Probe apparatus

Patent metadata

Field	Value
Publication number	US-2022206042-A1
Application number	US-202017605101-A
Country	US
Kind code	A1
Filing date	Mar 5, 2020
Priority date	Apr 26, 2019
Publication date	Jun 30, 2022
Grant date	—

Abstract

The probe apparatus has a probe (first metal plate) as a signal terminal and a probe (second metal plate) as a ground terminal. A probe holder has a holder main body formed of a conductor, clamps that are formed of a dielectric and capable of clamping the probes and a fixing member and a male screw capable of fixing both clamps, which have clamped the probes, to the holder main body. The probes are clamped by the two clamps in a state where the probes have been aligned along the plate surface direction, parts at front-end portion sides of the probes protrude from the two clamps, and the parts at front-end portion sides are capable of elastic deformation along the plate thickness direction.

First claim

1 . A probe apparatus in which a signal terminal and a ground terminal are held by a terminal holder in a state where the signal terminal and the ground terminal are adjacently disposed, the probe apparatus comprising:
a first metal plate as the signal terminal; and a second metal plate as the ground terminal, wherein the terminal holder includes: a holder main body that is formed of a conductor; a pair of clamps that are formed of a dielectric and are capable of clamping the first metal plate and the second metal plate; and a fixture capable of fixing both clamps, in a state where the first metal plate and the second metal plate have been clamped, to the holder main body, the first metal plate and the second metal plate are clamped by both clamps in a state where the first metal plate and the second metal plate have been aligned along a plate surface direction, parts on front-end sides of the first metal plate and the second metal plate protrude from both clamps, and the parts on the front-end sides are capable of elastic deformation along a plate thickness direction.

2 . The probe apparatus according to claim 1 ,
wherein the fixture includes a fixing bracket formed of a conductor and at least two male threads formed of a conductor, and by screwing the male threads, which have been inserted through thread insertion portions formed in the fixing bracket, into female threads provided on the holder main body, both clamps, which have clamped the first metal plate and the second metal plate, are pressed against and fixed to the holder main body by the fixing bracket.

3 . The probe apparatus according to claim 2 ,
wherein the second metal plate is clamped between the holder main body and the fixing bracket, and the second metal plate, the holder main body, and the fixing bracket are electrically connected to each other.

4 . The probe apparatus according to claim 2 ,
wherein the fixing bracket is provided, at at least two positions, with second parts located on both sides of a first part that is placed into contact with the clamps, has a thread insertion portion formed in each second part, and a thickness, along an insertion direction of the male thread into the thread insertion portions, of third parts located between the first part and the second parts is formed thinner than a thickness of the first part along the insertion direction.

5 . The probe apparatus according to claim 1 ,
wherein a positioning concave, which is shallower than a thickness of the first metal plate and the second metal plate, is formed in at least one of the clamps, and the first metal plate and the second metal plate are fitted into and positioned by the positioning concave.

6 . The probe apparatus according to claim 1 ,
comprising two second metal plates, with the first metal plate disposed between the two second metal plates.

7 . The probe apparatus according to claim 3 ,
wherein the fixing bracket is provided, at at least two positions, with second parts located on both sides of a first part that is placed into contact with the clamps, has a thread insertion portion formed in each second part, and a thickness, along an insertion direction of the male thread into the thread insertion portions, of third parts located between the first part and the second parts is formed thinner than a thickness of the first part along the insertion direction.

8 . The probe apparatus according to claim 2 ,
wherein a positioning concave, which is shallower than a thickness of the first metal plate and the second metal plate, is formed in at least one of the clamps, and the first metal plate and the second metal plate are fitted into and positioned by the positioning concave.

9 . The probe apparatus according to claim 3 ,
wherein a positioning concave, which is shallower than a thickness of the first metal plate and the second metal plate, is formed in at least one of the clamps, and the first metal plate and the second metal plate are fitted into and positioned by the positioning concave.

10 . The probe apparatus according to claim 4 ,
wherein a positioning concave, which is shallower than a thickness of the first metal plate and the second metal plate, is formed in at least one of the clamps, and the first metal plate and the second metal plate are fitted into and positioned by the positioning concave.

11 . The probe apparatus according to claim 7 ,
wherein a positioning concave, which is shallower than a thickness of the first metal plate and the second metal plate, is formed in at least one of the clamps, and the first metal plate and the second metal plate are fitted into and positioned by the positioning concave.

12 . The probe apparatus according to claim 2 ,
comprising two second metal plates, with the first metal plate disposed between the two second metal plates.

13 . The probe apparatus according to claim 3 ,
comprising two second metal plates, with the first metal plate disposed between the two second metal plates.

14 . The probe apparatus according to claim 4 ,
comprising two second metal plates, with the first metal plate disposed between the two second metal plates.

15 . The probe apparatus according to claim 5 ,
comprising two second metal plates, with the first metal plate disposed between the two second metal plates.

16 . The probe apparatus according to claim 7 ,
comprising two second metal plates, with the first metal plate disposed between the two second metal plates.

17 . The probe apparatus according to claim 8 ,
comprising two second metal plates, with the first metal plate disposed between the two second metal plates.

18 . The probe apparatus according to claim 9 ,
comprising two second metal plates, with the first metal plate disposed between the two second metal plates.

19 . The probe apparatus according to claim 10 ,
comprising two second metal plates, with the first metal plate disposed between the two second metal plates.

20 . The probe apparatus according to claim 11 ,
comprising two second metal plates, with the first metal plate disposed between the two second metal plates.

Assignees

• Hioki Electric Works

Inventors

• Kobayashi Masashi

Classifications

• G01R1/06727 Primary

  Cantilever beams · CPC title

• G01R1/06705 Primary

  Apparatus for holding or moving single probes (for moving multiple probe heads or ICs under test G01R31/2886) · CPC title