Laser device and leak check method for laser device

Patent metadata

Field	Value
Publication number	US-2022190540-A1
Application number	US-202217686327-A
Country	US
Kind code	A1
Filing date	Mar 3, 2022
Priority date	Oct 4, 2019
Publication date	Jun 16, 2022
Grant date	—

Abstract

A leak check method for a laser device includes exposing a closed space accommodating laser medium gas to the atmosphere, isolating the closed space from the atmosphere after exposing the closed space to the atmosphere, introducing neon-containing gas containing neon gas to the closed space, and determining whether or not the neon gas is leaking to outside of the closed space.

First claim

What is claimed is:

1 . A leak check method for a laser device, comprising:
exposing a closed space accommodating laser medium gas to the atmosphere; isolating the closed space from the atmosphere after exposing the closed space to the atmosphere; introducing neon-containing gas containing neon gas to the closed space; and determining whether or not the neon gas is leaking to outside of the closed space.

2 . The leak check method according to claim 1 ,
wherein the closed space includes a space inside a laser chamber.

3 . The leak check method according to claim 1 , further comprising: before the exposing to the atmosphere,
exhausting gas in the closed space via a fluorine trap, introducing the neon-containing gas into the closed space, and exhausting again gas in the closed space via the fluorine trap.

4 . The leak check method according to claim 1 ,
wherein the determining is performed using a leak detector having sensitivity to neon gas.

5 . The leak check method according to claim 1 ,
wherein the determining is performed based on change in gas pressure in the closed space.

6 . The leak check method according to claim 1 , further comprising: when determined that neon gas is not leaking to the outside of the closed space,
exhausting gas in the closed space, and introducing the neon-containing gas and fluorine-containing gas into the closed space.

7 . A leak check method for a laser device, the laser device including a laser chamber, a first pipe configured to introduce first gas containing neon gas and fluorine gas into the laser chamber, and a second pipe configured to introduce second gas containing neon gas and having fluorine gas concentration lower than that of the first gas into the laser chamber, the leak check method comprising:
introducing third gas containing neon gas and having fluorine gas concentration lower than that of the first gas into a closed space including a space inside the laser chamber; and determining whether or not neon gas is leaking to outside of the closed space.

8 . The leak check method according to claim 7 ,
wherein the third gas is gas having the same composition as the second gas.

9 . The leak check method according to claim 8 ,
wherein the first pipe is connected to a first gas supply source storing the first gas, the second pipe is connected to a second gas supply source storing the second gas, and the third gas is introduced into the closed space from the second gas supply source.

10 . The leak check method according to claim 7 ,
wherein the laser device further includes a third pipe configured to introduce the third gas into the closed space.

11 . The leak check method according to claim 7 ,
wherein the laser device further includes a third pipe configured to introduce the third gas having the same composition as the second gas into the closed space.

12 . The leak check method according to claim 11 ,
wherein the first pipe is connected to a first gas supply source storing the first gas, and the second pipe and the third pipe are connected to a second gas supply source storing the second gas.

13 . The leak check method according to claim 12 ,
wherein a fourth pipe including a branch portion is connected to between the second pipe and the second gas supply source and to between the third pipe and the second gas supply source.

14 . A laser device, comprising:
a laser chamber; a first pipe configured to introduce first gas containing neon gas and fluorine gas into the laser chamber; a second pipe configured to introduce second gas containing neon gas and having fluorine gas concentration lower than that of the first gas into the laser chamber; and a third pipe configured to introduce third gas containing neon gas and having fluorine gas concentration lower than that of the first gas into the laser chamber and the first pipe.

15 . The laser device according to claim 14 ,
wherein the third pipe introduces the third gas having the same composition as the second gas into the laser chamber and the first pipe.

16 . The laser device according to claim 15 ,
wherein the first pipe is connected to a first gas supply source storing the first gas, and the second pipe and the third pipe are connected to a second gas supply source storing the second gas.

17 . The laser device according to claim 16 ,
wherein a fourth pipe including a branch portion is connected to between the second pipe and the second gas supply source and to between the third pipe and the second gas supply source.

18 . The laser device according to claim 14 ,
wherein the third pipe introduces the third gas into the laser chamber, the first pipe, and the second pipe.

19 . The laser device according to claim 14 , further comprising an exhaust device that exhausts gas from the laser chamber and the first pipe.

20 . The laser device according to claim 14 , further comprising an exhaust device that exhausts gas from the laser chamber, the first pipe, and the second pipe.

Assignees

• Gigaphoton Inc

Inventors

• Tsushima Hiroaki
• KAWAGOE Yousuke
• Tanaka Makoto

Classifications

• H01S3/2251

  ArF, i.e. argon fluoride is comprised for lasing around 193 nm · CPC title

• G01M3/226

  for containers, e.g. radiators · CPC title

• H01S3/036 Primary

  Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube {(H01S3/031 takes precedence)} · CPC title

• H01S3/0971

  transversely excited (H01S3/0975 takes precedence) · CPC title

• H01S3/10069

  Memorized or pre-programmed characteristics, e.g. look-up table [LUT] · CPC title