Fin Field-Effect Transistor (FinFET) Resonator

Patent metadata

Field	Value
Publication number	US-2022311413-A1
Application number	US-202117211391-A
Country	US
Kind code	A1
Filing date	Mar 24, 2021
Priority date	Mar 24, 2021
Publication date	Sep 29, 2022
Grant date	—

Abstract

An integrated circuit may include a resonator formed from FinFET devices. The resonator may include drive cells of alternating polarities and sense cells interposed between the drive cells. Each of the drive cells may include at least two drive transistors having fins coupled to a drive terminal. Each sense cell may include two sense transistors having one fin coupled to a sense terminal and another fin coupled to ground. Adjacent drive and sense cells may be separated by an intervening region that can accommodate a number of fins. Configured in this way, the resonator can exhibit a high quality factor, low phase noise, and can operate at a frequency that is less than the characteristic resonant frequency as defined by the fin pitch of the drive and sense transistors.

First claim

What is claimed is:

1 . A resonator comprising:
a substrate having a linear array of protruding fins characterized by a fin pitch that determines a resonant frequency of the resonator; and a gate conductor formed on the linear array of protruding fins and configured to:
extend in a direction perpendicular to each fin in the linear array of protruding fins; and
form drive cells with respective groups of adjacent fins in the linear array of protruding fins such that the drive cells receive drive signals that generate acoustic waves that travel along the linear array of protruding fins and that pulse at a frequency that is in a subharmonic frequency range of the resonant frequency.

2 . The resonator of claim 1 , wherein the gate conductor is further configured to form sense cells with respective groups of adjacent fins in the linear array of protruding fins such that the sense cells sense the acoustic waves.

3 . The resonator of claim 1 , wherein the frequency at which the acoustic waves pulse is a fraction of the resonant frequency.

4 . The resonator of claim 3 , wherein the frequency at which the acoustic waves pulse is half of the resonant frequency.

5 . The resonator of claim 1 , wherein:
the linear array of protruding fins is characterized by a fin width; a first of the drive cells comprises a pair of adjacent fins in the linear array of protruding fins and is coupled to a positive drive terminal of the drive terminals; a second of the drive cells comprises a pair of adjacent fins in the linear array of protruding fins and is coupled to a negative drive terminal of the drive terminals; the pair of adjacent fins in the first of the drive cells are separated by a fin-to-fin spacing equal to the fin pitch minus the fin width; and the first of the drive cells and the second of the drive cells are separated by an intervening region that extends a distance equal to four times the fin width plus five times the fin-to-fin spacing.

6 . The resonator of claim 5 , wherein the intervening region comprises four fully formed fins in the linear array of protruding fins.

7 . The resonator of claim 5 , wherein the intervening region comprises four partially formed fins in the linear array of protruding fins.

8 . The resonator of claim 5 , wherein the intervening region is devoid of fins.

9 . The resonator of claim 5 , wherein the positive drive terminal and the negative drive terminal are configured to receive a differential drive signal having a drive frequency equal to the frequency at which the acoustic waves pulse.

10 . The resonator of claim 2 , wherein:
the linear array of protruding fins is characterized by a fin width; a first of the sense cells comprises a pair of adjacent fins in the linear array of protruding fins and is coupled to a positive sense terminal of the sense terminals and to a ground terminal; a second of the sense cells comprises a pair of adjacent fins in the linear array of protruding fins and is coupled to a negative sense terminal of the sense terminals and to the ground terminal; the pair of adjacent fins in the first of the sense cells are separated by a fin-to-fin spacing equal to the fin pitch minus the fin width; and the first of the sense cells and the second of the sense cells are separated by an intervening region that extends a distance equal to four times the fin width plus five times the fin-to-fin spacing.

11 . The resonator of claim 10 , wherein the first of the sense cells and one of the drive cells are separated by an additional intervening region that extends a distance equal to four times the fin width plus five times the fin-to-fin spacing.

12 . The resonator of claim 1 , wherein:
the linear array of protruding fins is characterized by a fin width; a first of the drive cells comprises a pair of adjacent fins in the linear array of protruding fins and is coupled to a positive drive terminal of the drive terminals; a second of the drive cells comprises a pair of adjacent fins in the linear array of protruding fins and is coupled to a negative drive terminal of the drive terminals; the pair of adjacent fins in the first of the drive cells are separated by a fin-to-fin spacing equal to the fin pitch minus the fin width; and the first of the drive cells and the second of the drive cells are separated by a distance equal to the fin-to-fin spacing.

13 . The resonator of claim 1 , wherein:
the linear array of protruding fins is characterized by a fin width; a first of the drive cells comprises a group of three adjacent fins in the linear array of protruding fins and is coupled to a positive drive terminal of the drive terminals; a second of the drive cells comprises a group of three adjacent fins in the linear array of protruding fins and is coupled to a negative drive terminal of the drive terminals; adjacent fins in the first of the drive cells are separated by a fin-to-fin spacing equal to the fin pitch minus the fin width; and the first of the drive cells and the second of the drive cells are separated by a distance equal to six times the fin width plus seven times the fin-to-fin spacing.

14 . The resonator of claim 1 , wherein:
the linear array of protruding fins is characterized by a fin width; a first of the drive cells comprises a group of three adjacent fins in the linear array of protruding fins and is coupled to a positive drive terminal of the drive terminals; a second of the drive cells comprises a group of three adjacent fins in the linear array of protruding fins and is coupled to a negative drive terminal of the drive terminals; adjacent fins in the first of the drive cells are separated by a fin-to-fin spacing equal to the fin pitch minus the fin width; and the first of the drive cells and the second of the drive cells are separated by a distance equal to the fin-to-fin spacing.

15 . A resonator comprising:
a substrate having an array of fins characterized by a fin pitch and a fin width; and a gate conductor formed on the array of fins and configured to:
extend in a direction orthogonal to each fin in the array of fins; and
form a plurality of drive cells of alternating polarity with respective groups of n adjacent fins in the array of fins such that the plurality of drive cells receive drive signals that generate acoustic waves that propagate along the array of fins, adjacent fins in each of the plurality of drive cells are separated by a fin-to-fin spacing equal to the fin pitch minus the fin width, and adjacent drive cells in the plurality of drive cells are separated by a distance equal to 2n times the fin pitch plus the fin-to-fin spacing.

16 . The resonator of claim 15 , wherein the gate conductor is further configured to form sense cells with respective groups of n adjacent fins in the array of fins such that the sense cells are interposed between a first group of the plurality of drive cells and a second group of the plurality of drive cells and are used to sense the acoustic waves.

17 . The resonator of claim 15 , wherein n is an even number.

18 . The resonator of claim 15 , further comprising:
an additional gate conductor formed on the array of fins, wherein the additional gate conductor is parallel to the gate conductor and is coupled to the gate conductor.

19 . A resonator comprising:
a substrate; a linear array of columns of vertically stacked conductive structures formed over the substrate, wherein the linear array of columns are characterized by a pitch that determines a resonant frequency of th

Assignees

• Apple Inc

Inventors

• Hager Ehrentraud
• Pretl Harald

Classifications

• H03H9/2426

  in combination with other electronic elements · CPC title

• H03H9/205

  having multiple resonators (crystal tuning forks H03H9/21) · CPC title

• B82Y10/00

  Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic · CPC title

• H03H9/172 Primary

  Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume · CPC title

• H03H9/2405 Primary

  of microelectro-mechanical resonators · CPC title