Processing apparatus, processing method and processing system

Patent metadata

Field	Value
Publication number	US-2022203477-A1
Application number	US-201917604252-A
Country	US
Kind code	A1
Filing date	Apr 24, 2019
Priority date	Apr 24, 2019
Publication date	Jun 30, 2022
Grant date	—

Abstract

A processing apparatus is a processing apparatus that irradiates a surface of an object with processing light to process an object and is provided with: a light irradiation apparatus that emits first processing light to form a first irradiation area on the surface and emits second processing light to form a second irradiation area, at least a part of which overlaps with the first irradiation area, on the surface, and has a change member that is configured to change a state of an overlap between the first and second irradiation areas.

First claim

1 . A processing apparatus that irradiates a surface of an object with processing light to process an object,
the processing apparatus comprising a light irradiation apparatus that emits first processing light to form a first irradiation area on the surface and emits second processing light to form a second irradiation area, at least a part of which overlaps with the first irradiation area, on the surface, the light irradiation apparatus having a change member that is configured to change a state of an overlap between the first and second irradiation areas.

2 . The processing apparatus according to claim 1 emitting the first and second processing lights to form a concave part on the surface of the object.

3 . The processing apparatus according to claim 1 , wherein
the light irradiation apparatus has a displacement member that moves the first and second irradiation areas in one direction that is along the surface of the object, one or a plurality of concave part that extends in the one direction is formed on the surface of the object.

4 . The processing apparatus according to claim 3 , wherein
the change member changes a relative positional relationship between the first and second irradiation areas on the surface of the object in another direction that intersects with the one direction.

5 . The processing apparatus according to claim 4 , wherein
the one concave part is formed by moving the first and second irradiation areas in the one direction by the displacement member, a width of the concave part in another direction is adjusted by changing the state of the overlap by the change member.

6 . The processing apparatus according to claim 4 , wherein
the one concave part is formed by moving the first and second irradiation areas in the one direction by the displacement member, a depth of the concave part in another direction is adjusted by changing the state of the overlap by the change member.

7 . The processing apparatus according to claim 4 , wherein
a first concave part and a second concave part are formed, as the plurality of concave parts, by moving the first and second irradiation areas in the one direction by the displacement member, an interval between the first concave part and the second concave part in another direction is adjusted by changing the relative positional relationship between the first and second irradiation areas in another direction by the change member.

8 . The processing apparatus according to claim 3 , wherein
the displacement member moves the first and second irradiation areas on the surface of the object in another direction that intersects with the one direction, a plurality of concave parts that have a periodical direction in another direction are formed on the surface of the object.

9 . The processing apparatus according to claim 1 , wherein
the light irradiation apparatus has: a first optical system that divides incident light into first light and second light; a second optical system that returns the first light, which is from the first optical system, to the first optical system as third light; and a third optical system that returns the second light, which is from the first optical system, to the first optical system as fourth light, the third light from the second optical system through the first optical system is emitted to the surface as the first processing light, the fourth light from the third optical system through the first optical system is emitted to the surface as the second processing light.

10 . The processing apparatus according to claim 9 , wherein
at least one optical system of the second and third optical systems allows traveling directions of the third light from the second optical system through the first optical system and the fourth light from the third optical system through the first optical system to be different from each other.

11 . The processing apparatus according to claim 9 , wherein
at least one optical system of the second and third optical systems changes an angle between a traveling direction of the third light from the second optical system through the first optical system and a traveling direction of the fourth light from the third optical system through the first optical system.

12 . The processing apparatus according to claim 11 , wherein
the change member includes at least one optical system of the second and third optical systems.

13 . The processing apparatus according to claim 9 , wherein
the light irradiation apparatus has a fourth optical system that is disposed on an optical path of the third light from the second optical system through the first optical system and the fourth light from the third optical system through the first optical system and that condenses the third and fourth lights.

14 . The processing apparatus according to claim 13 , wherein
the light irradiation apparatus has a fifth optical system that is disposed between the first optical system and the fourth optical system and that changes traveling directions of the third light and the fourth lights.

15 . The processing apparatus according to claim 14 , wherein
the light irradiation apparatus has a displacement member that moves the first and second irradiation areas in one direction that is along the surface of the object, the displacement member includes the fifth optical system.

16 . A processing method of irradiating a surface of an object with processing light to process an object,
the processing method including: emitting first processing light to form a first irradiation area on the surface; emitting second processing light to form a second irradiation area, at least a part of which overlaps with the first irradiation area, on the surface; and changing a state of an overlap between the first and second irradiation areas.

17 . A processing apparatus that irradiates an object with processing light to process an object,
the processing apparatus comprising: a first optical system that divides incident light into first light and second light; a second optical system that returns the first light, which is from the first optical system, to the first optical system as third light; and a third optical system that returns the second light, which is from the first optical system, to the first optical system as fourth light, the first optical system emitting the third light from the second optical system and the fourth light from the third optical system as a plurality of processing lights with which different positions on a surface of the object area irradiated, respectively.

18 . A processing apparatus comprising:
a light irradiation apparatus that irradiates an object with a plurality of processing lights to process the object; and an irradiation position change apparatus that changes a relative positional relationship between irradiation positions of the plurality of processing lights on a surface of the object so that a desired pattern structure is formed at the object.

19 . A processing system that irradiates an object with processing light to process the object so that a pattern structure that extends in a desired direction is formed at the object,
the processing system comprising: a first movable apparatus that is movable to change a relative position of an irradiation position of the processing light and a surface of the object in a first direction that is along the surface of the object; and a second movable apparatus that is heavier and/or larger than the first movable apparatus and that is movable t

Assignees

• Nikon Corp

Inventors

• Shiraishi Masayuki
• Sudo Kenta
• Tatsuzaki Yosuke
• Ogasawara Baku

Classifications

• G02B26/105

  with one or more pivoting mirrors or galvano-mirrors (G02B26/101 takes precedence) · CPC title

• G02B26/101

  with both horizontal and vertical deflecting means, e.g. raster or XY scanners (colour television using laser beams scanning a display screen H04N9/3129) · CPC title

• G02B27/14

  operating by reflection only · CPC title

• G02B27/0905

  Dividing and/or superposing multiple light beams · CPC title

• B23K2101/34

  Coated articles {; Surface treated articles} · CPC title