherein said angle is kept substantially constant during at least a substantial part of transfer of said sample to said sample carrier.

9 . Method according to claim 8 , wherein translational movement is used for transferring said sample.

10 . Method according to claim 9 , wherein said translational movement is provided by means of relative movement between the elongated manipulator and a mechanical stage of said charged particle microscope.

11 . Method according to claim 7 , wherein said elongate transport member comprises a needle.

12 . Method according to claim 1 , wherein said method is performed under cryogenic conditions.

13 . Sample carrier for use in a method according to claim 1 , comprising:
a mechanical support contour that is arranged to be connectable to a mechanical stage device of the charged particle microscope; and a grid member that is pre-connected to said mechanical support contour and arranged for holding a sample, said grid member being free from any sample in said pre-connected state, and said grid member being arranged for receiving said sample in an assembled state of said sample carrier.

14 . Sample carrier according to claim 13 , wherein said grid member comprises a halfmoon grid.

15 . Sample carrier according to claim 13 , comprising said sample, wherein said sample comprises a lamella-shaped or chunk-shaped sample.

16 . Sample carrier according to claim 13 , wherein said grid member and said mechanical support contour are integrally formed.

Assignees

• Fei Co

Inventors

• Vaske Frantisek
• Kuba Jakub

Classifications

• B01L9/02

  Laboratory benches or tables; Fittings therefor · CPC title

• G01N23/2204

  Specimen supports therefor; Sample conveying means therefore · CPC title

• G01N23/2202 Primary

  Preparing specimens therefor · CPC title

• G01N1/42

  Low-temperature sample treatment, e.g. cryofixation · CPC title

• H01J37/20 Primary

  Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support · CPC title